Micro-machined electromechanical system (MEMS) accelerometer device having arcuately shaped flexures

• US 6,897,538 B2
• Filed: 08/20/2002
• Issued: 05/24/2005
• Est. Priority Date: 08/20/2001
• Status: Expired due to Fees

• Current Assignee: Honeywell International Inc.
• Original Assignee: Honeywell International Inc.
• Inventors: Eskridge, Mark H.
• Primary Examiner(s): THAI, LUAN C
• Application Number:
  US10/223,947
• Publication Number:
  US 20030036214A1
• Time in Patent Office: 1,008 Days
• Field of Search: 257/415, 735/142.9
• US Class Current: 257/415
• CPC Class Codes: B81B 2201/0235 Accelerometers
• CPC Class Codes: B81B 2203/0181 See-saws
• CPC Class Codes: B81B 2203/058 Rotation out of a plane parallel to the substrate
• CPC Class Codes: B81B 3/0051 For defining the movement, i.e. structures that guide or limit the movement of an element mechanical arrangements for preventing or damping vibration or shock H01H3/60
• CPC Class Codes: B81C 2201/0133 Wet etching
• CPC Class Codes: G01P 15/08 with conversion into electric or magnetic values
• CPC Class Codes: G01P 15/097 by vibratory elements
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 2015/0828 the mass being of the paddle type being suspended at one of its longitudinal ends
• CPC Class Codes: G01P 2015/0831 the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration

Abstract

An apparatus and method for suspending a movable structure form a support structure wherein first and second flat and thin arcuately shaped flexures are formed having spaced apart substantially planar and parallel opposing surfaces, each of the first and second flexures being structured for connection between a support structure and a movable structure to be suspended from the support structure and being aligned along a common axis of rotation between the support structure and the movable structure.

Claims

1. A suspension apparatus, comprising:

a first substantially arcuately shaped flexure having a cross-section that is relatively substantially extended in the plane of the arcuate shape, the first flexure having a first end structured for connection to a support structure and a second end structured for connection to a movable structure to be suspended from the support structure; and

a second substantially arcuately shaped flexure that is arcuately shaped similarly to the first flexure and having a cross-section that is relatively substantially extended in the plane of the arcuate shape and having a first end structured for connection to the support structure and a second end structured for connection to the movable structure, the arcuate shape of the second flexure being aligned with the arcuate shape of the first flexure and in combination with the first flexure forming a hinge having an axis of rotation that extends through the first and second flexures.

2. The suspension member of claim 1 wherein the axis of rotation of the hinge extends through respective portions of the first and second flexure that are aligned substantially cross-wise to the axis of rotation.

3. The suspension member of claim 1 wherein the cross-section that is relatively substantially extended in the plane of the arcuate shape is further extended along the axis of rotation.

4. The suspension member of claim 3 wherein the cross-section that is relatively substantially extended in the plane of the arcuate shape along the axis of rotation is further increasingly extended in the plane of the arcuate shape as a function of increasing distance from the axis of rotation.

5. The suspension member of claim 1 wherein the arcuate shape of the second flexure is aligned facing oppositely from the arcuate shape of the first flexure.

6. The suspension member of claim 1 wherein the arcuate shape of the second flexure is aligned facing toward the arcuate shape of the first flexure.

7. The suspension member of claim 1 further comprising:

a support structure;

a structure to be suspended spaced away from the support structure; and

wherein;

the first ends of the first and second flexures are connected to the support structure, and

the second ends of the first and second flexures are connected to the structure to be suspended.

8. The suspension member of claim 7 wherein the structure to be suspended further comprises an accelerometer sensor mechanism.

9. A suspension apparatus, comprising first and second flat and thin arcuately shaped flexures having spaced apart substantially planar and parallel opposing surfaces, each of the first and second flexures being structured for connection between a support structure and a movable structure to be suspended from the support structure and being aligned along a common axis of rotation between the support structure and the movable structure.

10. The suspension apparatus of claim 9 wherein the first and second flexures are formed in an epitaxial semiconductor layer.

11. The suspension apparatus of claim 10, further comprising:

a support structure formed in the epitaxial semiconductor layer as a sensor frame;

a movable structure formed in the epitaxial semiconductor layer as a proof mass; and

a plurality of the suspension apparatus each comprising first and second flat and thin arcuately shaped flexures having spaced apart substantially planar and parallel opposing surfaces, each of the first and second flexures being connected between the sensor frame and the proof mass and being aligned along a common axis of rotation between the sensor frame and the proof mass for pliantly suspending the proof mass from the sensor frame for rotation about the common axis of rotation.

12. The suspension apparatus of claim 11 wherein each of the first and second flat and thin arcuately shaped flexures of each of the plurality of the suspension apparatus further comprise first and second part circular shaped flexures.

13. The suspension apparatus of claim 12 wherein the first and second part circular shaped flexures further comprise first and second semicircular shaped flexures sharing a common center point, thereby forming a circular suspension apparatus.

14. The suspension apparatus of claim 12 wherein the first and second part circular shaped flexures further comprise first and second semicircular shaped flexures interconnected along an intermediate portion of the part circular shape, thereby forming an “

X”

shaped suspension apparatus.

15. An acceleration sensor, comprising:

an epitaxial layer of semiconductor material having spaced apart substantially planar and parallel opposing surfaces;

a support frame formed in the epitaxial layer;

a proof mass formed in the epitaxial layer adjacent to the support frame for travel in a direction crosswise to the plane of the substrate; and

a pliant suspension member formed in the epitaxial layer and interconnected between the support frame and the proof mass, the suspension member being formed of first and second arcuately shaped flexure members each having a cross-section that is wider in a plane crosswise to the direction of travel of the proof mass relative to a plane aligned with the direction of travel.

16. The acceleration sensor of claim 15, further comprising a plurality of the pliant suspension members formed in the epitaxial layer and interconnected between the support frame and the proof mass.

17. The acceleration sensor of claim 16 wherein the first and second arcuately shaped flexure members of each of the plurality of pliant suspension members formed in the substrate and interconnected between the support frame and the proof mass are configured with an outer arcuate shape of the first flexure member facing oppositely from an outer arcuate shape of the second flexure member.

18. The acceleration sensor of claim 17 wherein the oppositely facing first and second arcuately shaped flexure members of each of the plurality of pliant suspension members are positioned to share a common centerline such as to form a single arcuately shaped suspension member.

19. The acceleration sensor of claim 18 wherein the oppositely facing first and second arcuately shaped flexure members of each of the plurality of pliant suspension members are further configured in a part-circular shape such as to form a single circular suspension member.

20. The acceleration sensor of claim 17 wherein the oppositely facing first and second arcuately shaped flexure members of each of the plurality of pliant suspension members are further configured in a part-circular shape having interconnected corresponding portions intermediate along the part-circular shape such as to form a single “

X”

shaped suspension member.