Balanced microdevice
First Claim
1. A microdevice comprising a substrate, a movable structure overlaying the substrate, an element and a lever assembly having a pivot and a lever coupled to and pivotable about the pivot, the lever having a first extremity coupled to the movable structure and an opposite second extremity coupled to the element whereby the movable structure causes the lever to pivot about the pivot so as to move the element in a direction of travel and the element is substantially counterbalanced relative to the movable structure to inhibit undesirable movement of the element in the direction of travel in response to externally applied forces.
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Accused Products
Abstract
A balanced microdevice comprising a substrate, a movable structure overlying the substrate, an element and a lever assembly having a pivot and a lever coupled to and pivotable about the pivot. The lever has a first extremity coupled to the movable structure and an opposite second extremity coupled to the element. The movable structure causes the lever to pivot about the pivot so as to move the element in a direction of travel. The element is substantially mechanically balanced to inhibit undesirable movement of the element in the direction of travel in response to externally applied forces.
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Citations
24 Claims
- 1. A microdevice comprising a substrate, a movable structure overlaying the substrate, an element and a lever assembly having a pivot and a lever coupled to and pivotable about the pivot, the lever having a first extremity coupled to the movable structure and an opposite second extremity coupled to the element whereby the movable structure causes the lever to pivot about the pivot so as to move the element in a direction of travel and the element is substantially counterbalanced relative to the movable structure to inhibit undesirable movement of the element in the direction of travel in response to externally applied forces.
- 11. A microdevice for use with a laser providing an optical beam comprising a substrate, a light-blocking element, a drive member overlying the substrate and a lever assembly having a pivot and a lever coupled to and pivotable about the pivot, the lever having a first extremity coupled to the drive member and an opposite second extremity coupled to the light-blocking element whereby the drive member causes the lever to pivot about the pivot so as to move the light-blocking element in a direction of travel to block at least a portion of the optical beam and a counterbalance coupled to the light-blocking member for inhibiting undesirable movement of the light-blocking element in the direction of travel in response to externally applied forces.
- 16. A microdevice comprising a substrate extending in a first plane, a movable element, a microelectromechanical drive member overlying the substrate, a lever assembly having a pivot and a lever coupled to and pivotable about the pivot in a second plane extending substantially parallel to the first plane, the lever having a first extremity coupled to the drive member and a second extremity coupled to the element whereby the drive member causes the lever to pivot about the pivot so as to move the element in a direction of travel, and a counterbalance coupled to the element for inhibiting undesirable movement of the element in a direction of travel in response to externally applied forces.
- 19. A microdevice comprising a substrate, first and second movable structures overlaying the substrate, and a lever assembly having a pivot and a lever coupled to and pivotable about the pivot, the lever having a first extremity coupled to the first movable structure and an opposite second extremity coupled to the second movable structure whereby the first movable structure causes the lever to pivot about the pivot so as to move the second movable structure in a direction of travel, the second movable structure being substantially counterbalanced relative to the first movable structure to inhibit undesirable movement of the first movable structure in the direction of travel in response to externally applied forces.
Specification