Liquid metal optical relay

• US 6,903,287 B2
• Filed: 04/14/2003
• Issued: 06/07/2005
• Est. Priority Date: 04/14/2003
• Status: Expired due to Fees

• Current Assignee: Agilent Technologies, Inc.
• Original Assignee: Agilent Technologies, Inc.
• Inventors: Wong, Marvin Glenn
• Primary Examiner(s): Barrera, Ramon M.
• Application Number:
  US10/413,267
• Publication Number:
  US 20040201907A1
• Time in Patent Office: 785 Days
• Field of Search: 335 47- 50, 335/57, 335/58, 200/182, 200/183, 200187-194, 200214-236
• US Class Current: 200/182
• CPC Class Codes: G02B 6/3538 based on displacement or deformation of a liquid controlling the intensity of light by displacement or deformation of a fluid in general G02B26/004; fluid-filled lens of variable focal length G02B3/14
• CPC Class Codes: G02B 6/3552 1x1 switch, e.g. on/off switch
• CPC Class Codes: G02B 6/3574 Mechanical force, e.g. pressure variations
• CPC Class Codes: G02B 6/358 Latching of the moving element, i.e. maintaining or holding the moving element in place once operation has been performed; includes a mechanically bistable system

Abstract

An optical relay is disclosed in which a liquid metal droplet is moved within a switching channel formed in relay housing. An optical path passing through the switching channel is blocked or unblocked by motion of the liquid metal droplet that coalesces with one of two additional liquid metal droplets. Motion of the liquid metal droplets is controlled by heaters that control the pressure of an actuation gas in the switching channel. The liquid metal droplets are held in place by surface tension acting on wettable contact pads within the switching channel. The surface tension of the liquid provides a latching mechanism for the relay. The pressure of the actuation gas is increased by direct heating of the gas or by heating a phase-change liquid to cause it to evaporate.

Claims

1. An optical relay comprising:

a relay housing containing a switching channel;

first and second contact pads located in the switching channel and each having a surface wettable by a liquid metal;

a third contact pad located in the switching channel between the first and second contact pads and having a surface wettable by a liquid metal;

a first liquid metal droplet in wetted contact with the first contact pad;

a second liquid metal droplet in wetted contact with the second contact pad;

a third liquid metal droplet in wetted contact with the third contact pad and adapted to move within the switching channel to coalesce with one of the first liquid metal droplet and the second liquid metal droplet;

a first optical path passing through the switching channel between the first and third liquid metal droplets;

a first heater comprising;

a first heater chamber containing a first actuation gas;

a first gas duct coupling the first heater chamber to the switching channel between the first and third contact pads; and

a first heater resistor operable to increase the pressure of the first actuation gas, thereby causing the first and third liquid metal droplets to separate and the second and third liquid metal droplets to coalesce; and

a second heater comprising;

a second heater chamber containing a second actuation gas;

a second gas duct coupling the second heater chamber to the switching channel between the second and third contact pads; and

a second heater resistor operable to increase the pressure of the second actuation gas, thereby causing the second and third liquid metal droplets to separate and the first and third liquid metal droplets to coalesce,

wherein the first optical path is broken when the first and third liquid metal droplets are coalesced and is completed when the first and third liquid metal droplets are separated.

2. An optical relay in accordance with claim 1, wherein the first optical path comprises:

a first optical waveguide configured to transmit light into the switching channel; and

a second optical waveguide, optically aligned with the first optical waveguide and configured to receive light from the first optical waveguide when the first and third liquid metal droplets are separated.

3. An optical relay in accordance with claim 1, further comprising a second optical path, passing between the second and third liquid metal droplets.

4. An optical relay in accordance with claim 1, further comprising:

a first phase-change liquid in wetted contact with the first heater resistor and adapted to change phase when the first heater resistor is energized; and

a second phase-change liquid in wetted contact with the second heater resistor and adapted to change phase when the second heater resistor is energized.

5. An optical relay in accordance with claim 4, further comprising a pressure relief passage opening to the first heater chamber and the second heater chamber.

6. An optical relay in accordance with claim 4, wherein the first and second phase-change liquids are inert, inorganic liquids.

7. An optical relay in accordance with claim 4, wherein the first and second phase-change liquids are liquid metals.

8. An optical relay in accordance with claim 1, wherein the relay housing comprises:

a bottom cap layer;

a circuit layer supporting the first and second heater resistors and electrical connections thereto and containing the first and second gas ducts;

a heater chamber layer positioned between the bottom cap layer and the circuit layer and containing the first and second heater chambers;

a switching layer positioned above the circuit layer and having the switching channel formed therein; and

a top cap layer, positioned above the switching layer.

9. An optical relay in accordance with claim 8, wherein the first optical path comprises:

a first optical waveguide embedded in a first notch in the switching layer and configured to transmit light into the switching channel; and

a second optical waveguide embedded in a second notch in the switching layer and optically aligned with the first optical waveguide, the second optical waveguide being configured to receive light from the first optical waveguide if the first and third liquid metal droplets are separated.

10. An optical relay in accordance with claim 8, wherein:

a first portion of the first, second and third contact pads is formed on the upper surface of the circuit layer;

a second portion of the first, second and third contact pads is formed on the sides of the switching channel in the switching layer; and

a third portion of the first, second and third contact pads is formed on the lower surface of the top cap layer.

11. An optical relay in accordance with claim 1, wherein the liquid metal is one of mercury and an alloy containing gallium.

