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Capacitive manometer having reduced process drift

  • US 6,901,808 B1
  • Filed: 02/11/2003
  • Issued: 06/07/2005
  • Est. Priority Date: 02/12/2002
  • Status: Active Grant
First Claim
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1. A capacitive manometer, comprising:

  • a housing;

    a diaphragm inside the housing;

    a flow passage through which gas enters the housing; and

    a filter in the flow passage, the filter including a body having a downstream end which is spaced less than about 5 mm from the diaphragm, the body having a length along the flow passage which is greater than a maximum transverse dimension of the body, the filter including at least one gas passage extending along the length of the body, the gas passage being capable of removing condensable vapors from the gas.

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