Probing device and manufacturing method thereof, as well as testing apparatus and manufacturing method of semiconductor with use thereof
First Claim
1. In the production of a semiconductor device, a method of testing the semiconductor device comprising;
- a positioning step which positions said semiconductor device to be tested at a set position;
a contacting step which contacts a contact electrode having a plurality of projecting contacting tips formed on a first surface of an insulating sheet of a connection part of a testing apparatus with an electrode of said semiconductor device, said plurality of projecting contacting tips being formed by etching a first conductor layer or a second conductor layer on said first conductor layer, said first conductor layer being formed on said first surface of said insulating sheet; and
a signal transferring step which transfers electric signals to said electrode of said semiconductor device from said testing apparatus through said contact electrode having said plurality of projecting contacting tips and a wiring conductor connected with said contact electrode for conducting a test signal on said semiconductor device; and
wherein during said contacting step and said signal transferring step, said plurality of projecting contacting tips on a single contact electrode contact with one electrode of said semiconductor device.
2 Assignments
0 Petitions
Accused Products
Abstract
A probing device for electrically contacting with a plurality of electrodes 3, 6 aligned on an object 1 to be tested so as to transfer electrical signal therewith, comprising: a wiring sheet being formed by aligning a plurality of contact electrodes 21, 110b, corresponding to each of said electrodes, each being planted with projecting probes 20, 110a covered with hard metal films on basis of a conductor thin film 41 formed on one surface of an insulator sheet 22 of a polyimide film by etching thereof, while extension wiring 23, 110c for electrically connecting to said each of said contact electrodes being formed on basis of a conductor thin film formed on either said one surface or the other surface opposing thereto of said insulator sheet of the polyimide film; and means for giving contacting pressure for obtaining electrical conduction between said extension wiring and said object to be tested by contacting tips of said projecting contact probe formed onto said each contact electrode through giving pressuring force between said wiring sheet and said object to be tested.
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Citations
34 Claims
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1. In the production of a semiconductor device, a method of testing the semiconductor device comprising;
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a positioning step which positions said semiconductor device to be tested at a set position;
a contacting step which contacts a contact electrode having a plurality of projecting contacting tips formed on a first surface of an insulating sheet of a connection part of a testing apparatus with an electrode of said semiconductor device, said plurality of projecting contacting tips being formed by etching a first conductor layer or a second conductor layer on said first conductor layer, said first conductor layer being formed on said first surface of said insulating sheet; and
a signal transferring step which transfers electric signals to said electrode of said semiconductor device from said testing apparatus through said contact electrode having said plurality of projecting contacting tips and a wiring conductor connected with said contact electrode for conducting a test signal on said semiconductor device; and
wherein during said contacting step and said signal transferring step, said plurality of projecting contacting tips on a single contact electrode contact with one electrode of said semiconductor device. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. In the production of a wafer having a plurality of aligned semiconductor devices mounted thereon, a method of testing each semiconductor device comprising;
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an aligning step which aligns a plurality of semiconductor devices on a wafer;
a positioning step which positions said wafer to be tested at a set position;
a contacting step which contacts a contact electrode having a plurality of projecting contacting tips formed on a first surface of an insulating sheet of a connection part of a testing apparatus with an electrode of said semiconductor device aligned on said wafer, said plurality of projecting contacting tips being formed by etching a first conductor layer or a second conductor layer on said first conductor layer, said first conductor layer being formed on said first surface of said insulating sheet;
a signal transferring step which transfers electric signals to said electrode of said semiconductor device aligned on said wafer from said testing apparatus through said contact electrode having said plurality of projecting contacting tips and a wiring conductor connected with said contact electrode for conducting a test signal on said semiconductor device; and
a dividing step which divides said wafer into a plurality of parts of individual semiconductor devices; and
wherein during said contacting step and said signal transferring step, said plurality of projecting contacting tips on said contact electrode contact with one electrode of said semiconductor device. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18)
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19. In the production of a wafer having a plurality of aligned semiconductor devices mounted thereon, a method of testing each semiconductor device comprising;
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an aligning step which aligns a plurality of semiconductor devices on a wafer;
a dividing step which divides said wafer into a plurality of parts of individual semiconductor devices;
a positioning step which positions an individual semiconductor device to be tested at a set position;
a contacting step which contacts a contact electrode having a plurality of projecting contacting tips formed on a first surface of an insulating sheet of a connection part of a testing apparatus with an electrode of said semiconductor device, said plurality of projecting contacting tips being formed by etching a first conductor layer or a second conductor layer on said first conductor layer, said first conductor layer being formed on said first surface of said insulating sheet;
a signal transferring step which transfers electric signals to said electrode of said semiconductor device from said testing apparatus through said contact electrode having said plurality of projecting contacting tips and a wiring conductor connected with said contact electrode for conducting a test signal on said semiconductor device; and
