Stage assembly having a follower assembly

• US 6,903,346 B2
• Filed: 07/11/2001
• Issued: 06/07/2005
• Est. Priority Date: 07/11/2001
• Status: Expired due to Fees

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Watson, Douglas C., Sogard, Michael R., Kovalerchik, Michael
• Primary Examiner(s): Pham, Hai
• Assistant Examiner(s): NGUYEN, LAM S
• Application Number:
  US09/903,307
• Publication Number:
  US 20030010935A1
• Time in Patent Office: 1,427 Days
• Field of Search: 356/500, 250/442.11, 250/548, 250/492.21, 250/441.11, 108/40, 108/41, 108/68, 108/78, 108/143, 749/900.9, 248/657, 310/12
• US Class Current: 250/442.11
• CPC Class Codes: G03F 7/707 Chucks, e.g. chucking or un-chucking operations or structural details
• CPC Class Codes: G03F 7/70708 being electrostatic; Electrostatically deformable vacuum chucks
• CPC Class Codes: G03F 7/70716 Stages
• CPC Class Codes: G03F 7/70816 Bearings
• CPC Class Codes: H01J 37/20 Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support

Abstract

A stage assembly (10) for moving and positioning a device (26) includes a device stage (14), a stage mover assembly (16), and a follower assembly (18). The stage mover assembly (16) moves the device stage (14) along an X axis, along a Y axis and about a Z axis. The follower assembly (18) includes a first follower guide (76) and a first follower frame (80). The first follower guide (76) supports the first follower frame (80) and allows the first follower frame (80) to move along the Y axis. Further, the first follower frame (80) supports the device stage (14) and allows the device stage (14) to move along the Y axis, along the X axis, and about the Z axis. Importantly, the first follower frame (80) is moved along the Y axis with a first follower mover (84). With this design, the device stage (14) can be made relatively thin vertically and the control lines (20) to the device stage (14) can be relatively short.

Claims

1. A stage assembly that moves a device along a Y axis, the stage assembly comprising:

a device stage that retains the device;

a stage mover assembly connected to the device stage, the stage mover assembly moving the device stage along the Y axis, the stage mover assembly generating a reaction force that is transferred to a reaction component; and

a first follower frame that constrains motion of the device stage along a Z axis that is orthogonal to the Y axis, the first follower frame being moved substantially concurrently with and to substantially follow the movement of the device stage along the Y axis;

wherein the reaction component is not directly connected to the first follower frame.

2. The stage assembly of claim 1 wherein the stage mover assembly moves the device stage along an X axis relative to the first follower frame.

3. The stage assembly of claim 1 further comprising a first follower mover that moves the first follower frame along the Y axis.

4. The stage assembly of claim 3 wherein the first follower mover moves the first follower frame along the Y axis substantially concurrently as the stage mover assembly moves the device stage along the Y axis.

5. The stage assembly of claim 3 wherein the first follower mover does not direct a force that acts on the device stage.

6. The stage assembly of claim 1 wherein the first follower frame includes a stage channel for receiving a portion of the device stage and a pair of opposed stage fluid bearings that support the device stage relative to the stage channel and allow device stage to move along an X axis relative to the first follower frame.

7. The stage assembly of claim 1 further comprising a first follower guide that supports the first follower frame.

8. The stage assembly of claim 7 further comprising a first pair of opposed, guide fluid bearings and a second pair of opposed, guide fluid bearings that support the first follower frame relative to the first follower guide along an X axis and along the Z axis and allow for movement of the first follower frame relative to the first follower guide along the Y axis.

9. The stage assembly of claim 1 wherein the first follower frame supports the device stage near a first table side of the device stage.

10. The stage assembly of claim 1 further comprising a second follower frame that supports the device stage along the Z axis, the second follower frame moving along the Y axis.

11. The stage assembly of claim 10 wherein the first follower frame and the second follower frame are moved substantially concurrently with the device stage along the Y axis.

12. The stage assembly of claim 10 wherein the first follower frame supports the device stage near a first table side of the device stage and the second follower frame supports the device stage near a second table side of the device stage.

13. The stage assembly of claim 12 wherein the stage mover assembly includes a first Y stage mover and a second Y stage mover and the follower frames are positioned between the first Y stage mover and the second Y stage mover.

14. The stage assembly of claim 10 wherein the first follower frame and the second follower frame support the device stage in a kinematic manner.

