Multi-tilt micromirror systems with concealed hinge structures
First Claim
Patent Images
1. A micromirror device comprising:
- a substrate with electrical components including address circuitry;
a micromirror; and
a unitary support structure interconnecting said substrate and said micromirror, said support structure including a first torsion member mounted at two locations on said substrate and a second torsion member mounted to opposite ends of said micromirror, said torsion members configured to permit rotation of said micromirror about multiple axes of rotation, wherein said electrical components further comprise electrodes adapted to apply attractive forces to said micromirror; and
wherein at least one of said electrodes is configured with a plurality of portions at different levels, so that portions further from a center of rotation of said micromirror are at a greater distance from the micromirror than portions closer to the center of rotation.
2 Assignments
0 Petitions
Accused Products
Abstract
Multi-tilt mirrors, assemblies and applications of the same, and methods of making. Micromirror devices employing a superstructure that includes a mirror supported over a hinge set above substructure. Various features described are applicable to improve manufacturability, enable further miniaturization of the elements and/or to increase relative light return. Devices can be produced utilizing the various optional features described herein to provide miniaturized, highly controllable optics solutions.
131 Citations
19 Claims
-
1. A micromirror device comprising:
-
a substrate with electrical components including address circuitry;
a micromirror; and
a unitary support structure interconnecting said substrate and said micromirror, said support structure including a first torsion member mounted at two locations on said substrate and a second torsion member mounted to opposite ends of said micromirror, said torsion members configured to permit rotation of said micromirror about multiple axes of rotation, wherein said electrical components further comprise electrodes adapted to apply attractive forces to said micromirror; and
wherein at least one of said electrodes is configured with a plurality of portions at different levels, so that portions further from a center of rotation of said micromirror are at a greater distance from the micromirror than portions closer to the center of rotation. - View Dependent Claims (2)
-
-
3. A micromirror device comprising:
-
a substrate with electrical components including address circuitry;
micromirror; and
a unitary support structure interconnecting said substrate and said micromirror, said support structure including a first torsion member mounted at two locations on said substrate and a second torsion member mounted to opposite ends of said micromirror, said torsion members configured to permit rotation of said micromirror about multiple axes of rotation;
wherein said electrical components further comprise electrodes adapted to apply attractive forces to said micromirror, and wherein said electrodes are oriented so that portions of said electrodes which are further from a center of rotation of said micromirror are at a greater distance from said micromirror than portions closer to the center of rotation. - View Dependent Claims (4, 5, 6)
-
-
7. A micromirror device comprising:
-
a substrate with electrical components including address circuitry;
a micromirror, and a unitary support structure interconnecting said substrate and said micromirror, said support structure including a first torsion member mounted at two locations on said substrate and a second torsion member mounted to opposite ends of said micromirror, said torsion members configured to permit rotation of said micromirror about multiple axes of rotation;
wherein said electrical components further comprise electrodes adapted to apply attractive forces to said micromirror; and
wherein each said electrode comprises a substantially planar electrode, wherein said electrodes are oriented so that portions of said electrodes which are further from a center of rotation of said micromirror are at substantially the same distance from said micromirror as portions closer to the center of rotation, when said micromirror is in a neutral configuration. - View Dependent Claims (8, 9, 10, 11, 12)
-
-
13. A micromirror device comprising:
-
a substrate with electrical components including address circuitry, a micromirror; and
a support structure underlying said micromirror and joining said substrate with said micromirror, said support structure including a first torsion component having first and second ends mounted to said substrate and a second torsion component having first and second ends mounted to opposite ends of said micromirror, said first and second torsion components intersecting one another to provide a universal joint configured to permit rotation of said micromirror about multiple axes of rotation;
wherein said electrical components further comprise electrodes adapted to apply attractive forces to said micromirror, said electrodes being oriented beneath gap locations defined by said torsion components, and wherein said electrodes are oriented so that portions of said electrodes which are further from a center of rotation of said micromirror are at a greater distance from said micromirror than portions closer to the center of rotation. - View Dependent Claims (14, 15, 16, 17, 18, 19)
-
Specification