System and method of operation of an embedded system for a digital capacitance diaphragm gauge

• US 6,910,381 B2
• Filed: 05/31/2002
• Issued: 06/28/2005
• Est. Priority Date: 05/31/2002
• Status: Expired due to Term

• Current Assignee: Brooks Instrument LLC (Illinois Tool Works Inc.)
• Original Assignee: Mykrolis Corporation (Entegris Incorporated)
• Inventors: Edwards, Marvin B., Arrant, Edwin K., Albert, David M.
• Primary Examiner(s): OEN, WILLIAM L
• Application Number:
  US10/063,991
• Publication Number:
  US 20030221491A1
• Time in Patent Office: 1,124 Days
• Field of Search: 737/18, 737/24, 737/54, 737/55, 361/283.1, 361/283.2, 361/283.3, 361/283.4
• US Class Current: 73/718
• CPC Class Codes: G01D 18/008 with calibration coefficients stored in memory
• CPC Class Codes: G01D 3/022 having an ideal characteristic, map or correction data stored in a digital memory
• CPC Class Codes: G01L 19/02 Arrangements for preventing, or for compensating for, effects of inclination or acceleration of the measuring device; Zero-setting means for aneroid barometers G01L7/14
• CPC Class Codes: G01L 19/04 Means for compensating for effects of changes of temperature , i.e. other than electric compensation
• CPC Class Codes: G01L 27/002 Calibrating, i.e. establishing true relation between transducer output value and value to be measured, zeroing, linearising or span error determination
• CPC Class Codes: G01L 9/125 with temperature compensating means non electric temperature compensating means G01L19/04

Abstract

Systems and methods for digitally controlling sensors. In one embodiment, a digital controller for a capacitance diaphragm gauge is embedded in a digital signal processor (DSP). The controller receives digitized input from a sensor AFE via a variable gain module, a zero offset module and an analog-to-digital converter. The controller automatically calibrates the received input by adjusting the variable gain and zero offset modules. The controller also monitors and adjusts a heater assembly to maintain an appropriate temperature at the sensor. The controller utilizes a kernel module that allocates processing resources to the various tasks of a gauge controller module. The kernel module repetitively executes iterations of a loop, wherein in each iteration, all of a set of high priority tasks are performed and one of a set of lower priority tasks are performed. The controller module thereby provides sensor measurement output at precisely periodic intervals, while performing ancillary functions as well.

Claims

1. A digitally controlled sensor system comprising:

a sensor;

an analog front end module coupled to the sensor and configured to produce an analog sensor signal;

an analog-to-digital converter configured to convert the analog sensor signal to a digital sensor signal; and

a digital controller configured to receive the digital sensor signal, process the signal and provide an output signal indicating a measured parameter corresponding to the sensor signal.

2. The system of claim 1, wherein the digital controller is implemented in a digital signal processor (DSP) and wherein the DSP is embedded in the sensor.

3. The system of claim 1, wherein the digital controller is implemented in a microcontroller and wherein the microcontroller is embedded in the sensor.

4. The system of claim 1, wherein the sensor comprises a capacitance diaphragm gauge.

5. The system of claim 1, wherein the controller utilizes a kernel module which is configured to perform iterations of a control loop, wherein the control loop comprises execution of all of a set of high priority tasks and execution of one or more low priority tasks.

6. The system of claim 5, wherein each iteration of the control loop is performed at a periodic time.

7. The system of claim 5, wherein the high priority tasks comprise at least one or more of the group consisting of:

reading the digital sensor signal from the analog-to-digital converter;

calculating a linearized pressure value from the digital sensor signal;

writing the linearized pressure value to a digital-to-analog converter; and

conveying the linearized pressure value to one or more port buffers.

8. The system of claim 5, wherein the low priority tasks comprise at least one or more of the group consisting of:

processing communication messages received from a diagnostics port;

processing control area network messages;

performing ambient temperature compensation;

performing a dosed loop heater algorithm;

servicing temperature LEDs;

monitoring overpressure and zero adjust inputs;

servicing status LEDs and switches;

servicing an EEPROM;

performing an automatic analog scaling procedure;

performing an automatic zero adjust procedure; and

performing an embedded diagnostic procedure.

9. The system of claim 1, wherein the digital controller is configured to perform an automatic calibration procedure.

10. The system of claim 9, wherein the digital controller is configured to compute a set of calibration constants upon which linearization calculations are based.

11. The system of claim 10, wherein the digital controller is configured to compute the set of calibration constants using a regression procedure.

12. The system of claim 10, wherein the digital controller is configured to archive the set of calibration constants in a non-volatile memory.

13. The system of claim 9, wherein the digital controller is configured to perform the automatic calibration procedure using calibration data imported to the digital controller from a calibration stand.

14. The system of claim 1, wherein the digital controller is configured to perform an automatic zero adjust procedure.

15. The system of claim 14, wherein the digital controller is configured to perform the automatic zero adjust procedure in response to an indication from a user.

16. The system of claim 14, wherein the digital controller is configured to perform the automatic zero adjust procedure in response to an electronic indication received via a network connection.

17. The system of claim 14, wherein the digital controller is configured to provide control data to an analog zero adjust module, wherein the control data is generated by the automatic zero adjust procedure.

18. The system of claim 14, wherein the digital controller is configured to lock out the automatic zero adjust procedure unless a predetermined set of conditions is met.

19. The system of claim 18, wherein the predetermined set of conditions include one or more of the group consisting of:

inlet pressure being below a detection limit of the sensor;

the sensor and its electronics being at a set point temperature;

ambient temperature being within a predetermined range;

an overpressure signal not being asserted; and

no fault conditions existing within the sensor or controller.

20. The system of claim 1, wherein the digital controller is configured to perform one or more embedded diagnostic procedures.

21. The system of claim 20, wherein the digital controller is configured to provide an indication of a fault condition detected by the one or more embedded diagnostic procedures.

22. The system of claim 20, wherein the digital controller is configured to archive detected fault conditions.

23. The system of claim 1, wherein the digital controller is configured to transmit diagnostic data resulting from the one or more embedded diagnostic procedures to a diagnostic port.

24. The system of claim 1, wherein the digital controller further comprises a dedicated diagnostics port.

25. The system of claim 24, wherein internal data stored in the digital controller is accessible to external devices.

26. The system of claim 1, wherein the digital controller is configured to linearize the digital sensor signal.

27. The system of claim 26, wherein the digital controller is configured to linearize the digital sensor signal using linearization expressions based on values stored in a non-volatile memory.

28. The system of claim 27, wherein the non-volatile memory is an EEPROM.

29. The system of claim 1, wherein the digital controller is configured to temperature compensate the digital sensor signal.