Erected mirror optical switch

• US 6,903,861 B1
• Filed: 01/22/2004
• Issued: 06/07/2005
• Est. Priority Date: 01/22/2004
• Status: Active Grant

• Current Assignee: National Technology & Engineering Solutions Of Sandia LLC (Honeywell International Inc.)
• Original Assignee: Sandia Corporation (Martin Marietta Corporation)
• Inventors: Allen, James J.
• Primary Examiner(s): Dang, Hung Xuan
• Assistant Examiner(s): TRA, TUYEN Q
• Application Number:
  US10/763,913
• Time in Patent Office: 502 Days
• Field of Search: 359/290, 359/291, 359/220, 359/223, 359/245, 359/322, 359/871, 359/872, 359/846, 359/847, 359/849, 310/309
• US Class Current: 359/291
• CPC Class Codes: G02B 6/3502 involving direct waveguide displacement, e.g. cantilever type waveguide displacement involving waveguide bending, or displacing an interposed waveguide between stationary waveguides
• CPC Class Codes: G02B 6/3518 the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device MEMS devices in general B81B; manufacture of MEM devices in general B81C; micromechanical devices controlling the direction of light G02B26/0833
• CPC Class Codes: G02B 6/3546 NxM switch, i.e. a regular array of switches elements of matrix type constellation
• CPC Class Codes: G02B 6/357 Electrostatic force electrostatic forces controlling reflecting elements in general G02B26/0841
• CPC Class Codes: G02B 6/3584 constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching MEMS per se B81B, B81C
• CPC Class Codes: H04Q 11/0005 Switch and router aspects
• CPC Class Codes: H04Q 2011/003 using switches based on microelectro-mechanical systems [MEMS]
• CPC Class Codes: H04Q 2011/0052 Interconnection of switches

Abstract

A microelectromechanical (MEM) optical switching apparatus is disclosed that is based on an erectable mirror which is formed on a rotatable stage using surface micromachining. An electrostatic actuator is also formed on the substrate to rotate the stage and mirror with a high angular precision. The mirror can be erected manually after fabrication of the device and used to redirect an incident light beam at an arbitrary angel and to maintain this state in the absence of any applied electrical power. A 1×N optical switch can be formed using a single rotatable mirror. In some embodiments of the present invention, a plurality of rotatable mirrors can be configured so that the stages and mirrors rotate in unison when driven by a single micromotor thereby forming a 2×2 optical switch which can be used to switch a pair of incident light beams, or as a building block to form a higher-order optical switch.

Claims

1. A microelectromechanical optical switching apparatus for redirecting an incident light beam, comprising:

(a) a stage formed on a substrate, with the stage being rotatable about an axis which is substantially perpendicular to a major surface of the substrate;

(b) a mirror formed on the stage in an initial position which is substantially parallel to the major surface of the substrate, with the mirror being subsequently moveable to an erected position which is oriented substantially perpendicular to the major surface of the substrate; and

(c) an electrostatic actuator operatively coupled to rotate the stage and thereby redirect the incident light beam.

2. The apparatus of claim 1 wherein the substrate comprises silicon.

3. The apparatus of claim 1 further comprising an electrically-severable fuze for attaching the mirror to the substrate in the initial position.

4. The apparatus of claim 1 further comprising a hinged frame for moving the mirror to the erected position.

5. The apparatus of claim 1 wherein the mirror is locked in the erected position by a latch formed on the stage.

6. The apparatus of claim 5 wherein the latch includes a spring to urge the latch into contact with the mirror and thereby lock the mirror in the erected position.

7. The apparatus of claim 1 wherein the stage includes a plurality of teeth formed proximate to an outer edge of the stage.

8. The apparatus of claim 1 wherein the mirror comprises two interconnected layers of polycrystalline silicon.

9. The apparatus of claim 1 wherein the electrostatic actuator is operatively coupled to rotate the stage with a reciprocating shuttle which includes a pair of teeth which engage with a plurality of opposing teeth formed on the stage proximate to an outer edge thereof.

10. The apparatus of claim 1 wherein the electrostatic actuator comprises an electrostatic comb actuator.

11. A microelectromechanical optical switching apparatus for redirecting an incident light beam, comprising:

(a) a stage formed on a substrate, with the stage being rotatable about an axis which is substantially perpendicular to a major surface of the substrate;

(b) a mirror formed on the stage in an initial position which is substantially parallel to the major surface of the substrate, with the mirror being subsequently erectable to an erected position with a light-reflecting surface of the mirror being oriented at an angle to the major surface of the substrate;

(c) a hinged frame formed proximate to mirror to move the mirror from the initial position to the erected position;

(d) an electrically-severable fuze attaching one end of the mirror to the substrate during fabrication thereof, with the mirror being releasable for movement after the fuze is electrically severed by an electrical current; and

(e) an electrostatic actuator operatively coupled to rotate the stage and thereby redirect the light beam when the light beam is incident on the light-reflecting surface of the mirror.

12. The apparatus of claim 11 wherein the substrate comprises silicon.

13. The apparatus of claim 11 wherein the mirror is locked in the erected position by a latch formed on the stage.

14. The apparatus of claim 11 wherein the electrostatic actuator comprises an electrostatic comb actuator.

15. The apparatus of claim 14 wherein the electrostatic comb actuator is operatively coupled to rotate the stage with a reciprocating shuttle which includes a pair of teeth which engage with a plurality of opposing teeth formed on the stage proximate to an outer edge thereof.

16. The apparatus of claim 11 wherein the mirror in the erected position is oriented at an angle substantially equal to 90°

with respect to the major surface of the substrate.