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Infrared light detection array and method of producing the same

  • US 6,914,245 B2
  • Filed: 11/04/2002
  • Issued: 07/05/2005
  • Est. Priority Date: 12/13/2001
  • Status: Expired due to Fees
First Claim
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1. An infrared light detection array with a plurality of infrared light detectors arranged on a substrate in the form of a matrix, said infrared light detectors each comprising:

  • a) a supporting leg fixed to said substrate at one end, having a laminated structure of an insulation layer and a wiring layer;

    b) a heat insulation structure portion supported by said supporting leg, comprising an insulation layer having a first surface to serve as a surface of incidence for infrared light to impinge on and a second surface to serve as a surface of incidence for reading light to impinge on, a reflection film which is formed on said second surface of said insulation layer, and a resistor connected with said wiring layer, and as said supporting legs heated up to a detection temperature by said infrared light reversibly warp, said infrared light detectors change the reflection direction of said reading light impinging upon said reflection films, wherein said supporting legs non-reversibly warp, as said resistors carry a current through said wiring layers and said supporting legs are heated up to a temperature higher than said detection temperature.

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