12. A method for switching a first optical path in a optical relay having a first liquid metal droplet moveable within a switching channel, the method comprising:

coupling a first input optical signal to a first input optical waveguide of the optical relay, the first input optical waveguide being optically aligned with a first output optical waveguide to form the first optical path;

if the first optical path is to be completed;

moving the first liquid metal droplet out of the first optical path, whereby the first input optical waveguide is optically coupled to the first output optical waveguide; and

if the first optical path is to be broken;

moving the first liquid metal droplet into the first optical path, whereby the first input optical waveguide is optically decoupled from the first output optical waveguide,

wherein moving the first liquid metal droplet comprises pressuring an actuation gas in the switching channel to create a pressure difference across the first liquid metal droplet.

13. A method in accordance with claim 12, wherein the first liquid metal droplet is in wetted contact with a first contact pad positioned in the switching channel between a second contact pad and a third contact pad and wherein:

moving the first liquid metal droplet into the optical path causes the first liquid metal droplet to coalesce with a second liquid metal droplet in wetted contact with the second contact pad; and

moving the first liquid metal droplet out of the optical path causes the first liquid metal droplet to coalesce with a third liquid metal droplet in wetted contact with the third contact pad.

14. A method in accordance with claim 13, wherein the first optical path passes between the first contact pad and the second contact pad, further comprising

coupling a second input optical signal to a second input optical waveguide of the optical relay, the second input optical waveguide being optically aligned with a second output optical waveguide to form a second optical path through the switching channel between the first contact pad and the third contact pad, the second optical path being broken when the first optical path is completed and the second optical path being completed when the first optical path is broken.

15. A method in accordance with claim 12, wherein pressuring the actuation gas in the switching channel comprises:

if the optical path is to be completed;

energizing a first heater resistor in a first heater chamber, coupled by a first gas duct to the switching channel, to increase the pressure of the actuation gas in the switching channel between first and second contact pads; and

if the optical path is to be broken;

energizing a second heater resistor in a second heater chamber, coupled by a second gas duct to the switching channel, to increase the pressure of the actuation gas in the switching channel between the first and a third contact pads.

16. A method in accordance with claim 15, further comprising:

if the optical path is to be completed;

de-energizing the first heater resistor after the first liquid metal droplet has been moved out of the optical path; and

if the optical path is to be broken;

de-energizing the second heater resistor after the first liquid droplet has been moved into the optical path.

17. A method in accordance with claim 12, wherein pressuring the actuation gas in the switching channel comprises:

if the optical path is to be completed;

heating a first phase-change liquid in a first heater chamber, coupled by a first gas duct to the switching channel, to cause the first phase-change liquid to evaporate thereby increasing the pressure of the actuation gas in the switching channel between first and second contact pads; and

if the optical path is to be broken;

heating a second phase-change liquid in a second heater chamber, coupled by a second gas duct to the switching channel, to cause the second phase-change liquid to evaporate thereby increasing the pressure of the actuation gas in the switching channel between the first and a third contact pads.

18. An optical relay comprising:

a relay housing containing a switching channel;

first and second contact pads located in the switching channel and each having a surface wettable by a liquid metal;

a third contact pad located in the switching channel between the first and second contact pads and having a surface wettable by a liquid metal;

a first liquid metal droplet in wetted contact with the first contact pad;

a second liquid metal droplet in wetted contact with the second contact pad;

a third liquid metal droplet in wetted contact with the third contact pad and adapted to move within the switching channel to coalesce with one of the first liquid metal droplet and the second liquid metal droplet;

a first optical path passing through the switching channel between the first and third liquid metal droplets;

a first heater element operable to increase the pressure of a first actuation gas, thereby causing the first and third liquid metal droplets to separate and the second and third liquid metal droplets to coalesce; and

a second heater element operable to increase the pressure of a second actuation gas, thereby causing the second and third liquid metal droplets to separate and the first and third liquid metal droplets to coalesce,

wherein the first optical path is broken when the first and third liquid metal droplets are coalesced and is completed when the first and third liquid metal droplets are separated.

19. An optical relay in accordance with claim 18, the first heater element comprising:

a first heater chamber containing a first actuation gas;

a first gas duct coupling the first heater chamber to the switching channel between the first and third contact pads; and

a first heater resistor operable to increase the pressure of the first actuation gas, thereby causing the first and third liquid metal droplets to separate and the second and third liquid metal droplets to coalesce; and

the second heater element comprising;

a second heater chamber containing a second actuation gas;

a second gas duct coupling the second heater chamber to the switching channel between the second and third contact pads; and

a second heater resistor operable to increase the pressure of the second actuation gas, thereby causing the second and third liquid metal droplets to separate and the first and third liquid metal droplets to coalesce.

20. An optical relay comprising:

a relay housing containing a switching channel;

first and second contact pads located in the switching channel and each having a surface wettable by a liquid metal;

a third contact pad located in the switching channel between the first and second contact pads and having a surface wettable by a liquid metal;

a first liquid metal droplet in wetted contact with the first contact pad;

a second liquid metal droplet in wetted contact with the second contact pad;

a third liquid metal droplet in wetted contact with the third contact pad and adapted to move within the switching channel to coalesce with one of the first liquid metal droplet and the second liquid metal droplet;

a first optical path passing through the switching channel between the first and third liquid metal droplets;

means for increasing the pressure of a first actuation gas to cause the first and third liquid metal droplets to separate and the second and third metal droplets to coalesce; and

means for increasing the pressure of a second actuation gas to cause the second and third liquid metal droplets to separate and the first and third metal droplets to coalesce,

wherein the first optical path is broken when the first and third liquid metal droplets are coalesced and is completed when the first and third liquid metal droplets are separated.

21. An optical relay in accordance with claim 20, wherein the means for increasing the pressure of the first actuation gas couples a first heater chamber to the switching channel between the first and third contact pads and the means for increasing the pressure of the second actuation gas couples a second heater chamber to the switching channel between the second and third contact pads.