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Electronically controlled vacuum pump

  • US 6,902,378 B2
  • Filed: 03/08/2002
  • Issued: 06/07/2005
  • Est. Priority Date: 07/16/1993
  • Status: Expired due to Fees
First Claim
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1. A vacuum system comprising:

  • a turbomolecular vacuum pump with a drive motor;

    a pressure sensor coupled to the turbomolecular vacuum pump;

    an electronic control module having a programmed processor which controls the turbomolecular pump drive motor including controlling speed of the drive motor in response to sensed pressure, the electronic control module being integral with the turbomolecular vacuum pump;

    a heater that heats the turbomolecular pump; and

    a sensor that senses temperature of the turbomolecular pump, the electronic control module responding to the temperature sensor and driving the heater to control the temperature of the turbomolecular pump.

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