Spatial light modulators with light blocking/absorbing areas
First Claim
1. A method for making a spatial light modulator, comprising:
- providing a first substrate that is transmissive to visible light;
providing a second substrate having an array of circuitry and electrodes thereon;
depositing a light absorbing layer on the first substrate to selectively block the passage of light through the first substrate, wherein the light absorbing layer is black or dark in color;
forming an array of deflectable reflective elements on the first or second substrate; and
positioning the first and second substrates proximate to each other to form a substrate assembly, further comprising;
bonding the first and second substrates together to form the substrate assembly; and
singulating the substrate assembly into a set of assembly dies, each of which comprises a plurality of deflectable reflective elements.
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Accused Products
Abstract
A projection system, a spatial light modulator, and a method for forming a micromirror array such as for a projection display are disclosed. The spatial light modulator can have two substrates bonded together with one of the substrates comprising a micro-mirror array. The two substrates can be bonded at the wafer level after depositing a getter material and/or solid or liquid lubricant on one or both of the wafers if desired. In one embodiment of the invention, one of the substrates is a light transmissive substrate and a light absorbing layer is provided on the light transmissive substrate to selectively block light from passing through the substrate. The light absorbing layer can form a pattern, such as a frame around an array of micro-mirrors.
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Citations
99 Claims
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1. A method for making a spatial light modulator, comprising:
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providing a first substrate that is transmissive to visible light;
providing a second substrate having an array of circuitry and electrodes thereon;
depositing a light absorbing layer on the first substrate to selectively block the passage of light through the first substrate, wherein the light absorbing layer is black or dark in color;
forming an array of deflectable reflective elements on the first or second substrate; and
positioning the first and second substrates proximate to each other to form a substrate assembly, further comprising;
bonding the first and second substrates together to form the substrate assembly; and
singulating the substrate assembly into a set of assembly dies, each of which comprises a plurality of deflectable reflective elements. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49)
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50. A spatial tight modulator, comprising:
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a first substrate that is transmissive to visible light;
a second substrate having an array of circuitry and electrodes thereon;
a light absorbing layer on the first substrate disposed to selectively block the passage of light through the first substrate, wherein the light blocking layer is black or dark in color; and
an array of deflectable reflective elements on the first or second substrate;
wherein the first and second substrates are positioned proximate to each other as a substrate assembly. - View Dependent Claims (51, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61, 62, 63, 64, 65, 66, 67, 68, 69, 70, 71, 72, 73, 74, 75, 76, 77, 78, 79, 80, 81, 82, 83, 84, 85, 86, 87, 88, 89, 90, 91, 92, 93, 94, 95, 96)
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97. A method for making a spatial light modulator, comprising:
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providing a first substrate and a second substrate;
forming an array of circuitry and electrodes on the second substrate;
forming a plurality of strips or frame areas on the first substrate to absorb at least 50% of the light incident on the strips or frame areas;
forming an array of deflectable reflective elements on the first or second substrate; and
bonding the first and second substrates together to form a substrate assembly.
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98. A spatial light modulator, comprising:
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a first substrate arid a second substrate;
an array of circuitry and electrodes on the second substrate;
an opaque layer that forms a pattern on the first substrate in order to absorb at least 50% of the light that is incident on the opaque layer; and
an array of deflectable reflective elements on the first or second substrate;
wherein the first and second substrates are positioned proximate to each other as a substrate assembly.
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99. A method for making a spatial light modulator, comprising:
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providing a first substrate that is transmissive to visible light;
providing a second substrate having an array of circuitry and electrodes thereon;
depositing a light absorbing layer on the first substrate to selectively block the passage of light through the first substrate, wherein the light absorbing layer is black or dark in color;
forming an array of deflectable reflective elements; and
positioning the first and second substrates proximate to each other to form a substrate assembly such that the array of deflectable reflective elements are positioned between the first and second substrates, further comprising;
bonding the first and second substrates together to form the substrate assembly; and
singulating the substrate assembly into a set of assembly dies, each of which comprises a plurality of deflectable reflective elements.
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Specification