Resonant probe driving arrangement and a scanning probe microscope including such an arrangement

• US 6,906,450 B2
• Filed: 04/12/2001
• Issued: 06/14/2005
• Est. Priority Date: 04/20/2000
• Status: Expired due to Fees

• Current Assignee: The University of Bristol
• Original Assignee: University of Bristol
• Inventors: Humphris, Andrew David Laver, Tamayo De Miguel, Javier, Miles, Mervyn John
• Primary Examiner(s): Dougherty, Thomas M.
• Application Number:
  US10/241,000
• Publication Number:
  US 20030137216A1
• Time in Patent Office: 1,524 Days
• Field of Search: 310/316.01, 310/317
• US Class Current: 310/317
• CPC Class Codes: G01Q 10/065 Feedback mechanisms, i.e. wherein the signal for driving the probe is modified by a signal coming from the probe itself
• CPC Class Codes: G01Q 20/02 by optical means
• CPC Class Codes: G01Q 20/04 Self-detecting probes, i.e. wherein the probe itself generates a signal representative of its position, e.g. piezoelectric gauge
• CPC Class Codes: G01Q 60/32 AC mode
• CPC Class Codes: Y10S 977/85 Scanning probe control process

Abstract

A drive system is provided for a resonating probe device, such as a scanning probe microscope, wherein the amplitude of the drive signal is controlled by feeding back a phase shifted and amplified component of the amplitude of oscillation of the resonating element. Means are provided for electronically enhancing the quality factor of a resonating probe device when operated in a liquid environment. Such enhancement of the quality factor improves the sensitivity of the probe device.

Claims

1. A control apparatus for controlling a driving signal used to stimulate a resonating sensing element, in which the control apparatus is responsive to a sensor used to monitor the motion of the sensing element characterized in that the control apparatus comprises a signal processor for filtering signals from the sensor so as to remove harmonics above a predetermined order from the signal, and drive signal controller responsive to the output of the signal processor for adjusting the driving signal so as to maintain the sensing element in resonance.

2. A control apparatus as claimed in claim 1, characterized in that said signal processor is further arranged to identify a phase shift between the motion of the sensing element and the driving stimulus applied to the element and the drive signal controller adjusts the driving signal so as to maintain the phase shift at substantially a predetermined value.

3. A control apparatus as claimed in claim 1 characterized in that the sensing element is coupled to a drive element via a liquid coupling.

4. A control apparatus as claimed in claim 3, characterized in that the drive element is a piezo-electric element.

5. A control apparatus as claimed in claim 1, characterized in that the sensing element is driven via one of alternating magnetic fields, alternating electrostatic fields, pressure waves and pulsed heating.

6. A control apparatus as claimed in claim 2, in which the predetermined phase shift is substantially 90 degrees.

7. A control apparatus as claimed in claim 2, in which the phase shift is measured by a phase sensitive detector, and the output of the detector is provided to a controller which controller causes a change to the frequency of the driving signal.

8. A control apparatus as claimed in claim 1, further comprising at least one other feedback loop for controlling a property of the drive signal used to stimulate the sensing element.

9. A control apparatus as claimed in claim 8, characterized in that one further feedback loop is provided, and said one further feedback loop controls the magnitude of the drive signal.

10. A control apparatus as claimed in claim 8, characterized in that a signal from the sensor is phase shifted and amplified, said amplification being a function of the amplitude of said signal from the sensor, and combined with the drive signal.

11. A control apparatus as claimed in claim 8, characterized in that an amplitude of the drive signal is modulated as a function of the amplitude of the sensor signal.

12. An apparatus as claimed in claim 8, characterized in that the or one of the further feedback loops forms a feedback loop synthesising an effective quality factor for the sensing element in excess of its actual quality factor.

13. A scanning probe microscope including a control apparatus as claimed in claim 1.

14. A chemical or bio-chemical sensor comprising a resonating sensing element having a receptor therein, where the receptor interacts with a substance under test, in combination with a control apparatus as claimed in claim 1.

15. A sensor as claimed in claim 14, wherein one side of the sensor is coated with a substance sensitive to a target substance under test.