Non-linear actuator suspension for microelectromechanical systems

• US 6,894,420 B2
• Filed: 03/14/2002
• Issued: 05/17/2005
• Est. Priority Date: 03/14/2002
• Status: Expired due to Term

• Current Assignee: NeoPhotonics Corporation (Lumentum Holdings Inc.)
• Original Assignee: MEMX, Inc. (Lumentum Holdings Inc.)
• Inventors: Rodgers, Murray Steven
• Primary Examiner(s): TAMAI, KARL I
• Application Number:
  US10/099,893
• Publication Number:
  US 20030173632A1
• Time in Patent Office: 1,160 Days
• Field of Search: 310/309, 385/18, 735/041.2, 735/048, 200/181
• US Class Current: 310/309
• CPC Class Codes: H02N 1/008 Laterally driven motors, e.g. of the comb-drive type

Abstract

The present invention is generally directed to a method and assembly for supporting an actuation apparatus (e.g. a movable electrostatic comb) of a microelectromechanical (MEM) system. A suspension assembly of the present invention generally resists actuation forces inherent to electrostatically controlled MEM systems by utilizing an opposingly-directed non-linear tensile force. This can be accomplished by utilizing a suspension assembly of the invention including a longitudinal center beam and a plurality of first and second lateral beams extending out from lateral sides of the center beam. When the center beam of the suspension assembly is drawn in a first direction due to the actuation force(s), either or both of the plurality of first lateral beams and the plurality of second lateral beams are stretched to exert a non-linear tensile force having a force vector component generally oriented in a second direction generally opposite the first direction.

Claims

1. A suspension assembly for use in supporting a first actuation element of a microelectromechanical system and allowing movement of said first actuation element relative to a base substrate, said first actuation element comprising a moveable comb of a comb drive including a number of comb fingers interconnected by a comb beam, wherein said suspension assembly comprises:

a longitudinal center bar comprising elongate first and second lateral sides;

a first plurality of first lateral arms extending out from said center bar,

wherein, when said center bar of said suspension assembly is actuated, at least one of said plurality of said first lateral arms are stretched; and

a second plurality of second lateral arms, separate from and interconnected to said first actuation element, extending out from said center bar, wherein said first actuation element is suspended on said substrate by serial interconnection of said second plurality of arms, said center bar and said first plurality of arms.

2. A suspension assembly, as claimed in claim 1, wherein said plurality of said first lateral beams is anchored to said base substrate.

3. A suspension assembly, as claimed in claim 1, further comprising an actuation assembly, wherein said actuation assembly comprises a plurality of actuation rails oriented substantially parallel to said center bar and interconnected with ones of said plurality of said second lateral arms.

4. A suspension assembly, as claimed in claim 3, wherein said actuation assembly is disposed between said base substrate and said plurality of said second lateral beams.

5. A suspension assembly, as claimed in claim 3, further comprising a support assembly, wherein said support assembly comprises a first central bar and a second central bar adjacent to said first central bar and a plurality of third and fourth lateral arms extending out from said first and second central bars.

6. A suspension assembly, as claimed in claim 5, wherein said plurality of said third lateral arms are interconnected with said plurality of said first lateral arms, and wherein said plurality of said third lateral arms are also stretched when said center bar is actuated.

7. A suspension assembly, as claimed in claim 6, wherein said plurality of said fourth lateral arms are interconnected with said plurality of said first lateral arms, and wherein said plurality of said fourth lateral arms are also flexed when said center bar is actuated.

8. A suspension assembly, as claimed in claim 7, wherein said plurality of said actuation beams of said actuation assembly are disposed between and interconnected with said plurality of said first lateral arms and said plurality of said fourth lateral arms.

9. A suspension assembly for use in supporting a first actuation element of a microelectromechanical system and allowing movement of said first actuation element relative to a base substrate, said first actuation element comprising a moveable comb assembly of a comb drive including a number of comb fingers interconnected by a comb beam, wherein said suspension assembly comprises:

a longitudinal center bar comprising elongate first and second lateral sides; and

a first plurality of first lateral arms and a second plurality of second lateral arms extending out from said center bar, wherein, when said center bar of said suspension assembly is actuated, said plurality of said first lateral beams are stretched, and said plurality of said second lateral beams are flexed, wherein said first and second arms are separate from and interconnected to said first actuation element and said first actuation element is suspended on said substrate by serial interconnection of said first arms, said center bar and said second arms.

10. A suspension assembly, as claimed in claim 9, wherein said plurality of said first lateral arms are anchored to said base substrate.

11. A suspension assembly, as claimed in claim 9, wherein said plurality of said second lateral arms are free of restrictive connections to said base substrate.

12. A suspension assembly, as claimed in claim 9, further comprising an actuation assembly separate from and interconnected to said first actuation element, wherein said actuation assembly comprises a plurality of actuation rails oriented substantially parallel to said center bar and interconnected with ones of said plurality of said second lateral arms.

13. A suspension assembly, as claimed in claim 12, wherein said actuation assembly comprises a plurality of third lateral arms extending between and interconnected with said plurality of said actuation rails.

14. A suspension assembly, as claimed in claim 13, wherein said first actuation element is interconnected to at least one of said plurality of said third lateral arms.

15. A suspension assembly, as claimed in claim 12, further comprising a support assembly, wherein said support assembly comprises a first central bar and a second central bar adjacent to said first central bar and a plurality of fourth and fifth lateral arms extending out from said first and second central bars.

16. A suspension assembly, as claimed in claim 15, wherein said plurality of said fourth lateral arms are interconnected with said plurality of said first lateral arms, and wherein said plurality of said fourth lateral arms are also stretched when said center bar is actuated.

