Apparatus and process for the abatement of semiconductor manufacturing effluents containing fluorine gas

• US 6,905,663 B1
• Filed: 04/18/2000
• Issued: 06/14/2005
• Est. Priority Date: 04/18/2000
• Status: Expired due to Fees

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Arno, Jose I.
• Primary Examiner(s): Tran, Hien
• Application Number:
  US09/551,279
• Time in Patent Office: 1,883 Days
• Field of Search: 422/168, 422171-172, 422/173, 423/210, 423/240.R
• US Class Current: 423/240.00R
• CPC Class Codes: B01D 2251/202 Hydrogen
• CPC Class Codes: B01D 2251/208 Hydrocarbons
• CPC Class Codes: B01D 2257/2027 Fluorine
• CPC Class Codes: B01D 2257/2066 Fluorine
• CPC Class Codes: B01D 53/68 Halogens or halogen compounds
• CPC Class Codes: B01D 53/70 Organic halogen compounds

Abstract

Apparatus and process for the abatement of fluorine and fluorine-containing compounds from gases containing same, such as effluent gas streams from semiconductor manufacturing operations, wherein a fluorocompound abatement medium is injected into the fluorocompound-containing gas. The fluorocompound abatement medium comprises at least one of steam, methane and hydrogen, with the proviso that when the fluorocompound abatement medium contains methane and/or hydrogen, the injection of the fluorocompound abatement medium is conducted under non-combustion conditions.

Claims

1. A method of abating fluorine from a fluorocompound-containing gas, said method comprising:

heating the fluorocompound-containing gas to temperature in a range of from about 120°

F. and about 300°

F.; and

introducing a catalyst and a fluorocompound abatement medium into the fluorocompound-containing gas to abate fluorine from the fluorocompound-containing gas,

wherein the fluorocompound abatement medium comprises at least one medium selected from the group consisting of superheated steam, methane and hydrogen, with the provisos that when the fluorocompound abatement medium comprises superheated steam, the concentration of fluorine in the fluorocompound-containing gas is in a range of from about 1.1 vol. % to about 3.1 vol. %, based on the total volume of the fluorocompound-containing gas, and when the fluorocompound abatement medium comprises methane or hydrogen, fluorine is abated from the fluorocompound-containing gas under non-combustion conditions.

2. The method of claim 1, wherein the fluorocompound-containing gas comprises a fluorine-containing gas selected from the group consisting of F₂ and fluorine radicals.

3. The method of claim 1, wherein the fluorocompound abatement medium comprises superheated steam.

4. The method of claim 1, wherein the fluorocompound abatement medium comprises methane.

5. The method of claim 1, wherein the fluorocompound abatement medium comprises hydrogen.

6. The method of claim 1, wherein the fluorocompound abatement medium comprises superheated steam, methane and hydrogen.

7. The method of claim 1, wherein the catalyst is selected from the group consisting of metals, ammonia, hydrogen peroxide, reducing agents, bases, and catalytically active organic compounds.

8. The method of claim 1, wherein the catalyst is an alkanol.

9. The method of claim 1, wherein the catalyst comprises isopropyl alcohol.

10. The method of claim 9, wherein the fluorocompound abatement medium comprises superheated steam.

11. The method of claim 1, wherein the fluorocompound abatement medium comprises superheated steam and the catalyst is employed at a concentration of from about 2 to about 15% by volume, based on a volume of water in the fluorocompound abatement medium.

12. The method of claim 1, wherein the fluorocompound abatement medium comprises superheated steam, and the catalyst is employed at a concentration of from about 2.5 to about 7% by volume, based on a volume of water in the fluorocompound abatement medium.

13. The method of claim 1, wherein the fluorocompound-containing gas comprises effluent from a semiconductor manufacturing facility.

14. The method of claim 1, wherein the abatement of fluorocompound-containing gases is conducted in an oxidizer zone of an effluent treatment facility comprising said oxidizer zone.

15. The method of claim 1, wherein the fluorocompound abatement medium is heated before it is introduced into the fluorocompound-containing gas, wherein the fluorocompound abatement medium is hydrogen or methane.

16. The method of claim 1, further comprising cooling formed reaction products after the fluorocompound-containing gas reacts with the fluorocompound abatement medium.

17. The method of claim 5, wherein the ratio of hydrogen to fluorocompound-containing gas is about 1:

1 to about 8;

1.

18. The method of claim 1, wherein the pressure of the superheated steam is about 60 psig.

19. A method of abating fluorine from a fluorocompound-containing gas, said method comprising:

heating the fluorocompound-containing gas to temperature in a range of from about 120°

F. and about 300°

F.; and

injecting a fluorocompound abatement medium including at least one hydrocarbon gas into the fluorocompound-containing gas, wherein fluorine is abated from the fluorocompound-containing gas under non-combustion conditions.

20. A method of abating fluorine from a fluorocompound-containing gas, said method comprising;

heating the fluorocompound-containing gas to temperature in a range of from about 120°

F. and about 300°

F.; and

introducing a fluorocompound abatement medium comprising steam and at least one of methane and hydrogen, and optionally a catalyst, into the fluorocompound-containing gas, wherein the fluorine is abated from the fluorocompound-containing gas under non-combustion conditions.