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Dressing apparatus and polishing apparatus

  • US 6,899,604 B2
  • Filed: 01/17/2002
  • Issued: 05/31/2005
  • Est. Priority Date: 01/19/2001
  • Status: Active Grant
First Claim
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1. A dressing apparatus for dressing a polishing surface of a polishing table for polishing a surface of a workpiece, the dressing apparatus comprising:

  • a dresser body connected to a dresser drive shaft which is vertically movable;

    a dresser plate which is vertically movable with respect to said dresser body and is tiltable so as to follow the polishing surface;

    a dressing member held by said dresser plate for dressing the polishing surface; and

    a hermetically sealed space defined by said dresser body, said dresser plate and a resilient membrane;

    wherein said dresser body and said dresser plate are connected by said resilient membrane.

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