17. A suspension assembly, as claimed in claim 15, wherein said plurality of said fifth lateral arms are interconnected with said plurality of said second lateral arms, and wherein said plurality of said fifth lateral arms are also flexed when said center bar is actuated.

18. A suspension assembly, as claimed in claim 17, wherein said plurality of said actuation beams of said actuation assembly are disposed between and interconnected with said plurality of said second lateral arms and said plurality of said fifth lateral arms.

19. A suspension assembly, as claimed in claim 15, wherein said plurality of said fifth lateral arms are free of restrictive connections to said base substrate.

20. A suspension assembly, as claimed in claim 12, wherein said actuation assembly is disposed between said base substrate and said plurality of said first and second lateral arms.

21. A suspension assembly for use in supporting a first actuation element of a microelectromechanical system and allowing movement of said first actuation element of a microelectromechanical system relative to a base substrate, said first actuation element comprising a moveable comb assembly of a comb drive including a number of comb fingers interconnected by a comb beam, wherein said suspension assembly comprises:

a longitudinal center bar comprising elongate first and second lateral sides;

first, second, third, and fourth lateral arms extending out from said center bar, wherein said first and second lateral arms extend from said first lateral side of said center bar and wherein said third and fourth lateral arms extend out from said second lateral side of said center bar, wherein said first, second, third, and fourth lateral arms comprise respective first, second, third, and fourth attachment ends attached to said center bar and respective first, second, third, and fourth peripheral ends disposed most remote from corresponding said first, second, third, and fourth attachment end; and

fifth and sixth lateral arms, separate from and interconnected to said first actuation element via interconnecting structure, extending out from said center bar;

wherein said first, second, third, and fourth peripheral ends of respective said first, second, third, and fourth lateral arms are anchored to the base substrate,

wherein, when said center bar of said suspension assembly is in a resting position, each of said first, second, third, and fourth lateral arms comprises a nominal length,

wherein, when said center bar of said suspension assembly is in a displaced position, each of said first, second, third, and fourth lateral arms comprises a stretched length, and

wherein said stretched length is longer than said resting length of each of said first, second, third, and fourth lateral arms.

22. A suspension assembly, as claimed in claim 21, wherein said longitudinal center bar comprises first and second bars that are joined together.

23. A suspension assembly, as claimed in claim 22, wherein said first and second bars are joined together through a homogenous interface.

24. A suspension assembly, as claimed in claim 21, wherein said first, second, third, and fourth lateral arms are substantially perpendicular to said center bar when said center bar is in a resting position.

25. A suspension assembly, as claimed in claim 21, wherein said fifth arm extends out from said first lateral side of said center bar, wherein said sixth arm extends out from said second lateral side of said center bar, wherein said fifth and sixth arms comprise respective first and second proximal ends connected to said center bar and respective first and second distal ends disposed most remote from corresponding said first and second proximal ends.

26. A suspension assembly, as claimed in claim 25, wherein said first and second distal ends of respective said fifth and sixth arms are free from attachment to said base substrate.

27. A suspension assembly, as claimed in claim 21, wherein said fifth arm is disposed between said first and second lateral arms, and wherein said sixth arm is disposed between said third and fourth lateral arms.

28. A suspension assembly, as claimed in claim 25, wherein, when said center bar of said suspension assembly is in a displaced position, said center bar is displaced by a first distance with respect to said base substrate, and said first and second distal ends of respective said fifth and sixth arms are each displaced by a second distance greater than said first distance with respect to said base substrate.

29. A suspension assembly, as claimed in claim 25, further comprising seventh and eighth arms, wherein said seventh arm extends out from said first lateral side of said center bar, wherein said eighth arm extends out from said second lateral side of said center bar, wherein said seventh and eighth arms comprise respective third and fourth proximal ends connected to said center bar and respective third and fourth distal ends disposed most remote from corresponding said third and fourth proximal ends.

30. A suspension assembly, as claimed in claim 29, further comprising a first actuation rail interconnected with said first and third distal ends of respective said fifth and seventh arms, and a second actuation rail interconnected with said second and fourth distal ends of respective said sixth and eighth arms.

31. A suspension assembly, as claimed in claim 30, wherein said first and second actuation rails are disposed between said fifth, sixth, seventh and eighth arms and said base substrate.

32. A suspension assembly, as claimed in claim 30, wherein said fifth, sixth, seventh and eighth arms are disposed between said first and second actuation rails and said base substrate.

33. A suspension assembly, as claimed in claim 30, wherein said first and second actuation rails are substantially parallel to said center bar.

34. A suspension assembly, as claimed in claim 30, wherein said first actuation rail is substantially perpendicular to said fifth and seventh arms, and wherein said second actuation rail is substantially perpendicular to said sixth and eighth arms.

35. A suspension assembly, as claimed in claim 30, wherein said first actuation element is interconnected with at least one of said first and second actuation rails.

36. A suspension assembly for use in supporting a first actuation element of a microelectromechanical system and allowing movement of said first actuation element relative to a base substrate, said first actuation element comprising a moveable comb assembly of a comb drive including a number of comb fingers interconnected by a comb beam, wherein said suspension assembly comprises:

a longitudinal bar comprising elongate first and second lateral sides;

a first plurality of first later arms extending out from said longitudinal bar, wherein, when said longitudinal bar of said suspension assembly is actuated so as to move relative to a longitudinal axis thereof, at least one of said plurality of said first lateral arms are stretched; and

a second plurality of second lateral arms, separate from and interconnected to said first actuation element, extending out from said longitudinal bar, wherein said first actuation element is suspended on said substrate by serial interconnection of said second plurality of arms, said longitudinal bar and said first plurality of arms.