Agent reactive scheduling in an automated manufacturing environment

• US 6,907,305 B2
• Filed: 04/30/2002
• Issued: 06/14/2005
• Est. Priority Date: 04/30/2002
• Status: Expired due to Term

• Current Assignee: Ocean Semiconductor LLC (Fullbrite Capital Partners, LLC)
• Original Assignee: Advanced Micro Devices, Inc.
• Inventors: Mata, Gustavo, Nettles, Steven C., Barto, Larry D., Li, Yiwei
• Primary Examiner(s): Gandhi, Jayprakash N.
• Application Number:
  US10/135,145
• Publication Number:
  US 20040243266A1
• Time in Patent Office: 1,141 Days
• Field of Search: 705/8, 700/99, 700/100, 700/121, 700/101
• US Class Current: 700/99
• CPC Class Codes: G05B 19/41865 characterised by job scheduling, process planning, material flow
• CPC Class Codes: G06Q 10/06312 Adjustment or analysis of established resource schedule, e.g. resource or task levelling, or dynamic rescheduling
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
• CPC Class Codes: Y02P 90/80 Management or planning

Abstract

A method and apparatus for scheduling in an automated manufacturing environment, comprising are disclosed. The method includes detecting an occurrence of a predetermined event in a process flow; notifying a software scheduling agent of the occurrence; and reactively scheduling an action from the software scheduling agent responsive to the detection of the predetermined event. The apparatus is automated manufacturing environment including a process flow and a computing system. The computing system further includes a plurality of software scheduling agents residing thereon, the software scheduling agents being capable of reactively scheduling appointments for activities in the process flow responsive to a plurality of predetermined events.

Claims

1. A method for scheduling in an automated manufacturing environment, comprising:

detecting an occurrence of a predetermined event in a process flow;

notifying a software scheduling agent of the occurrence; and

reactively scheduling an action from the software scheduling agent responsive to the detection of the predetermined event.

2. The method of claim 1, wherein detecting the occurrence of the predetermined event includes detecting an unplanned event or an unexpected event.

3. The method of claim 1, wherein detecting the occurrence of the predetermined event includes detecting an occurrence of one of an appointment state change, a factory state change, and an alarm event.

4. The method of claim 3, wherein detecting the appointment state change includes detecting at least one of an appointment cancellation, an appointment expansion, an appointment shrinking, an appointment abort, an appointment changing status, an appointment shift, an appointment override, an transport time update, a load time update, an unload time update, a lot joining a batch, a lot leaving a batch, canceling a lot from a batch, and a commitment window update.

5. The method of claim 3, wherein detecting the factory state change includes detecting at least one of detection of a downtime occurrence;

a machine becoming available;

a PM/Qual being detected;

a chamber going down;

a chamber becoming available, a change in machine capabilities;

a change in machine types;

an addition of a process;

an addition of a process operation;

a lot arriving at a machine;

a lot process changed, a lot placed on hold, a lot released from hold, a lot priority changed, a lot due date changed, a lot wafer count changed, a lot process operation changed, and a lot departing a machine.

6. The method of claim 3, wherein detecting the alarm event includes detecting at least one of an alarm firing for an appointment start time and an alarm firing for an appointment end time.

7. The method of claim 1, wherein detecting the predetermined event includes detecting at least one of an appointment cancellation, an appointment expansion, an appointment shrinking, an appointment abort, an appointment becoming active, an appointment nearing completion, an appointment completing, an appointment shift, an appointment override, and a commitment window update, detection of a downtime occurrence;

a machine becoming available;

a PM/Qual being detected;

a chamber going down;

a chamber becoming available, a change in machine capabilities;

a change in machine types;

an addition of a process;

an addition of a process operation;

a lot arriving at a machine;

a lot process changed, a lot placed on hold, a lot released from hold, a lot priority changed, a lot due date changed, a lot wafer count changed, a lot process operation changed, a lot departing a machine, an alarm firing for an appointment start time and an alarm firing for an appointment end time.

8. The method of claim 1, wherein notifying the software scheduling agent of the occurrence includes:

sending an indication of the occurrence to a publisher;

publishing the occurrence from the publisher to a subscribing listener; and

calling the software scheduling agent from the subscribing listener.

