Wetting finger latching piezoelectric relay

• US 6,903,492 B2
• Filed: 04/14/2003
• Issued: 06/07/2005
• Est. Priority Date: 04/14/2003
• Status: Expired due to Fees

• Current Assignee: Agilent Technologies, Inc.
• Original Assignee: Agilent Technologies, Inc.
• Inventors: Wong, Marvin Glenn, Carson, Paul Thomas
• Primary Examiner(s): Dougherty, Thomas M.
• Application Number:
  US10/413,058
• Publication Number:
  US 20040201314A1
• Time in Patent Office: 785 Days
• Field of Search: 310/328, 200/214, 200/215
• US Class Current: 310/328
• CPC Class Codes: H01H 2001/0042 Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet
• CPC Class Codes: H01H 2029/008 using micromechanics, e.g. micromechanical liquid contact switches or [LIMMS]
• CPC Class Codes: H01H 2057/006 Micromechanical piezoelectric relay
• CPC Class Codes: H01H 57/00 Electrostrictive relays; Piezoelectric relays

Abstract

An electrical relay having two wettable electrical contacts, each supporting a conducting liquid. A wettable switch finger is moved from a non-deflected position to first and second positions by action of an actuator. In the first position the switch finger touches the conducting liquid and causes it to wet between the contacts and the switch and thereby complete an electrical circuit between the contacts. When the switch finger is in the second position, the conducting liquid cannot wet between first and second contacts and the switch finger and the electrical circuit between the first and second contacts is broken. The switch finger may be located at the free end of a beam that is deflected or bent by the action of piezoelectric elements.

Claims

1. An electrical relay comprising:

a relay housing enclosing a switching cavity;

a first electrical contact in the switching cavity, having a wettable surface;

a second electrical contact in the switching cavity spaced from the first electrical contact and having a wettable surface;

a first conducting liquid in wetted contact with the first electrical contact;

a second conducting liquid in wetted contact with the second electrical contact;

a beam having a fixed end attached to the relay housing within the switching cavity and a free end;

a wettable switch finger, attached to the free end of the beam and moveable to touch the first and second conducting liquids; and

a piezoelectric actuator operable to move the beam in a lateral direction to cause the switching finger to move from a non-deflected position to a first position, where the conducting liquid wets between the first and second contacts and the switch finger and completes an electrical circuit between the first and second contacts, and to a second position where the conducting liquid cannot wet between first and second contacts and the switch finger and the electrical circuit between the first and second contacts is broken.

2. An electrical relay in accordance with claim 1, wherein the non-deflected position of the switch finger and the volume of the conducting liquid are such that movement of the switch finger from the first position to the non-deflected position does not break the electrical circuit completed by the conducting liquid.

3. An electrical relay in accordance with claim 1, wherein the non-deflected position of the switch finger and the volume of the conducting liquid are such that movement of the switch finger from the first position to the second first position breaks the electrical circuit completed by the conducting liquid.

4. An electrical relay in accordance with claim 1, further comprising:

a first non-wettable pad positioned between the first electrical contacts and the relay housing; and

a second non-wettable pad positioned between the second electrical contacts and the relay housing.

5. An electrical relay in accordance with claim 1, wherein the piezoelectric actuator comprises a first piezoelectric element attached to a first side of the beam, the first piezoelectric element operable to deform in a longitudinal mode parallel to the beam and thereby bend the beam.

6. An electrical relay in accordance with claim 5, wherein the piezoelectric actuator further comprises a second piezoelectric element attached to a second side of the beam, the second piezoelectric element operable to deform in a longitudinal mode parallel to the beam and in phase opposition to the first piezoelectric element.

7. An electrical relay in accordance with claim 1, wherein the piezoelectric actuator comprises a piezoelectric element acting between a wall of the switching cavity and a region of the beam between the free end and the fixed end, the piezoelectric element operable to deform in a longitudinal mode substantially perpendicular to the beam and thereby deflect the beam.

8. An electrical relay in accordance with claim 7, wherein the region of the beam acted upon by the piezoelectric element is closer to the fixed end of the beam than to the free end.

9. An electrical relay in accordance with claim 1, wherein the piezoelectric actuator comprises a stack of piezoelectric elements acting between a wall of the switching cavity and a region of the beam between the free end and the fixed end, the stack of piezoelectric elements operable to deform in a longitudinal mode substantially perpendicular to the beam and thereby deflect the beam.

10. An electrical relay in accordance with claim 1, wherein the first and second electrical contacts are positioned within a recess in the switching cavity, the recess tending to retain the conducting liquid.

11. An electrical relay in accordance with claim 1, wherein the conducting liquid is a liquid metal.

12. An electrical relay in accordance with claim 11, wherein the conducting liquid is mercury.

13. An electrical relay in accordance with claim 11, wherein the conducting liquid is a gallium alloy.

14. An electrical relay in accordance with claim 1, wherein the wettable finger is electrically conductive.

15. An electrical relay in accordance with claim 1, wherein the relay housing comprises:

a substrate layer supporting electrical connections to the first and second electrical contacts and the piezoelectric actuator;

a cap layer; and

a piezoelectric layer positioned between the substrate layer and the cap layer and having the switching cavity formed therein.

16. A method for switching an electrical circuit in an electrical relay between a first contact wetted by a first conducting liquid and a second contact wetted by a second conducting liquid, the method comprising:

if the circuit is to completed;

energizing an actuator to move a wettable finger to a first position where the wettable finger touches the first and second conducting liquids and causes them to wet between the first and second contacts and the finger; and

if the circuit is to be broken;

energizing the actuator to move a wettable finger to a second position where conducting liquid cannot wet between the first and second contacts and the wettable finger.

17. A method in accordance with claim 16, further comprising:

if the circuit is to completed;

de-energizing the actuator after the wettable finger has moved to the first position; and

if the circuit is to broken;

de-energizing the actuator after the wettable finger has moved to the second position.

18. A method in accordance with claim 16, wherein the relay includes a beam having a fixed end and a free end, the wettable finger being attached to the free end of the beam, and wherein energizing the actuator comprises:

energizing a piezoelectric actuator attached to a side of the beam to deform in a longitudinal direction along the length of the beam, thereby bending the beam and moving the wettable finger.

19. A method in accordance with claim 16, wherein the relay includes a beam having a fixed end and a free end, the wettable finger being attached to the free end of the beam, and wherein energizing the actuator comprises:

energizing a first piezoelectric actuator attached to a first side of the beam to extend in a longitudinal direction along the length of the beam; and

energizing a second piezoelectric actuator attached to a second side of the beam to contract in a longitudinal direction along the length of the beam, thereby bending the beam and moving the wettable finger.

20. A method in accordance with claim 16, wherein the relay includes a beam having a fixed end and a free end, the wettable finger being attached to the free end of the beam, and wherein energizing the actuator comprises:

energizing a piezoelectric actuator in contact with the beam and a housing of the relay to deform in a direction substantially perpendicular to the length of the beam, thereby deflecting the beam and moving the wettable finger.

21. A method in accordance with claim 20, wherein the piezoelectric actuator contacts the beam in a region closer to the fixed end than to the free end so as to amplify the motion of the piezoelectric actuator.