Electrostatically actuated micro-electro-mechanical devices and method of manufacture
First Claim
1. A MEMS mirror device, comprising:
- a mirror;
a gimbal structure for movably supporting the mirror, the gimbal structure including two pairs of flexure hinges, each pair defining an axis about which said mirror can be rotated, at least some of said flexure hinges having a folded configuration in a cross-section taken generally perpendicular to a respective axis to increase torsional compliance about said respective axis and to decrease compliance in other directions; and
a mechanism for actuating the mirror.
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Accused Products
Abstract
One embodiment is directed to a gimbal mechanism for a MEMS mirror device having folded flexure hinges. Another embodiment is directed to a gimbal mechanism having a frame with through-holes or recesses distributed thereabout to reduce weight of said frame. Other embodiments are directed to improved electrode structures for electrostatically actuated MEMS devices. Other embodiments are directed to methods for fabricating electrodes for electrostatically actuated MEMS devices. Other embodiments are directed to methods of fabricating through-wafer interconnect devices. Other embodiments are directed to MEMS mirror array packaging. Other embodiments are directed to electrostatically actuated MEMS devices having driver circuits integrated therewith. Other embodiments are directed to methods of patterning wafers with a plurality of through-holes. Other embodiments are directed to methods of forming moveable structures in MEMS devices. Other embodiments are directed to methods of depositing a thin film on the back of a MEMS device.
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Citations
31 Claims
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1. A MEMS mirror device, comprising:
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a mirror;
a gimbal structure for movably supporting the mirror, the gimbal structure including two pairs of flexure hinges, each pair defining an axis about which said mirror can be rotated, at least some of said flexure hinges having a folded configuration in a cross-section taken generally perpendicular to a respective axis to increase torsional compliance about said respective axis and to decrease compliance in other directions; and
a mechanism for actuating the mirror. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A MEMS mirror device, comprising:
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a mirror;
a gimbal structure for movably supporting the mirror, the gimbal structure including two pairs of flexure hinges, each pair defining an axis about which said mirror can be rotated, said flexure hinges each comprising multiple springs in a folded configuration, each spring also having a folded configuration in a cross-section taken generally perpendicular to a respective axis to increase torsional compliance about said respective axis and to decrease torsional compliance in other directions; and
a mechanism for actuating the mirror. - View Dependent Claims (8, 9, 10, 11)
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12. A MEMS mirror device, comprising:
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a mirror;
a support structure for movably supporting the mirror, the support structure including a movable portion with a plurality of holes distributed on said movable portion to reduce weight thereof and provide a lower moment of inertia; and
a mechanism for actuating the mirror. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19)
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- 20. A gimbal mechanism for movably supporting a structure, the gimbal mechanism including two pairs of flexure hinges, each pair defining an axis about which said structure can be rotated, said flexure hinges each having a folded configuration in a cross-section taken generally perpendicular to a respective axis to increase torsional compliance about said respective axis and to decrease compliance in other directions.
- 26. A gimbal mechanism for movably supporting a structure, the gimbal mechanism including two pairs of flexure hinges, each pair defining an axis about which said structure can be rotated, said flexure hinges each comprising multiple springs in a folded configuration, each spring also having a folded configuration in a cross-section taken generally perpendicular to a respective axis to increase torsional compliance about said respective axis and to decrease torsional compliance in other directions.
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31. A MEMS mirror device, comprising:
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a mirror;
a gimbal structure for rotatably supporting the mirror, said mirror being movable along a given path;
two pairs of electrodes for electrostatically actuating the mirror about said axes, each electrode having at least a portion thereof positioned about the periphery of said mirror and outside of said path; and
a bump stop located between said electrodes to restrict movement of said mirror beyond a given position.
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Specification