9. The method of claim 1, wherein reactively scheduling the action includes at least one of aborting a scheduled appointment in progress;

canceling a scheduled appointment before it begins;

scheduling a new appointment;

starting a scheduled appointment;

expanding the duration of a scheduled appointment;

shrinking the duration of a scheduled appointment;

shifting a scheduled appointment;

adding new processing capabilities;

deleting old processing capabilities;

setting an alarm;

canceling an alarm; and

changing the status of an appointment.

10. The method of claim 1, further comprising proactively scheduling an appointment with which the predetermined event is associated.

11. The method of claim 10, wherein proactively scheduling the appointment includes proactively scheduling the appointment from the software scheduling agent.

12. A computer-readable, program storage medium encoded with instructions that, when executed by a computer, perform a method for scheduling in an automated manufacturing environment, the method comprising:

detecting an occurrence of a predetermined event in a process flow;

notifying a software scheduling agent of the occurrence; and

reactively scheduling an action from the software scheduling agent responsive to the detection of the predetermined event.

13. The program storage medium of claim 12, wherein detecting the occurrence of the predetermined event in the encoded method includes detecting an unplanned event or an unexpected event.

14. The program storage medium of claim 12, wherein detecting the occurrence of the predetermined event in the encoded method includes detecting an occurrence of one of an appointment state change, a factory state change, and an alarm event.

15. The program storage medium of claim 12, wherein detecting the predetermined event in the encoded method includes detecting at least one of an appointment cancellation, an appointment expansion, an appointment shrinking, an appointment abort, an appointment changing status, an appointment shift, an appointment override, an transport time update, a load time update, an unload time update, a lot joining a batch, a lot leaving a batch, canceling a lot from a batch, a commitment window update, detection of a downtime occurrence;

a machine becoming available;

a PM/Qual being detected;

a chamber going down;

a chamber becoming available, a change in machine capabilities;

a change in machine types;

an addition of a process;

an addition of a process operation;

a lot arriving at a machine;

a lot process changed, a lot placed on hold, a lot released from hold, a lot priority changed, a lot due date changed, a lot wafer count changed, a lot process operation changed, a lot departing a machine, an alarm firing for an appointment start time and an alarm firing for an appointment end time.

16. The program storage medium of claim 12, wherein notifying the software scheduling agent of the occurrence in the encoded method includes:

sending an indication of the occurrence to a publisher;

publishing the occurrence from the publisher to a subscribing listener; and

calling the software scheduling agent from the subscribing listener.

17. The program storage medium of claim 12, wherein reactively scheduling the action in the encoded method includes at least one of aborting a scheduled appointment in progress;

canceling a scheduled appointment before it begins;

scheduling a new appointment;

starting a scheduled appointment;

expanding the duration of a scheduled appointment;

shrinking the duration of a scheduled appointment;

shifting a scheduled appointment;

adding new processing capabilities;

deleting old processing capabilities;

setting an alarm;

canceling an alarm; and

changing the status of an appointment.

18. The program storage medium of claim 12, wherein the encoded method further comprises proactively scheduling an appointment with which the predetermined event is associated.

19. A computing system programmed to perform a method for scheduling in an automated manufacturing environment, the method comprising:

detecting an occurrence of a predetermined event in a process flow;

notifying a software scheduling agent of the occurrence; and

reactively scheduling an action from the software scheduling agent responsive to the detection of the predetermined event.

20. The computing system of claim 19, wherein detecting the occurrence of the predetermined event in the programmed method includes detecting an unplanned event or an unexpected event.

21. The computing system of claim 19, wherein detecting the occurrence of the predetermined event in the programmed method includes detecting an occurrence of one of an appointment state change, a factory state change, and an alarm event.

22. The computing system of claim 19, wherein detecting the predetermined event in the programmed method includes detecting at least one of an appointment cancellation, an appointment expansion, an appointment shrinking, an appointment abort, an appointment changing status, an appointment shift, an appointment override, an transport time update, a load time update, an unload time update, a lot joining a batch, a lot leaving a batch, canceling a lot from a batch, a commitment window update, detection of a downtime occurrence;

a machine becoming available;

a PM/Qual being detected;

a chamber going down;

a chamber becoming available, a change in machine capabilities;

a change in machine types;

an addition of a process;

an addition of a process operation;

a lot arriving at a machine;

a lot process changed, a lot placed on hold, a lot released from hold, a lot priority changed, a lot due date changed, a lot wafer count changed, a lot process operation changed, a lot departing a machine, an alarm firing for an appointment start time and an alarm firing for an appointment end time.

