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System and method for aerial image sensing

  • US 6,906,305 B2
  • Filed: 01/07/2003
  • Issued: 06/14/2005
  • Est. Priority Date: 01/08/2002
  • Status: Expired due to Term
First Claim
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1. A system for sensing, at an increased resolution, an aerial image exhibiting a light intensity distribution at a primary resolution, the system comprising:

  • a photo-electron emission unit to sense the aerial image and, in response, emit electrons in a pattern corresponding to the light intensity distribution of the aerial image;

    electron optics to project an enlarged pattern of the pattern of electrons emitted by the photo-electron emission unit;

    a sensing unit to sense the enlarged pattern; and

    an image analysis unit, coupled to the sensing unit, to digitize the enlarged pattern.

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