Micromirror actuator and method of manufacturing the same
First Claim
1. A micromirror actuator comprising:
- a first substrate in which a trench having a predetermined shape is formed;
at least one lower electrode that is formed in the trench;
a micromirror that faces the trench and is operative to pivot due to electrostatic forces and selectively reflects incident light depending on pivoting positions thereof;
a second substrate having two parts that are formed on a portion of the first substrate and underneath the micromirror, respectively, and prevents the deformation of the micromirror;
an upper electrode that is formed on the part of the second substrate disposed on the first substrate and applies power to the micromirror;
a pair of support posts that protrude from the first substrate proximate to sides of the trench; and
torsion bars that connect sides of the micromirror to the pair of support posts to support the micromirror so that the micromirror pivots, wherein the micromirror pivots due to an electrostatic force generated by a difference between potentials applied to the micromirror and the lower electrode.
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Accused Products
Abstract
A micromirror actuator includes a first substrate, at least one lower electrode, a micromirror, a two part second substrate, an upper electrode, a pair of support posts, and torsion bars. In the first substrate, a trench having a predetermined shape is formed. The lower electrode is formed in the trench. The micromirror faces the trench to be operative to pivot due to electrostatic forces and selectively to reflect incident light depending on pivoting positions thereof. The parts of the second substrate are formed on a portion of the first substrate and underneath the micromirror, respectively, and prevent the deformation of the micromirror. The upper electrode is formed on a portion of the second substrate on the first substrate and applies power to the micromirror. The pair of support posts protrude from the first substrate beside both sides of the trench. The torsion bars connect both sides of the micromirror to the pair of support posts.
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Citations
9 Claims
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1. A micromirror actuator comprising:
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a first substrate in which a trench having a predetermined shape is formed;
at least one lower electrode that is formed in the trench;
a micromirror that faces the trench and is operative to pivot due to electrostatic forces and selectively reflects incident light depending on pivoting positions thereof;
a second substrate having two parts that are formed on a portion of the first substrate and underneath the micromirror, respectively, and prevents the deformation of the micromirror;
an upper electrode that is formed on the part of the second substrate disposed on the first substrate and applies power to the micromirror;
a pair of support posts that protrude from the first substrate proximate to sides of the trench; and
torsion bars that connect sides of the micromirror to the pair of support posts to support the micromirror so that the micromirror pivots, wherein the micromirror pivots due to an electrostatic force generated by a difference between potentials applied to the micromirror and the lower electrode. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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Specification