23. The computing system of claim 19, wherein notifying the software scheduling agent of the occurrence in the programmed method includes:

sending an indication of the occurrence to a publisher;

publishing the occurrence from the publisher to a subscribing listener; and

calling the software scheduling agent from the subscribing listener.

24. The computing system of claim 19, wherein reactively scheduling the action in the programmed method includes at least one of aborting a scheduled appointment in progress;

canceling a scheduled appointment before it begins;

scheduling a new appointment;

starting a scheduled appointment;

expanding the duration of a scheduled appointment;

shrinking the duration of a scheduled appointment;

shifting a scheduled appointment;

adding new processing capabilities;

deleting old processing capabilities;

setting an alarm;

canceling an alarm; and

changing the status of an appointment.

25. The computing system of claim 19, wherein the encoded method further comprises proactively scheduling an appointment with which the predetermined event is associated.

26. An apparatus for scheduling in an automated manufacturing environment, the apparatus comprising:

means for detecting an occurrence of a predetermined event in a process flow;

means for notifying a software scheduling agent of the occurrence; and

means for reactively scheduling an action from the software scheduling agent responsive to the detection of the predetermined event.

27. The method of claim 26, wherein the means for detecting the occurrence of the predetermined event includes means for detecting an unplanned event or an unexpected event.

28. The method of claim 26, wherein the means for detecting the occurrence of the predetermined event includes means for detecting an occurrence of one of an appointment state change, a factory state change, and an alarm event.

29. The method of claim 26, wherein the means for detecting the predetermined event includes means for detecting at least one of an appointment cancellation, an appointment expansion, an appointment shrinking, an appointment abort, an appointment changing status, an appointment shift, an appointment override, an transport time update, a load time update, an unload time update, a lot joining a batch, a lot leaving a batch, canceling a lot from a batch, a commitment window update, detection of a downtime occurrence;

a machine becoming available;

a PM/Qual being detected;

a chamber going down;

a chamber becoming available, a change in machine capabilities;

a change in machine types;

an addition of a process;

an addition of a process operation;

a lot arriving at a machine;

a lot process changed, a lot placed on hold, a lot released from hold, a lot priority changed, a lot due date changed, a lot wafer count changed, a lot process operation changed, a lot departing a machine, an alarm firing for an appointment start time and an alarm firing for an appointment end time.

30. The method of claim 26, wherein the means for notifying the software scheduling agent of the occurrence includes:

means for sending an indication of the occurrence to a publisher;

means for publishing the occurrence from the publisher to a subscribing listener; and

means for calling the software scheduling agent from the subscribing listener.

31. The method of claim 26, wherein the means for reactively scheduling the action includes means for at least one of aborting a scheduled appointment in progress;

canceling a scheduled appointment before it begins;

scheduling a new appointment;

starting a scheduled appointment;

expanding the duration of a scheduled appointment;

shrinking the duration of a scheduled appointment;

shifting a scheduled appointment;

adding new processing capabilities;

deleting old processing capabilities;

setting an alarm;

canceling an alarm; and

changing the status of an appointment.

32. The method of claim 26, further comprising means for proactively scheduling an appointment with which the predetermined event is associated.

33. An automated manufacturing environment, comprising:

a process flow; and

a computing system, including a plurality of software scheduling agents residing thereon, the software scheduling agents being capable of reactively scheduling appointments for activities in the process flow responsive to a plurality of predetermined events.

34. The automated manufacturing environment of claim 33, further comprising a plurality of publishers and subscribers capable of detecting an occurrence of one of the predetermined events in the process flow and notifying one of the software scheduling agent of the occurrence.

35. The automated manufacturing environment of claim 34, wherein detecting the occurrence of the predetermined event includes detecting an unplanned event or an unexpected event.

36. The automated manufacturing environment of claim 34, wherein detecting the occurrence of the predetermined event includes detecting an occurrence of one of an appointment state change, a factory state change, and an alarm event.

37. The automated manufacturing environment of claim 34, wherein detecting the predetermined event includes detecting at least one of an appointment cancellation, an appointment expansion, an appointment shrinking, an appointment abort, an appointment changing status, an appointment shift, an appointment override, an transport time update, a load time update, an unload time update, a lot joining a batch, a lot leaving a batch, canceling a lot from a batch, a commitment window update, detection of a downtime occurrence;

a machine becoming available;

a PM/Qual being detected;

a chamber going down;

a chamber becoming available, a change in machine capabilities;

a change in machine types;

an addition of a process;

an addition of a process operation;

a lot arriving at a machine;

a lot process changed, a lot placed on hold, a lot released from hold, a lot priority changed, a lot due date changed, a lot wafer count changed, a lot process operation changed, and a lot departing a machine, an alarm firing for an appointment start time and an alarm firing for an appointment end time.

