Vibratory double-axially sensing micro-gyroscope

• US 6,901,799 B2
• Filed: 11/04/2003
• Issued: 06/07/2005
• Est. Priority Date: 07/25/2003
• Status: Active Grant

• Current Assignee: Industrial Technology Research Institute
• Original Assignee: Industrial Technology Research Institute
• Inventors: Hsu, Ming-Hsiu, Chen, Yi-Ru, Chang, Kai-Cheng, Liang, Pei-Fang, Fang, Guang-Chyeng
• Primary Examiner(s): KWOK, HELEN C
• Application Number:
  US10/699,869
• Publication Number:
  US 20050016270A1
• Time in Patent Office: 581 Days
• Field of Search: 735/040.2, 735/040.4, 735/041.2, 735/041.3, 735/041.5
• US Class Current: 73/504.13
• CPC Class Codes: G01C 19/56 Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
• CPC Class Codes: Y10T 74/1275 Electrical

Abstract

The invention is to provide a vibratory double-axially sensing micro-gyroscope, which includes a base, on center of which a supporting hub is arranged, and plural suspending arms are extended outwardly with equal altitude and in radial direction from the supporting hub and, at the outside end of the suspending arm, a platform is formed, and a capacitance sensing electrode or a static-electricity driving electrode is plated respectively at each side of the platform top, below which a static-electricity driving electrode or a capacitance sensing electrode is arranged; take a preferred embodiment of the present invention for example, if the capacitance sensing electrode is arranged at top of the platform and the static-electricity driving electrode is arranged below the platform, then the suspending arm and the platform will vibrate vertically by the attraction of the static-electricity when applying driving voltage, and the vibratory phase difference between two adjacent suspending arms and the platform is 180 degrees; when the gyroscope is rotated horizontally, the suspending arm and the platform will generate horizontal displacement caused by Coriolis force and, by measuring the change of capacitance value, the magnitude of the angular velocity of vibration is obtained; since its structure has symmetrical property, so it has sensing ability in both X or Y axes and, because it has superior stability and is able to resist environment noise and vibration, its sensing capability is enhanced and, since its machining method is simple, so it is adapted for mass production for having lower manufacturing cost.

Claims

1. A vibratory double-axially sensing micro-gyroscope, which includes:

a base, center of which is arranged a supporting hub;

plural suspending arms, which are arranged around the supporting hub and are extended outwardly in radial direction by taking the supporting hub as center;

a platform, which is arranged at an outside end of a suspending arm and is extended toward two sides horizontally by taking the suspending arm as center;

static-electricity driving electrode, which is arranged below the platform at a top of the base corresponding to the platform;

plural capacitance sensing electrodes, which are arranged at a top of the platform; and

reinforcing wall structure is arranged at an inside of the platform and extended toward two sides of a top of the suspending arm, and the reinforcing wall structure is connected to a capacitance sensing electrode, and another reinforcing wall structure is also arranged at an outside of the platform and is not connected to the capacitance sensing electrode.

2. The vibratory double-axially sensing micro-gyroscope according to claim 1, wherein the capacitance sensing electrodes are formed at tops of two sides of the platform by micro-electroplating technique.

3. The vibratory double-axially sensing micro-gyroscope according to claim 1, wherein the suspending arms are positioned at same altitude and are parallel to the base.

4. The vibratory double-axially sensing micro-gyroscope according to claim 1, wherein at least two or even-numbered suspending arms are arranged.

5. The vibratory double-axially sensing micro-gyroscope according to claim 1, wherein the platform is extended symmetrically toward two sides of the suspending arm by taking the axial center of the suspending arm as center.

6. The vibratory double-axially sensing micro-gyroscope according to claim 1, wherein the platform is shaped as an arc having curvature and a discontinuous ring shape is constructed by the platform.

7. The vibratory double-axially sensing micro-gyroscope according to claim 1, wherein the platform is formed as stripe shape and a discontinuous equilateral shape is constructed by the platform.

8. A vibratory double-axially sensing micro-gyroscope, which includes:

a base, center of which is arranged a supporting hub;

plural suspending arms, which are arranged around the supporting hub and are extended outwardly in radial direction by taking the supporting hub as center;

a platform, which is arranged at an outside end of a suspending arm and is extended toward two sides horizontally by taking the suspending arm as center;

static-electricity driving electrode, which is arranged below the platform at a top of the base corresponding to the platform;

plural capacitance sensing electrodes, which are arranged at a top of the platform,

wherein a reinforcing piece is arranged at joining place of both the suspending arm and the platform.

17. The vibratory double-axially sensing micro-gyroscope according to claim 8, wherein the capacitance sensing electrodes are formed at tops of two sides of the platform by micro-electroplating technique.

18. The vibratory double-axially sensing micro-gyroscope according to claim 8, wherein the suspending arms are positioned at same altitude and are parallel to the base.

9. A vibratory double-axially sensing micro-gyroscope, which includes:

a base, center of which is arranged a supporting hub;

plural suspending arms, which are arranged around the supporting hub and are extended outwardly in radial direction by taking a supporting pillar as center;

a platform, which is arranged at an outside end of a suspending arm and is extended toward two sides horizontally by taking the suspending arm as center;

capacitance sensing electrode, which is arranged below the platform at a top of the base corresponding to the platform;

plural static-electricity driving electrodes, which are arranged at a top of the platform; and

a reinforcing piece is arranged at joining place of both the suspending arm and the platform.

10. The vibratory double-axially sensing micro-gyroscope according to claim 9, wherein the static-electricity driving electrodes are formed at tops of two sides of the platform by plating method.

11. The vibratory double-axially sensing micro-gyroscope according to claim 9, wherein the suspending arms are positioned at same altitude and are parallel to the base.

12. The vibratory double-axially sensing micro-gyroscope according to claim 9, wherein at least two or even-numbered suspending arms are arranged.

13. The vibratory double-axially sensing micro-gyroscope according to claim 9, wherein the platform is extended symmetrically toward two sides of the suspending arm by taking an axial center of the suspending arm as center.

14. The vibratory double-axially sensing micro-gyroscope according to claim 9, wherein the platform is shaped as an arc having curvature and a discontinuous ring shape is constructed by the platform.

15. The vibratory double-axially sensing micro-gyroscope according to claim 9, wherein the platform is formed as stripe shape and a discontinuous equilateral shape is constructed by the platform.

16. A vibratory double-axially sensing micro-gyroscope which includes:

a base, center of which is arranged a supporting hub;

plural suspending arms, which are arranged around the supporting hub and are extended outwardly in radial direction by taking a supporting pillar as center;

a platform, which is arranged at an outside end of a suspending arm and is extended toward two sides horizontally by taking the suspending arm as center;

capacitance sensing electrode, which is arranged below the platform at a top of the base corresponding to the platform;

plural static-electricity driving electrodes, which are arranged at a top of the platform; and

reinforcing wall structure is arranged at an inside of the platform and extended toward two sides of the top of the suspending arm, and the reinforcing wall structure is connected to a static-electricity driving electrode, and another reinforcing wall structure is also arranged at an outside of the platform and is not connected to the static-electricity driving electrode.

19. The vibratory double-axially sensing micro-gyroscope according to claim 16, wherein the static-electricity driving electrodes are formed at tops of two sides of the platform by plating method.

20. The vibratory double-axially sensing micro-gyroscope according to claim 16, wherein the suspending arms are positioned at same altitude and are parallel to the base.