Space-saving test structures having improved capabilities

• US 6,909,293 B2
• Filed: 04/25/2003
• Issued: 06/21/2005
• Est. Priority Date: 04/25/2003
• Status: Expired due to Fees

• Current Assignee: Advanced Micro Devices, Inc.
• Original Assignee: Advanced Micro Devices, Inc.
• Inventors: Kim, Hyeon-Seag
• Primary Examiner(s): Lefkowitz, Edward
• Assistant Examiner(s): NATALINI, JEFF WILLIAM
• Application Number:
  US10/423,197
• Publication Number:
  US 20040212376A1
• Time in Patent Office: 788 Days
• Field of Search: 324/719, 324/717, 324763-765, 324500-537, 257/48, 438/14, 438 17- 18
• US Class Current: 324/719
• CPC Class Codes: G01R 31/2831 Testing of materials or semi-finished products, e.g. semiconductor wafers or substrates G01R31/318511 takes precedence; testing during manufacture H01L22/00
• CPC Class Codes: G01R 31/2858 Measuring of material aspects, e.g. electro-migration [EM], hot carrier injection
• CPC Class Codes: G01R 31/2884 using dedicated test connectors, test elements or test circuits on the IC under test G01R31/2855 takes precedence

Abstract

A space-saving test structure includes a core metal line, at least one extrusion detection line and an extrusion monitoring segment. The core metal line has a “non-linear configuration” and is capable of conducting current for an electromigration test, an isothermal test, and extrusion monitoring. The at least one extrusion detection line is situated adjacent to the core metal line. The extrusion monitoring segment is electrically connected to the at least one extrusion detection line. The extrusion monitoring segment is adapted to determine whether an extrusion occurs in the core metal line by measuring a resistance between the core metal line and the at least one extrusion detection line.

Claims

1. A test structure comprising:

a core metal line having a non-linear configuration, wherein said core metal line is capable of conducting current for an electromigration test, an isothermal test, and extrusion monitoring;

at least one extrusion detection line situated adjacent to said core metal line;

an extrusion monitoring segment electrically connected to said at least one extrusion detection line and adapted to determine an extrusion in said core metal line by measuring a resistance between said core metal line and said at least one extrusion detection line;

wherein said non-linear configuration does not have a right angle turn.

2. The test structure of claim 1, wherein said non-linear configuration is a serpentine configuration.

3. The test structure of claim 1, wherein said non-linear configuration is a square spiral configuration.

4. The test structure of claim 1, wherein said non-linear configuration is a step configuration.

5. The test structure of claim 1, wherein said non-linear configuration is a circular spiral configuration.

6. The test structure of claim 1, wherein said extrusion monitoring segment is utilized to indicate an extrusion when said resistance is less than a predetermined value.

7. The test structure of claim 1 further comprising:

a first contact metal pad electrically connected to a first end of said core metal line, wherein said first contact metal pad is adapted to electrically connect to a first test probe;

a second contact metal pad electrically connected to a second end of said core metal line, wherein said second contact metal pad is adapted to electrically connect to a second test probe.

8. The test structure of claim 1, wherein said core metal line has a plurality of segments adapted to determine a Blech length.

9. A test structure comprising:

a core metal line having a non-linear configuration, wherein said core metal line is capable of conducting current for an electromigration test, an isothermal test, and extrusion monitoring;

a first extrusion metal line situated adjacent to said core metal line;

a second extrusion metal line situated adjacent to said core metal line;

an extrusion monitoring segment electrically connected to said at least one extrusion detection line and adapted to determine an extrusion in said core metal line by measuring a resistance between said core metal line and said at least one extrusion detection line;

wherein said non-linear configuration does not have a right angle turn.

10. The test structure of claim 9, wherein said non-linear configuration is a serpentine configuration.

11. The test structure of claim 9, wherein said non-linear configuration is a square spiral configuration.

12. The test structure of claim 9, wherein said non-linear configuration is a step configuration.

13. The test structure of claim 9, wherein said non-linear configuration is a circular spiral configuration.

14. The test structure of claim 9 further comprising:

a first contact metal pad electrically connected to a first end of said core metal line, wherein said first contact metal pad is adapted to electrically connect to a first test probe;

a second contact metal pad electrically connected to a second end of said core metal line, wherein said second contact metal pad is adapted to electrically connect to a second test probe.

15. The test structure of claim 9, wherein said extrusion monitoring segment is utilized to indicate an extrusion when said resistance is less than a predetermined value.

16. A test structure comprising a core metal line, at least one extrusion detection line situated adjacent to said core metal line and an extrusion monitoring segment electrically connected to said at least one extrusion detection line, said test structure being characterized by:

said core metal line having a non-linear configuration, wherein said core metal line is capable of conducting current for an electromigration test, an isothermal test, and extrusion monitoring;

said extrusion monitoring segment being adapted to determine an extrusion in said core metal line by measuring a resistance between said core metal line and said at least one extrusion detection line;

wherein said non-linear configuration does not have a right angle turn.

17. The test structure of claim 16, wherein said non-linear configuration is a serpentine configuration.

18. The test structure of claim 16, wherein said non-linear configuration is a square spiral configuration.

19. The test structure of claim 16, wherein said non-linear configuration is a step configuration.

20. The test structure of claim 16, wherein said non-linear configuration is a circular spiral configuration.