Surface micro-planarization for enhanced optical efficiency and pixel performance in SLM devices
First Claim
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1. A method of fabricating a reflective spatial light modulator, said method comprising:
- providing a semiconductor substrate supporting a metal layer of a spatial light modulator;
smoothing a surface of said metal layer using gas cluster ion beam bombardment; and
completing said spatial light modulator.
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Abstract
A method for enhancing the optical performance of a reflective spatial light modulator by micro-planarizing surfaces within the SLM, such as the reflective surface of each pixel, by gas-cluster-ion-beam bombardment.
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Citations
6 Claims
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1. A method of fabricating a reflective spatial light modulator, said method comprising:
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providing a semiconductor substrate supporting a metal layer of a spatial light modulator;
smoothing a surface of said metal layer using gas cluster ion beam bombardment; and
completing said spatial light modulator. - View Dependent Claims (2, 3, 4, 5, 6)
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Specification