Interferometric stage system
First Claim
1. Apparatus comprising:
- a support structure;
a stage configured to move relative to the support structure;
a first reflection surface carried by one of the support structure and the stage; and
a first interferometry system configured to direct a first measurement beam to contact the first reflection surface and monitor changes in the position and orientation of the stage relative to the support structure along multiple degrees of freedom using the first measurement beam and no other measurement beam that contacts the first reflection surface.
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Accused Products
Abstract
an apparatus including: a support structure; a stage configured to move relative to the support structure; a first reflection surface carried by one of the support structure and the stage; and a first interferometry system. The first interferometry system is configured to direct a first measurement beam to contact the first reflection surface and monitor changes in the position and orientation of the stage relative to the support structure along multiple degrees of freedom using the first measurement beam and no other measurement beam that contacts the first reflection surface. For example, the first measurement beam can define a first measurement axis and the multiple degrees of freedom can include at least two of: distance along the first measurement axis, pitch about the first measurement axis, and yaw about the first measurement axis.
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Citations
43 Claims
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1. Apparatus comprising:
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a support structure;
a stage configured to move relative to the support structure;
a first reflection surface carried by one of the support structure and the stage; and
a first interferometry system configured to direct a first measurement beam to contact the first reflection surface and monitor changes in the position and orientation of the stage relative to the support structure along multiple degrees of freedom using the first measurement beam and no other measurement beam that contacts the first reflection surface. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35)
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36. Apparatus comprising:
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an object stage for carrying an object, the stage lying predominantly in the x-y plane of a Cartesian coordinate system;
a drive for moving the object stage in at least the x-direction, the y-direction, and a rotation about the z-axis; and
an interferometry system configured to monitor changes in the position of the stage along each of the x- and y-axes and changes in orientation about each of the x-, y-, and z-axes using fewer than five measurement axes. - View Dependent Claims (37, 38, 39, 40, 41, 42, 43)
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Specification