Micromirror actuator and method of manufacturing the same

• US 6,894,819 B2
• Filed: 05/14/2003
• Issued: 05/17/2005
• Est. Priority Date: 11/19/2002
• Status: Expired due to Fees

• Current Assignee: Samsung Electronics Co. Ltd. (Samsung Group)
• Original Assignee: Samsung Electronics Co. Ltd. (Samsung Group)
• Inventors: Yoon, Yong-seop
• Primary Examiner(s): Shafer, Ricky D.
• Application Number:
  US10/437,012
• Publication Number:
  US 20040095659A1
• Time in Patent Office: 734 Days
• Field of Search: 359/224, 359/225, 359/226, 359/291, 359/295, 359/298, 359/872
• US Class Current: 359/224.1
• CPC Class Codes: B81B 3/0062 Devices moving in two or more dimensions, i.e. having special features which allow movement in more than one dimension
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: Y10S 359/904 Micromirror

Abstract

A micromirror actuator includes a first substrate, at least one lower electrode, a micromirror, a two part second substrate, an upper electrode, a pair of support posts, and torsion bars. In the first substrate, a trench having a predetermined shape is formed. The lower electrode is formed in the trench. The micromirror faces the trench to be operative to pivot due to electrostatic forces and selectively to reflect incident light depending on pivoting positions thereof. The parts of the second substrate are formed on a portion of the first substrate and underneath the micromirror, respectively, and prevent the deformation of the micromirror. The upper electrode is formed on a portion of the second substrate on the first substrate and applies power to the micromirror. The pair of support posts protrude from the first substrate beside both sides of the trench. The torsion bars connect both sides of the micromirror to the pair of support posts.

Claims

1. A micromirror actuator comprising:

a first substrate in which a trench having a predetermined shape is formed;

at least one lower electrode that is formed in the trench;

a micromirror that faces the trench and is operative to pivot due to electrostatic forces and selectively reflects incident light depending on pivoting positions thereof;

a second substrate having two parts that are formed on a portion of the first substrate and underneath the micromirror, respectively, and prevents the deformation of the micromirror;

an upper electrode that is formed on the part of the second substrate disposed on the first substrate and applies power to the micromirror;

a pair of support posts that protrude from the first substrate proximate to sides of the trench; and

torsion bars that connect sides of the micromirror to the pair of support posts to support the micromirror so that the micromirror pivots,

wherein the micromirror pivots due to an electrostatic force generated by a difference between potentials applied to the micromirror and the lower electrode.

2. The micromirror actuator of claim 1, wherein the two parts of the second substrate are formed by dividing a member into a portion that is formed on the first substrate and a portion that is formed underneath the micromirror, using a semiconductor process.

3. The micromirror actuator of claim 1, wherein the upper electrode, the torsion bars, the support posts, and the micromirror form a single body.

4. The micromirror actuator of claim 1, wherein the trench comprises a first trench that is formed in the first substrate to a predetermined depth and a second trench that is formed deeper than the first trench, and the micromirror comprises a reflecting portion that faces the first trench when the micromirror is horizontal and reflects incident light and a driving portion that faces the second trench and is actuated by an electrostatic force.

5. The micromirror actuator of claim 4, wherein the two parts of the second substrate are formed by dividing a member into a portion that is formed on the first substrate and a portion that is formed underneath the micromirror, using a semiconductor process.

6. The micromirror actuator of claim 4, wherein the upper electrode, the torsion bars, the support posts, and the micromirror form a single body.

7. The micromirror actuator of claim 4, wherein the lower electrode comprises:

a first lower electrode that is formed on a bottom of the first trench; and

a second lower electrode that is formed on a bottom of the second trench and one sidewall of the second trench facing the driving portion when the micromirror pivots,

wherein the first lower electrode blocks an electrostatic force between the reflecting portion and the second lower electrode when the micromirror is actuated.

8. The micromirror actuator of claim 7, wherein the two parts of the second substrate are formed by dividing a member into a portion that is formed on the first substrate and a portion that is formed underneath the micromirror, using a semiconductor process.

9. The micromirror actuator of claim 7, wherein the upper electrode, the torsion bars, the support posts, and the micromirror form a single body.