Differential in-plane tunneling current sensor

• US 6,901,800 B2
• Filed: 09/20/2004
• Issued: 06/07/2005
• Est. Priority Date: 12/20/2002
• Status: Expired due to Term

• Current Assignee: Robert Bosch GmbH
• Original Assignee: Robert Bosch GmbH
• Inventors: Pan, Zhiyu, Frey, Wilhelm, Niendorf, Andreas
• Primary Examiner(s): CHAPMAN JR, JOHN E
• Application Number:
  US10/946,404
• Publication Number:
  US 20050035289A1
• Time in Patent Office: 260 Days
• Field of Search: 735/141.6, 735/141.8, 731/04, 736/54, 736/58, 250/306, 361/93.1, 361/93.9
• US Class Current: 73/514.16
• CPC Class Codes: G01P 15/0888 for indicating angular acceleration
• CPC Class Codes: G01P 15/0894 by non-contact electron transfer, i.e. electron tunneling
• CPC Class Codes: G01P 15/18 in two or more dimensions

Abstract

A sensor arrangement for measuring a displacement of a proof mass using a tunneling current includes a proof mass body suspended by micro-mechanical beams to permit a mass body movement, at least one integrated electrode tip arranged to be integrated with the proof mass body, and at least one external electrode tip arranged externally to the proof mass body and suspended by micro-mechanical beams to permit an external electrode movement, the at least one external electrode tip further arranged to be in a close proximity to the at least one integrated electrode tip to permit a flow of the tunneling current between the at least one external electrode tip and the at least one integrated electrode tip, in which the displacement of the proof mass causes a change in the tunneling current.

Claims

1. A protecting arrangement to protect electrode tips of a micro-mechanical device, the protecting arrangement comprising:

a first electrode tip;

a second electrode tip arranged opposite to the first electrode tip;

a first actuator arranged to move the first electrode tip in a forward direction toward the second electrode tip;

a second actuator arranged to move the first electrode tip in a backward direction away from the second electrode tip; and

a detection arrangement to detect a sudden increase in a tunnel current flowing between the first electrode tip and the second electrode tip, the sudden increase in the tunnel current indicating an impending collision between the first electrode tip and the second electrode tip.

2. The protecting arrangement of claim 1 wherein the detecting arrangement includes a feedback loop configuration.