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Micro-electro-mechanical system (MEMS) variable capacitor apparatuses and related methods

  • US 6,897,537 B2
  • Filed: 06/13/2003
  • Issued: 05/24/2005
  • Est. Priority Date: 06/13/2002
  • Status: Active Grant
First Claim
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1. A micro-electro-mechanical system (MEMS) variable capacitor, comprising:

  • (a) first and second electrodes being spaced apart, and at least one of the electrodes being movable when a voltage is applied across the first and second electrodes;

    (b) a first conductive plate attached to and electrically isolated from the first electrode; and

    (c) a second conductive plate attached to the second electrode and spaced from the first conductive plate for movement of at least one of the plates with respect to the other plate upon application of a predetermined range of voltage across the first and second electrodes to provide a continuous range of capacitance between the first and second plates over the predetermined voltage range.

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