38. The automated manufacturing environment of claim 34, wherein notifying the software scheduling agent of the occurrence includes:

sending an indication of the occurrence to a publisher;

publishing the occurrence from the publisher to a subscribing listener; and

calling the software scheduling agent from the subscribing listener.

39. The automated manufacturing environment of claim 34, wherein reactively scheduling the action includes at least one of aborting a scheduled appointment in progress;

canceling a scheduled appointment before it begins;

scheduling a new appointment;

starting a scheduled appointment;

expanding the duration of a scheduled appointment;

shrinking the duration of a scheduled appointment;

shifting a scheduled appointment;

adding new processing capabilities;

deleting old processing capabilities;

setting an alarm;

canceling an alarm; and

changing the status of an appointment.

40. The automated manufacturing environment of claim 34, further comprising proactively scheduling an appointment with which the predetermined event is associated.

41. The automated manufacturing environment of claim 33, further comprising at least one of a manufacturing execution system and an automated materials handling system.

42. The automated manufacturing environment of claim 33, wherein the computing system is at least one of a local area network, a wide area network, a system area network, an intranet, or a portion of the Internet.

43. The automated manufacturing environment of claim 33, wherein the process flow comprises a portion of a semiconductor manufacturing facility.

44. An automated manufacturing environment, comprising:

a plurality of work pieces;

a plurality of processing stations through which the work pieces may be processed;

a plurality of software scheduling agents capable of scheduling appointments for processing the work pieces through the process stations, the software scheduling agents capable of reactively scheduling responsive to predetermined events.

45. The automated manufacturing environment of claim 44, further comprising a plurality of publishers and subscribers capable of detecting an occurrence of one of the predetermined events in the process flow and notifying one of the software scheduling agent of the occurrence.

46. The automated manufacturing environment of claim 45, wherein detecting the occurrence of the predetermined event includes detecting an unplanned event or an unexpected event.

47. The automated manufacturing environment of claim 45, wherein detecting the occurrence of the predetermined event includes detecting an occurrence of one of an appointment state change, a factory state change, and an alarm event.

48. The automated manufacturing environment of claim 45, wherein detecting the predetermined event includes detecting at least one of an appointment cancellation, an appointment expansion, an appointment shrinking, an appointment abort, an appointment changing status, an appointment shift, an appointment override, an transport time update, a load time update, an unload time update, a lot joining a batch, a lot leaving a batch, canceling a lot from a batch, a commitment window update, detection of a downtime occurrence;

a machine becoming available;

a PM/Qual being detected;

a chamber going down;

a chamber becoming available, a change in machine capabilities;

a change in machine types;

an addition of a process;

an addition of a process operation;

a lot arriving at a machine;

a lot process changed, a lot placed on hold, a lot released from hold, a lot priority changed, a lot due date changed, a lot wafer count changed, a lot process operation changed, a lot departing a machine, an alarm firing for an appointment start time and an alarm firing for an appointment end time.

49. The automated manufacturing environment of claim 45, wherein notifying the software scheduling agent of the occurrence includes:

sending an indication of the occurrence to a publisher;

publishing the occurrence from the publisher to a subscribing listener; and

calling the software scheduling agent from the subscribing listener.

50. The automated manufacturing environment of claim 45, wherein reactively scheduling the action includes at least one of aborting a scheduled appointment in progress;

canceling a scheduled appointment before it begins;

scheduling a new appointment;

starting a scheduled appointment;

expanding the duration of a scheduled appointment;

shrinking the duration of a scheduled appointment;

shifting a scheduled appointment;

adding new processing capabilities;

deleting old processing capabilities;

setting an alarm;

canceling an alarm; and

changing the status of an appointment.

51. The automated manufacturing environment of claim 45, further comprising proactively scheduling an appointment with which the predetermined event is associated.

52. The automated manufacturing environment of claim 44, further comprising at least one of a manufacturing execution system and an automated materials handling system.

53. The automated manufacturing environment of claim 44, wherein the computing system is at least one of a local area network, a wide area network, a system area network, an intranet, or a portion of the Internet.