Semiconductor device and manufacturing method thereof
First Claim
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1. A semiconductor device comprising:
- a first conductive film formed over an insulating substrate;
an inorganic insulating film covering said first conductive film;
an organic resin film covering said inorganic insulating film;
a contact hole that goes through said inorganic insulating film and said organic resin film;
an edge portion of said inorganic insulating film that comes in contact with a bottom surface of said contact hole is taper like having an angle range of 30 degrees to 80 degrees from a horizontal surface; and
a second conductive film formed over said organic resin film and connected to said first conductive film at a bottom surface of said contact hole.
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Abstract
It is an object of the present invention to provide a manufacturing method of semiconductor device whereby the number of processes is decreased due to simultaneously forming a contact hole in a lamination film of different material and film thickness (inorganic insulating film and organic resin film) by conducting etching once. By setting the selective ratio of dry etching (etching rate of organic resin film 503/etching rate of inorganic insulating film 502 containing nitrogen) from 1.6 to 2.9, preferably 1.9, the shape and the size of the contact holes to be formed even in a film of different material and film thickness can be nearly the same in both of the contact holes.
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Citations
26 Claims
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1. A semiconductor device comprising:
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a first conductive film formed over an insulating substrate;
an inorganic insulating film covering said first conductive film;
an organic resin film covering said inorganic insulating film;
a contact hole that goes through said inorganic insulating film and said organic resin film;
an edge portion of said inorganic insulating film that comes in contact with a bottom surface of said contact hole is taper like having an angle range of 30 degrees to 80 degrees from a horizontal surface; and
a second conductive film formed over said organic resin film and connected to said first conductive film at a bottom surface of said contact hole. - View Dependent Claims (2, 3, 4, 5, 6, 19, 23)
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7. A semiconductor device comprising:
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a substrate;
a source region and a drain region which are provided over said substrate with a channel region provided over said substrate between said source region and said drain region;
a gate electrode provided over said substrate and provided adjacent to said channel region with a gate insulating film between said gate electrode and said channel region;
a wiring provided over and connected with one of said source region and said drain region;
an inorganic insulating film provided over said wiring;
an organic resin film provided over said inorganic insulating film;
a contact hole provided through said inorganic insulating film and said organic resin film;
an edge portion of said inorganic insulating film that comes in contact with a bottom surface of said contact hole is taper like having an angle range of 30 degrees to 80 degrees from a horizontal a pixel electrode provided over said organic resin film and connected with said wiring through said contact hole. - View Dependent Claims (8, 9, 20, 24)
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10. A semiconductor device comprising:
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a first conductive film formed over an insulating substrate;
an inorganic insulating film covering said first conductive film;
an organic resin film covering said inorganic insulating film;
a contact hole that goes through said inorganic insulating film and said organic resin film;
an edge portion of said organic resin film that comes in contact with said inorganic insulating film has an angle range of 50 degrees to 90 degrees from a horizontal surface; and
a second conductive film formed over said organic resin film and connected to said first conductive film at a bottom surface of said contact hole. - View Dependent Claims (11, 12, 13, 14, 15, 21, 25)
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16. A semiconductor device comprising:
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a substrate;
a source region and a drain region which are provided over said substrate with a channel region provided over said substrate between said source region and said drain region;
a gate electrode provided over said substrate and provided adjacent to said channel region with a gate insulating film between said gate electrode and said channel region;
a wiring provided over and connected with one of said source region and said drain region;
an inorganic insulating film provided over said wiring;
an organic resin film provided over said inorganic insulating film;
a contact hole provided through said inorganic insulating film and said organic resin film;
an edge portion of said organic resin film that comes in contact with said inorganic insulating film has an angle range of 50 degrees to 90 degrees from a horizontal surface; and
a pixel electrode provided over said organic resin film and connected with said wiring through said contact hole. - View Dependent Claims (17, 18, 22, 26)
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Specification