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Dual wavelength method of determining a relative position of a substrate and a template

  • US 6,902,853 B2
  • Filed: 05/11/2004
  • Issued: 06/07/2005
  • Est. Priority Date: 07/16/2000
  • Status: Expired due to Fees
First Claim
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1. A method of determining a relative position of a substrate and a template spaced-apart therefrom, said substrate having substrate alignment marks disposed thereon and said template having template alignment marks disposed thereon, said method comprising:

  • impinging first and second fluxes of light upon said substrate and template alignment marks, with said substrate and template alignment marks being responsive to said first flux of light defining a first response, and being responsive to said second flux of light defining a second response differing from said first response; and

    processing said first and second responses to form a focused image of said substrate and template alignment marks on a common plane, with said focused image indicating said relative position of said substrate and said template.

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