Multi-axis micro-electro-mechanical actuator
First Claim
1. An actuator assembly comprising:
- a. an actuator support;
b. a fixed comb connected to the actuator support and having a plurality of fixed teeth extending in a first direction;
c. a member frame flexibly connected to the actuator support and having a first fulcrum axis;
d. a movable comb connected to the member frame and having a plurality of movable teeth extending in the first direction, wherein the fixed and movable teeth are arranged interdigitally from a perspective perpendicular to the first direction and the first fulcrum axis; and
e. an actuated member connected to the member frame and movable with respect to the member frame along a second fulcrum axis;
f. a frame comb rigidly connected to the member frame and having a plurality of frame-comb teeth extending in a second direction different from the first direction;
g. a member comb rigidly connected to the member and having a plurality of member teeth extending in the second direction, wherein the frame-comb teeth and the member teeth are arranged interdigitally from the perspective perpendicular to the first direction and the first fulcrum axis; and
h. a hinge connecting the member frame to the actuator support, wherein the hinge includes a first portion electrically connected to the frame comb and a second portion electrically connected to the member teeth, and wherein the first portion is electrically insulated from the second portion.
3 Assignments
0 Petitions
Accused Products
Abstract
A Micro-Electro-Mechanical Systems (MEMS) actuator employs electrostatic comb electrodes to position optical elements along multiple axes. In one embodiment, an actuator assembly includes an actuator support, typically a silicon wafer, supporting a fixed comb with a plurality of teeth. A frame flexibly connected to the actuator support includes a complementary set of movable comb electrodes, the teeth of which are arranged interdigitally with the teeth of the fixed combs. The frame can be tilted with respect to the actuator support along a first fulcrum axis by applying a potential difference between the fixed and movable combs. Each actuator assembly also includes an actuated member, a mirror mount in one embodiment, flexibly connected to the frame. The actuated member and the frame include electrical isolated, interdigitated, combs. The actuated member can be moved relative to the frame along a second fulcrum axis by applying a potential between these interdigitated combs. A bonding process for fabrication of an array of actuators is described.
66 Citations
24 Claims
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1. An actuator assembly comprising:
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a. an actuator support;
b. a fixed comb connected to the actuator support and having a plurality of fixed teeth extending in a first direction;
c. a member frame flexibly connected to the actuator support and having a first fulcrum axis;
d. a movable comb connected to the member frame and having a plurality of movable teeth extending in the first direction, wherein the fixed and movable teeth are arranged interdigitally from a perspective perpendicular to the first direction and the first fulcrum axis; and
e. an actuated member connected to the member frame and movable with respect to the member frame along a second fulcrum axis;
f. a frame comb rigidly connected to the member frame and having a plurality of frame-comb teeth extending in a second direction different from the first direction;
g. a member comb rigidly connected to the member and having a plurality of member teeth extending in the second direction, wherein the frame-comb teeth and the member teeth are arranged interdigitally from the perspective perpendicular to the first direction and the first fulcrum axis; and
h. a hinge connecting the member frame to the actuator support, wherein the hinge includes a first portion electrically connected to the frame comb and a second portion electrically connected to the member teeth, and wherein the first portion is electrically insulated from the second portion. - View Dependent Claims (2, 3)
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4. An actuator assembly disposed on an actuator support, the actuator assembly comprising:
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a. a fixed comb connected to the actuator support and having a plurality of fixed teeth extending in a first direction;
b. a member frame flexibly connected to the actuator support and having a first fulcrum axis;
c. a movable comb connected to the member frame and having a plurality of movable teeth extending in the first direction, wherein the fixed and movable teeth are arranged interdigitally from a perspective perpendicular to the first direction and the first fulcrum axis; and
d. an actuated member connected to the member frame and movable with respect to the member frame along a second fulcrum axis;
e. wherein the actuated member comprises a mirror; and
f. wherein the actuator assembly occupies a first area in a plane defined by the first fulcrum axis and the second fulcrum axis, and wherein the mirror surface occupies a second area at least one fourth the first area. - View Dependent Claims (5, 6)
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7. An actuator assembly comprising:
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a. an actuator support;
b. a fixed comb connected to the actuator support and having a plurality of fixed teeth extending in a first direction;
c. a member frame formed in a conductive layer and flexibly connected to the actuator support, the member frame having a first fulcrum axis;
d. a movable comb formed in the conductive layer and connected to the member frame, the movable comb having a plurality of movable teeth extending in the first direction, wherein the fixed and movable teeth are arranged interdigitally from a perspective perpendicular to the first direction and the first fulcrum axis;
e. an actuated member connected to the member frame and movable with respect to the member frame along a second fulcrum axis; and
f. a hinge formed in the conductive layer and connecting the member frame to the actuator support, wherein the hinge is thinner than the fixed movable comb in a second direction perpendicular to the first and second axes. - View Dependent Claims (8)
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9. An actuator assembly comprising:
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a. an actuator support;
b. a fixed comb connected to the actuator support and having a plurality of fixed teeth extending in a first direction;
c. a member frame flexibly connected to the actuator support and having a first fulcrum axis;
d. a movable comb connected to the member frame and having a plurality of movable teeth extending in the first direction, wherein the fixed and movable teeth are arranged interdigitally from a perspective perpendicular to the first direction and the first fulcrum axis;
e. an actuated member connected to the member frame and movable with respect to the member frame along a second fulcrum axis; and
f. a hinge connecting the member frame to the actuator support, wherein the hinge is thinner than the fixed comb in a second direction perpendicular to the first and second axes;
g. wherein the hinge comprises two electrically conductive portions separated by an electrically insulating portion.
