Micro-electro-mechanical system (MEMS) variable capacitor apparatuses and related methods
First Claim
1. A micro-electro-mechanical system (MEMS) variable capacitor, comprising:
- (a) first and second electrodes being spaced apart, and at least one of the electrodes being movable when a voltage is applied across the first and second electrodes;
(b) a first conductive plate attached to and electrically isolated from the first electrode; and
(c) a second conductive plate attached to the second electrode and spaced from the first conductive plate for movement of at least one of the plates with respect to the other plate upon application of a predetermined range of voltage across the first and second electrodes to provide a continuous range of capacitance between the first and second plates over the predetermined voltage range.
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Abstract
Micro-Electro-Mechanical System (MEMS) Variable Capacitor Apparatus and Related Methods. According to one embodiment, a MEMS variable capacitor is provided. The variable capacitor can include first and second electrodes being spaced apart, and at least one of the electrodes being movable when a voltage is applied across the first and second electrodes. The variable capacitor can also include a first conductive plate attached to and electrically isolated from the first electrode. Furthermore, the variable capacitor can include a second conductive plate attached to the second electrode and spaced from the first conductive plate for movement of at least one of the plates with respect to the other plate upon application of voltage across the first and second electrodes to change the capacitance between the first and second plates.
83 Citations
32 Claims
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1. A micro-electro-mechanical system (MEMS) variable capacitor, comprising:
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(a) first and second electrodes being spaced apart, and at least one of the electrodes being movable when a voltage is applied across the first and second electrodes;
(b) a first conductive plate attached to and electrically isolated from the first electrode; and
(c) a second conductive plate attached to the second electrode and spaced from the first conductive plate for movement of at least one of the plates with respect to the other plate upon application of a predetermined range of voltage across the first and second electrodes to provide a continuous range of capacitance between the first and second plates over the predetermined voltage range. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A micro-electro-mechanical system (MEMS) variable capacitor, comprising:
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(a) first and second electrodes being spaced apart, and at least one of the electrodes being movable when a voltage is applied across the first and second electrodes;
(b) a torsional beam for providing resistance to the rotation of the first and second electrodes with respect to one another;
(c) a first conductive plate having a non-conductive section for attachment to and electrical isolation from the first electrode; and
(d) a second conductive plate attached to the second electrode and spaced from the first conductive plate for movement of the second conductive plate with respect to the first conductive plate upon application of a predetermined range of voltage across the first and second electrodes to provide a continuous range of capacitance between the first and second plates over the predetermined voltage range. - View Dependent Claims (17, 18, 19, 20, 21, 22, 23, 24)
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25. A variable capacitor apparatus, comprising:
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(a) a plurality of micro-electro-mechanical system (MEMS) variable capacitors, the MEMS variable capacitors comprising;
(i) first and second electrodes being spaced apart, and at least one of the electrodes being movable when a voltage is applied across the first and second electrodes;
(ii) a torsional beam for providing resistance to the rotational of the first and second electrodes with respect to one another;
(iii) a first conductive plate being attached to and electrically isolated from the first electrode; and
(iv) a second conductive plate attached to the second electrode and spaced from the first conductive plate for movement of the second conductive plate with respect to the first conductive plate upon application of a predetermined range of voltage across the first and second electrodes to provided a continuous range of capacitance between the first and second plates over the predetermined voltage range;
(b) first conductive lines attached to the first and second electrodes of the variable capacitors for attachment to a voltage supply; and
(c) second conductive lines attached to the first and second conductive plates of the variable capacitors for attachment to an AC signal. - View Dependent Claims (26)
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27. A method for varying the capacitance of two conductive plates, the method comprising:
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(a) providing a micro-electro-mechanical system (MEMS) variable capacitor comprising;
(i) first and second electrodes being spaced apart, and at least one of the electrodes being movable when a voltage is applied across the first and second electrodes;
(ii) a first conductive plate attached to and electrically isolated from the first electrode; and
(iii) a second conductive plate attached to the second electrode and spaced from the first conductive plate for movement of at least one of the plates with respect to the other plate upon application of voltage across the first and second electrodes to change the capacitance between the first and second plates; and
(b) applying a predetermined range of voltage across the first and second electrodes to change the capacitance between the first and second plates to a continuous capacitance between the first and second plates to a continuous capacitance over the predetermined voltage range. - View Dependent Claims (28, 29, 30, 31, 32)
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Specification