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Method for cleaning charged particles from an object

  • US 6,902,630 B2
  • Filed: 02/07/2002
  • Issued: 06/07/2005
  • Est. Priority Date: 07/24/2000
  • Status: Expired due to Fees
First Claim
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1. A method of cleaning electrostatically bound particles from objects having generally irregular surface features, said method comprising the steps of:

  • providing a cleaning apparatus comprising a partially enclosed enclosure;

    a source of filtered downwardly directed substantially laminar flow air; and

    an ionizing member arranged in said partially enclosed enclosure for bombarding said objects with ions;

    providing an object support member for supporting said objects for cleaning in said cleaning apparatus;

    arranging said objects on said object support member with said generally irregular surface features facing so as to be exposed to air flow;

    positioning said objects on said object support member for exposure inside said partially enclosed enclosure;

    directing a curtain-like stream of air across said generally irregular surface features of said objects;

    ionizing said generally irregular surface features of said objects for a predetermined period of time, said step of ionizing comprising neutralizing static charges on said generally irregular surface features so as to dislodge particles electrostatically bonded on said generally irregular surface features;

    continually exhausting said partially enclosed enclosure from a location below said generally irregular surface features so as to eliminate said particles dislodged from said generally irregular surface features with gravity assistance; and

    , removing said objects from said partially enclosed enclosure.

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