Electrode refilling mechanism

• US 6,899,801 B2
• Filed: 03/20/2002
• Issued: 05/31/2005
• Est. Priority Date: 03/20/2002
• Status: Expired due to Fees

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Patel, Srujal (Steven), Balisky, Todd A.
• Primary Examiner(s): Olsen, Kaj K.
• Application Number:
  US10/102,523
• Publication Number:
  US 20030178306A1
• Time in Patent Office: 1,168 Days
• Field of Search: 204/400, 204/435, 204/434, 204/286.1, 204/297.01
• US Class Current: 204/435
• CPC Class Codes: G01N 27/301 Reference electrodes

Abstract

A method and apparatus for automatically refilling reference electrodes used in chemical analysis. The apparatus generally includes a reference electrode including an outer chamber with an electrolyte contained therein, an adapter to secure the plumbing to the reference electrode, and a computer to control the refill unit. The refill unit further includes a pump, a refill bottle, and plumbing to connect the refill bottle to the pump and the pump to the reference electrode. The method generally includes drawing refill electrolyte from a refill bottle and pumping the refill electrolyte to the reference electrode. Embodiments of the invention further include an automatically refillable reference electrode. The automatically refillable reference electrode generally includes an outer chamber, with an electrolyte contained therein, a reference junction to provide communication between the electrolyte and an electroplating solution, an adapter to secure an electrolyte refill source to a refill opening in the outer chamber, and an overflow hole to drain excess electrolyte from the outer chamber.

Claims

1. An electrolyte refill unit for automatically refilling reference electrodes used in chemical analysis, comprising:

a reference electrode adapted to analyze a plating solution, comprising an outer chamber with an electrolyte contained therein;

a pump;

a refill bottle;

plumbing to connect the refill bottle to the pump and the pump to the reference electrode;

an adapter, having an adapter overflow hole, to secure the plumbing to the reference electrode; and

a controller to operate the refill unit, wherein the reference electrode includes an overflow hole aligned with the adapter overflow hole.

2. An automatically refillable reference electrolyte unit for use in chemical analysis, comprising:

a reference electrode adapted to analyze a plating solution;

an outer chamber enclosing the reference electrode, the outer chamber being adapted to contain an electrolyte, wherein the outer chamber includes a reference junction adapted to allow a controlled amount of fluid transfer between the electrolyte and a plating solution outside of the chamber;

a pump in fluid communication with the outer chamber;

a controller in electrical communication with the pump to control the flow of electrolyte into the outer chamber, wherein the reference electrode has a refill opening and an overflow hole to allow a release of excess electrolyte from the outer chamber upon refilling; and

a ferrule to provide fluid communication between the pump and the refill opening and an adapter overflow hole aligned with the overflow hole in the reference electrode.

3. A reference electrode unit adapted to facilitate refilling and maintenance, comprising:

an outer chamber adapted to contain a reference electrolyte and enclosing a reference electrode;

a reference junction mounted within the wall of the outer chamber, the reference junction providing limited fluid transfer between the reference electrolyte and an electroplating solution outside the chamber, the reference junction minimizing cross contamination between the reference electrolyte and an electroplating solution while providing a low electrical resistance current pathway therebetween; and

a removable adapter surrounding a portion of the outer chamber and provided with respective fluid passageways for fluid transfer between the outer chamber and a source of refill reference electrolyte, and to permit the release of any excess electrolyte, wherein the removable adapter includes a ferrule aligned with a refill opening in the outer chamber to provide fluid communication with the source of refill reference electrolyte and an adapter overflow hole aligned with an overflow hole in the outer chamber to allow release of excess electrolyte from the outer chamber upon refilling.

4. An adapter securing a reference electrode to facilitate refilling and maintenance of the reference electrode, comprising:

an outer body securing the reference electrode, the reference electrode having an outer chamber and a refill opening, and the outer body having a ferrule formed in the outer body aligned with the refill opening in the reference electrode to provide refill electrolyte to the outer chamber of the reference electrode, an adapter overflow hole aligned with an overflow hole in the outer chamber formed in the outer body to allow for release of excess electrolyte from the outer chamber upon refilling, and a cylindrical open in the outer body adjacent to the ferrule to hold the reference electrode.

5. The adapter of claim 4, wherein the cylindrical opening has a diameter substantially equal to an outer diameter of the outer chamber.

6. The adapter of claim 4, wherein the adapter is formed of a non-conductive material.

7. The adapter of claim 4, wherein the adapter overflow hole is located adjacent the ferrule and aligned with the refill opening in the outer chamber.