15. The stage assembly of claim 1 wherein the device stage includes a first table section and a second table section that is movable relative to the first table section to separate the device stage.

16. The stage assembly of claim 15 wherein each of the table sections retains at least one device.

17. The stage assembly of claim 1 further comprising a line that is connected to the device stage, the line being secured to the first follower frame.

18. The stage assembly of claim 17 wherein the line provides fluid to the device stage.

19. The stage assembly of claim 17 where the line carries electrical current.

20. An exposure apparatus including the stage assembly of claim 1.

21. A device manufactured with the exposure apparatus according to claim 20.

22. A wafer on which an image has been formed by the exposure apparatus of claim 20.

23. The stage assembly of claim 1 wherein the stage mover assembly does not direct a force that acts on the first follower frame.

24. The stage assembly of claim 1 further comprising a stage fluid bearing that supports the device stage relative to the first follower frame.

25. The stage assembly of claim 1 further comprising a pair of opposed stage fluid bearings that support the device stage relative to the first follower frame.

26. A stage assembly that moves a device along an X axis and a Y axis, the stage assembly comprising:

a device stage that retains the device;

a stage mover assembly connected to the device stage, the stage mover assembly moving the device stage along the X axis and along the Y axis, the stage mover assembly generating a reaction force that is transferred to a reaction component;

a first follower frame that supports the device stage along a Z axis;

wherein the reaction component is not directly connected to the first follower frame; and

a first follower mover that moves the first follower frame along the Y axis substantially concurrently with the movement of the device stage by the stage mover assembly along the Y axis.

27. The stage assembly of claim 26 further comprising a pair of opposed stage fluid bearings that support the device stage relative to the first follower frame and allow device stage to move along the X axis and along the Y axis relative to the first follower frame.

28. The stage assembly of claim 26 further comprising a first follower guide, a first pair of opposed, guide fluid bearings and a second pair of opposed, guide fluid bearings that support the first follower frame relative to the first follower guide along the X axis and the Z axis and allow for movement of the first follower frame relative to the first follower guide along the Y axis.

29. The stage assembly of claim 26 further comprising a second follower frame that supports the device stage along the Z axis, and a second follower mover that moves the second follower frame substantially concurrently with the device stage along the Y axis.

31. The stage assembly of claim 29 wherein the first follower frame and the second follower frame support the device stage in a kinematic manner.

32. The stage assembly of claim 26 wherein the device stage includes a first table section and a second table section that is movable relative to the first table section to separate the device stage.

33. The stage assembly of claim 32 wherein each of the table sections retains at least one device.

34. The stage assembly of claim 26 further comprising a line that is connected to the device stage, the line being secured to the first follower frame.

35. The stage assembly of claim 34 wherein the line provides fluid to the device stage.

36. The stage assembly of claim 34 where the line carries electrical current.

37. An exposure apparatus including the stage assembly of claim 26.

38. A device manufactured with the exposure apparatus according to claim 37.

39. A wafer on which an image has been formed by the exposure apparatus of claim 37.

40. The stage assembly of claim 26 wherein the first follower mover moves the first follower frame along the Y axis to substantially track the movement of the device stage by the stage mover assembly along the Y axis.

41. The stage assembly of claim 26 wherein the first follower mover does not direct a force that acts on the device stage.

42. The stage assembly of claim 26 wherein the stage mover assembly does not direct a force that acts on the first follower frame.

43. The stage assembly of claim 26 further comprising a stage fluid bearing that supports the device stage relative to the first follower frame.

44. The stage assembly of claim 26 further comprising a pair of opposed stage fluid bearings that support the device stage relative to the first follower frame.

30. The stage assembly of 29 wherein the first follower frame supports the device stage near a first table side of the device stage and the second follower frame supports the device stage near a second table side of the device stage.

45. A method for making a stage assembly that moves a device along a Y axis, the method comprising the steps of:

providing a device stage that retains the device;

connecting a stage mover assembly to the device stage, the stage mover assembly moving the device stage along the Y axis, the stage mover assembly generating a reaction force that is transferred to a reaction component;

inhibiting motion of the device stage along a Z axis with a first follower frame;

wherein the reaction component is not directly connected to the first follower frame; and

connecting a first follower mover to the first follower frame, the first follower mover moving the first follower frame substantially concurrently with the movement of the device stage by the stage mover assembly along the Y axis.

