Micromirror systems with concealed multi-piece hinge structures
First Claim
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1. A micromirror device comprising:
- a substrate with electrical components including address circuitry;
a micromirror having a reflective surface; and
a support structure underlying said micromirror so as to be concealed from view when viewed from a direction normal to said reflective surface and interconnecting said substrate and said micromirror, said support structure including at plurality of deflection members, each deflection member mounted to said substrate and said micromirror, and configured to permit rotation of said micromirror about multiple axes of rotation end drawing said micromirror toward said substrate in a manner sufficient to provide a device capable of both tilt and phase correction.
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Abstract
Micromirror systems with concealed multi-piece hinge structures are provided for reflective applications. Generally, light is reflected by these structures adapted for three-dimensional tilt as well as up-and-down or out-of-plane actuation. Devices can be produced utilizing the various optional features described herein to provide miniaturized, highly controllable solutions for use in optical switching, projection and other applications, especially optical applications.
157 Citations
40 Claims
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1. A micromirror device comprising:
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a substrate with electrical components including address circuitry;
a micromirror having a reflective surface; and
a support structure underlying said micromirror so as to be concealed from view when viewed from a direction normal to said reflective surface and interconnecting said substrate and said micromirror, said support structure including at plurality of deflection members, each deflection member mounted to said substrate and said micromirror, and configured to permit rotation of said micromirror about multiple axes of rotation end drawing said micromirror toward said substrate in a manner sufficient to provide a device capable of both tilt and phase correction. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33)
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34. A micromirror device comprising:
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a substrate with electrical components including address circuitry;
a micromirror; and
a support structure underlying said micromirror and interconnecting said substrate and said micromirror, said support structure including at plurality of deflection members, each deflection member mounted to said substrate and said micromirror, and configured to permit rotation of said micromirror about multiple axes of rotation and drawing said micromirror toward said substrate, wherein said electrical components further comprise electrodes adapted to apply attractive forces to said micromirror, and wherein at least one of said electrodes is configured with a plurality of portions at different levels, so that portions further from a center of rotation of said micromirror are at a greater distance from the micromirror than portions closer to the center of rotation. - View Dependent Claims (35, 36, 37, 38, 39, 40)
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Specification