wherein during said contacting step and said signal transferring step, said plurality of projecting contacting tips contact with one electrode of said semiconductor device. - View Dependent Claims (20, 21, 22, 23, 24, 25, 26)
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27. In the production of a semiconductor device, a method of testing the semiconductor device comprising;
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a positioning step which positions said semiconductor device to be tested at a set position;
a contacting step which contacts a contact electrode having a plurality of projecting contacting tips formed on a first surface of an insulating sheet of a connection part of a testing apparatus with an electrode of said semiconductor device, said plurality of projecting contacting tips being formed by electroplating with a mask formed on a first conductor layer, said first conductor layer being formed on said first surface of said insulating sheet;
a signal transferring step which transfers electric signals to said electrode of said semiconductor device from said testing apparatus through said contact electrode having said plurality of projecting contacting tips and a wiring conductor connected with said contact electrode for conducting a test signal on said semiconductor device; and
wherein during said contacting step and said signal transferring step, said plurality of projecting contacting tips on a single contact electrode contact with one electrode of said semiconductor device. - View Dependent Claims (28, 29, 30)
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31. A method of manufacturing a semiconductor device comprising;
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a positioning step which positions said semiconductor device at a set position;
a contacting step which contacts a contact electrode having a plurality of projecting contacting tips formed on a first surface of an insulating sheet of a connection part of a testing apparatus with an electrode of said semiconductor device, said plurality of projecting contacting tips being formed by etching a first conductor layer or a second conductor layer on said first conductor layer, said first conductor layer being formed on said first surface of said insulating sheet; and
a signal transferring step which transfers electric signals to said electrode of said semiconductor device from said testing apparatus through said contact electrode having said plurality of projecting contacting tips and a wiring conductor connected with said contact electrode for conducting a test signal on said semiconductor device; and
wherein during said contacting step and said signal transferring step, said plurality of projecting contacting tips on a single contact electrode contact with one electrode of said semiconductor device.
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32. A method of manufacturing a wafer having a plurality of aligned semiconductor devices comprising;
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an aligning step which aligns a plurality of semiconductor devices on a wafer;
a positioning step which positions said wafer at a set position;
a contacting step which contacts a contact electrode having a plurality of projecting contacting tips formed on a first surface of an insulating sheet of a connection part of a testing apparatus with an electrode of said semiconductor device aligned on said wafer, said plurality of projecting contacting tips being formed by etching a first conductor layer or a second conductor layer on said first conductor layer, said first conductor layer being formed on said first surface of said insulating sheet;
a signal transferring step which transfers electric signals to said electrode of said semiconductor device aligned on said wafer from said testing apparatus through said contact electrode having said plurality of projecting contacting tips and a wiring conductor connected with said contact electrode for conducting a test signal on said semiconductor device; and
a dividing step which divides said wafer into a plurality of parts of individual semiconductor devices; and
wherein during said contacting step and said signal transferring step, said plurality of projecting contacting tips on said contact electrode contact with one electrode of said semiconductor device.
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33. A method of manufacturing a wafer having a plurality of aligned semiconductor devices comprising;
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an aligning step which aligns a plurality of semiconductor devices on a wafer;
a dividing step which divides said wafer into a plurality of parts of individual semiconductor devices;
a positioning step which positions an individual semiconductor device to be tested at set position;
a contacting step which contacts a contact electrode having a plurality of projecting contacting tips formed on a first surface of an insulating sheet of a connection part of a testing apparatus with an electrode of said semiconductor device, said plurality of projecting contacting tips being formed by etching a first conductor layer or a second conductor layer on said first conductor layer, said first conductor layer being formed on said first surface of said insulating sheet;
a signal transferring step which transfers electric signals to said electrode of said semiconductor device from said testing apparatus through said contact electrode having said plurality of projecting contacting tips and a wiring conductor connected with said contact electrode for conducting a test signal on said semiconductor device; and
wherein during said contacting step and said signal transferring step, said plurality of projecting contacting tips contact with one electrode of said semiconductor device.
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34. A method of manufacturing a semiconductor device comprising;
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a positioning step which positions said semiconductor device at a set position;
a contacting step which contacts a contact electrode having a plurality of projecting contacting tips formed on a first surface of an insulating sheet of a connection part of a testing apparatus with an electrode of said semiconductor device, said plurality of projecting contacting tips being formed by electroplating with a mask formed on a first conductor layer, said first conductor layer being formed on said first surface of said insulating sheet;
a signal transferring step which transfers electric signals to said electrode of said semiconductor device from said testing apparatus through said contact electrode having said plurality of projecting contacting tips and a wiring conductor connected with said contact electrode for conducting a test signal on said semiconductor device; and
wherein during said contacting step and said signal transferring step, said plurality of projecting contacting tips on a single contact electrode contact with one electrode of said semiconductor device.
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Specification