46. The method of claim 45 wherein the step of inhibiting motion of the device stage includes the step of providing a pair of opposed stage fluid bearings that support the device stage relative to the first follower frame and allow the device stage to move along an X axis relative to the first follower frame.

47. The method of claim 45 wherein the step of inhibiting motion of the device stage includes the step of providing a first follower guide, a first pair of opposed, guide fluid bearings and a second pair of opposed, guide fluid bearings, the guide fluid bearings supporting the first follower frame relative to the first follower guide along an X axis and the Z axis and allowing for movement of the first follower frame relative to the first follower guide along the Y axis.

48. The method of claim 45 wherein the step of inhibiting motion of the device stage includes the step of supporting the device stage near a first table side of the device stage with the first follower frame.

49. The method of claim 45 further comprising the step of supporting the device stage along the Z axis with a second follower frame.

50. The method of claim 49 further comprising the step of connecting a second follower mover to the second follower frame, the second follower mover moving the second follower frame substantially concurrently with the device stage along the Y axis.

51. The method of claim 49 wherein the first follower frame supports the device stage near a first table side of the device stage and the second follower frame supports the device stage near a second table side of the device stage.

52. The method of claim 49 wherein the first follower frame and the second follower frame support the device stage in a kinematic manner.

53. The method of claim 45 wherein the step of providing a device stage includes the step of providing a first table section and a second table section that is movable relative to the first table section to separate the device stage.

54. The method of claim 53 further comprising the steps of retaining a first device with the first table section and retaining a second device with the second table section.

55. The method of claim 45 further comprising the step of connecting a line from the first follower frame to the device stage.

56. The method of claim 55 wherein the step of connecting a line includes the step of the line providing fluid to the device table.

57. The method of claim 55 where the step of connecting a line includes the step of the line carries electrical current.

58. A method for making an exposure apparatus that forms an image on a wafer, the method comprising the steps of:

providing an irradiation apparatus that irradiates the wafer with radiation to form the image on the wafer; and

providing the stage assembly made by the method of claim 45.

59. A method of making a wafer utilizing the exposure apparatus made by the method of claim 58.

60. A method of making a device including at least the exposure process:

wherein the exposure process utilizes the exposure apparatus made by the method of claim 58.

61. The method of claim 45 wherein the first follower mover moves the first follower frame along the Y axis to substantially track the movement of the device stage by the stage mover assembly along the Y axis.

62. The method of claim 45 wherein the first follower mover does not direct a force that acts on the device stage.

63. The method of claim 45 wherein the stage mover assembly does not direct a force that acts on the first follower frame.

64. A stage assembly that moves a device, the stage assembly comprising:

a device stage that retains the device;

a stage mover assembly connected to the device stage, the stage mover assembly moving the device stage along an axis, the stage mover assembly generating a reaction force that is transferred to a reaction component;

a frame that supports the device stage;

wherein the reaction component is not directly connected to the frame; and

a mover connected to the frame, wherein the mover moves the frame along the axis at substantially the same time that the stage mover assembly moves the device stage along the axis.

65. The stage assembly of claim 64 wherein the mover moves the frame along the axis to substantially track the movement of the device stage by the stage mover assembly along the axis.

66. The stage assembly of claim 64 wherein the mover does not direct a force that acts on the device stage.

67. The stage assembly of claim 64 wherein the stage mover assembly does not direct a force that acts on the frame.

68. An exposure apparatus including the stage assembly of claim 64.

69. The stage assembly of claim 64 further comprising a stage fluid bearing that supports the device stage relative to the frame.

70. The stage assembly of claim 64 further comprising a pair of opposed stage fluid bearings that support the device stage relative to the frame.

71. A stage assembly that moves a device, the stage assembly comprising:

a device stage that retains the device;

a stage mover assembly connected to the device stage, the stage mover assembly moving the device stage along a first axis, the stage mover assembly generating a reaction force that is transferred to a reaction component;

a frame that inhibits motion of the device stage along a second axis;

wherein the reaction component is not directly connected to the frame; and

a mover connected to the frame, wherein the mover moves the frame along the first axis and wherein the mover does not direct a force that acts on the device stage.

72. The stage assembly of claim 71 wherein the stage mover assembly does not direct a force that acts on the frame.

73. An exposure apparatus including the stage assembly of claim 71.

74. The stage assembly of claim 71 further comprising a stage fluid bearing that supports the device stage relative to the frame.

75. The stage assembly of claim 71 further comprising a pair of opposed stage fluid bearings that support the device stage relative to the frame.