Microfabricated elastomeric valve and pump systems
First Claim
1. A fluidic logic device comprising:
- an elastomeric block comprising a first elastomeric layer and a second elastomeric layer, the first and the second elastomeric layers each having therein recesses having a depth dimension between 0.01 μ
m and 1000 μ
m, wherein a recess within the first elastomeric layer and a recess in the second elastomeric layer overlap with a membrane portion of one of the elastomeric layers being deflectable into one of the recesses of the elastomeric layers; and
a plurality of microfabricated channels formed in the elastomeric block from the recesses, each channel containing a pressure or flow representing a signal, a change in the pressure or flow in a first channel resulting in a change in the pressure or fluid flow in a second channel consistent with a logic operation.
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Accused Products
Abstract
A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.
274 Citations
8 Claims
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1. A fluidic logic device comprising:
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an elastomeric block comprising a first elastomeric layer and a second elastomeric layer, the first and the second elastomeric layers each having therein recesses having a depth dimension between 0.01 μ
m and 1000 μ
m, wherein a recess within the first elastomeric layer and a recess in the second elastomeric layer overlap with a membrane portion of one of the elastomeric layers being deflectable into one of the recesses of the elastomeric layers; and
a plurality of microfabricated channels formed in the elastomeric block from the recesses, each channel containing a pressure or flow representing a signal, a change in the pressure or flow in a first channel resulting in a change in the pressure or fluid flow in a second channel consistent with a logic operation. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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Specification