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10. An actuator assembly comprising:
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a. an actuator support;
b. a fixed comb connected to the actuator support and having a plurality of fixed teeth extending in a first direction;
c. a member frame flexibly connected to the actuator support and having a first fulcrum axis;
d. a movable comb connected to the member frame and having a plurality of movable teeth extending in the first direction, wherein the fixed and movable teeth are arranged interdigitally from a perspective perpendicular to the first direction and the first fulcrum axis; and
e. an actuated member connected to the member frame and movable with respect to the member frame along a second fulcrum axis;
f. wherein the fixed teeth are of varying length.
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11. An actuator assembly comprising:
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a. an actuator support;
b. a fixed comb connected to the actuator support and having a plurality of fixed teeth extending in a first direction;
c. a member frame flexibly connected to the actuator support and having a first fulcrum axis;
d. a movable comb connected to the member frame and having a plurality of movable teeth extending in the first direction, wherein the fixed and movable teeth are arranged interdigitally from a perspective perpendicular to the first direction and the first fulcrum axis; and
e. an actuated member connected to the member frame and movable with respect to the member frame along a second fulcrum axis;
f. wherein the movable teeth are of varying length. - View Dependent Claims (12, 13, 14, 15)
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16. An actuator assembly comprising:
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a. an actuator support;
b. a first comb means connected to the actuator support;
c. an actuated member flexibly connected to the actuator support;
d. a second comb means connected to the actuated member and adapted to move relative to the first comb means to position the actuated member;
e. wherein the actuated member rotates in a first dimension along a first fulcrum axis with respect to the actuator support; and
f. wherein the actuated member rotates in a second dimension along a second fulcrum axis with respect to the actuator support;
g. wherein the second comb means includes a plurality of teeth that move with respect to the first comb means, and wherein the teeth are of varying length. - View Dependent Claims (17, 18)
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19. An actuator comprising:
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a. an actuator support;
b. a first set of teeth connected to the actuator support and extending in parallel;
c. a second set of teeth connected to the actuator support and extending in parallel;
d. an actuated member connected to the actuator support;
e. a third set of teeth connected to the actuated member, wherein the teeth of the third set of teeth extend in parallel with the teeth of the first set of teeth, and wherein the first and third sets of teeth are arranged interdigitally from at least one perspective;
f. a fourth set of teeth connected to the actuated member, wherein the teeth of the fourth set of teeth extend in parallel with the teeth of the second set of teeth, wherein the second and fourth sets of teeth are arranged interdigitally from the at least one perspective, and wherein the teeth of the first and second sets are not parallel. - View Dependent Claims (20, 21, 22)
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23. An actuator comprising:
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a. an actuator support;
b. an actuated member movably connected to the actuator support;
c. a first set of interdigitated combs adapted to pivot the actuated member relative to the actuator support along a first fulcrum axis in response to a first applied voltage; and
d. a second set of interdigitated combs adapted to move the actuated member relative to the actuator support along a second fulcrum axis in response to a second applied voltage;
e. wherein the actuated member is adapted to simultaneously move translationally and rotationally relative to the actuator support. - View Dependent Claims (24)
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Specification