Spatial light modulator with hidden comb actuator

• US 6,914,711 B2
• Filed: 03/22/2003
• Issued: 07/05/2005
• Est. Priority Date: 03/22/2003
• Status: Expired due to Term

• Current Assignee: II-VI Delaware, Inc. (Coherent Corp.)
• Original Assignee: Active Optical Networks, Inc.
• Inventors: Shah, Paren, Novotny, Vlad J.
• Primary Examiner(s): Lester, Evelyn A.
• Application Number:
  US10/394,835
• Publication Number:
  US 20040184132A1
• Time in Patent Office: 836 Days
• Field of Search: 359/223, 359/224, 359290-292, 359/295, 359/298
• US Class Current: 359/291
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means

Abstract

Described are Micro-Electro-Mechanical Systems (MEMS) actuators with hidden combs and hinges. The ability to hide the combs renders the actuators useful in digital micro-mirror devices. Comb actuators provide increased torque, which facilitates the use of stiffer, less fragile hinge structures. Also important, comb actuators do not require mechanical stops to define stable states, and thus avoid problems associated with physical contact. The actuators are infinitely variable through a range of angles.

Claims

1. An actuator comprising:

a. a substrate;

b. a fixed comb connected to the substrate and including a plurality of fixed teeth extending in a first plane;

c. a movable comb movable with respect to the fixed comb and including a plurality of movable teeth extending in a second plane;

d. a hinge connected between the substrate and the movable comb, the hinge facilitating movement of the movable comb with respect to the fixed comb along a fulcrum axis; and

e. an actuated member connected to the movable comb and the hinge;

f. wherein the first and second planes extend between the substrate and the actuated member; and

g. wherein the actuated member is adapted to tilt along the fulcrum axis when the movable comb moves with respect to the fixed comb.

2. The actuator of claim 1, wherein the fulcrum axis is substantially parallel to the first and second planes.

3. The actuator of claim 1, further comprising a second movable comb including a second plurality of movable teeth extending in a direction parallel to the first-mentioned plurality of movable teeth.

4. The actuator of claim 3, wherein the second movable comb is disposed in the second plane, and wherein the fulcrum axis extends between the first and second movable combs from a perspective normal to the second plane.

5. The actuator of claim 4, further comprising a bridge connected to the hinge, the first movable comb, and the second movable comb.

6. The actuator of claim 1, further comprising a second fixed comb including a second plurality of fixed teeth extending in a direction parallel to the first-mentioned plurality of fixed teeth.

7. The actuator of claim 6, wherein the first-mentioned fixed teeth are electrically isolated from the second fixed teeth.

8. The actuator of claim 1, wherein the actuated member comprises a mirror.

9. The actuator of claim 1, wherein the actuator is one of a plurality of similar actuators in a mirror array.

10. The actuator of claim 1, wherein at least one of the hinge, the fixed comb, the actuated member, and the movable comb comprises germanium.

11. The actuator of claim 1, further comprising an integrated circuit having a first contact pad electrically connected to the movable comb and a second contact pad electrically connected to the fixed comb.

12. An actuator comprising:

a. a substrate;

b. a fixed comb connected to the substrate and including a plurality of fixed teeth extending in a first plane;

c. a movable comb, including a plurality of movable teeth extending in a second plane;

d. a hinge connected between the substrate and the movable comb, the hinge facilitating movement of the movable comb with respect to the fixed comb; and

e. an actuated member connected to the movable comb and extending in a third plane;

f. wherein the first and second planes extend between the substrate and the third plane; and

g. wherein the first and second planes are coplanar.

13. An actuator comprising:

a. a substrate;

b. a fixed comb connected to the substrate and including a plurality of fixed teeth extending in a first plane;

c. a movable comb, including a plurality of movable teeth extending in a second plane;

d. a hinge connected between the substrate and the movable comb, the hinge facilitating movement of the movable comb with respect to the fixed comb; and

e. an actuated member connected to the movable comb and extending in a third plane;

f. wherein the first and second planes extend between the substrate and the third plane; and

g. wherein the substrate includes an insulating surface, a first electrode connected to the movable comb, and a second electrode connected to the fixed comb.

14. An actuator comprising:

a. a substrate;

b. a fixed comb connected to the substrate and including a plurality of fixed teeth extending in a first plane;

c. a movable comb, including a plurality of movable teeth extending in a second plane;

d. a hinge connected between the substrate and the movable comb, the hinge facilitating movement of the movable comb with respect to the fixed comb; and

e. an actuated member connected to the movable comb and extending in a third plane;

f. wherein the first and second planes extend between the substrate and the third plane; and

g. wherein at least a portion of the movable comb is disposed between the actuated member and the fixed comb.

15. An actuator comprising:

a. a substrate;

b. a fixed comb connected to the substrate and including a plurality of fixed teeth extending in a first plane;

c. a movable comb, including a plurality of movable teeth extending in a second plane;

d. a hinge connected between the substrate and the movable comb, the hinge facilitating movement of the movable comb with respect to the fixed comb; and

e. an actuated member connected to the movable comb and extending in a third plane;

f. wherein the first and second planes extend between the substrate and the third plane; and

g. wherein the actuated member obscures at least a portion of the fixed and movable combs from a perspective normal to the first plane.

16. An actuator comprising:

a. a substrate;

b. a fixed comb connected to the substrate and including a plurality of fixed teeth extending in a first plane;

c. a movable comb, including a plurality of movable teeth extending in a second plane;

d. a hinge connected between the substrate and the movable comb, the hinge facilitating movement of the movable comb with respect to the fixed comb; and

e. an actuated member connected to the movable comb and extending in a third plane;

f. wherein the first and second planes extend between the substrate and the third plane; and

g. wherein an applied voltage potential between the fixed comb and the movable comb moves the movable comb relative to the fixed comb to tilt the actuated member along a fulcrum axis by a fixed deflection angle, and wherein the applied voltage potential defines the fixed deflection angle.

17. The actuator of claim 16, wherein a second applied voltage potential between the fixed comb and the movable comb moves the movable comb relative to the fixed comb to tilt the actuated member by a second fixed deflection angle along the fulcrum axis, and wherein the second applied voltage potential defines the second fixed deflection angle.

18. The actuator of claim 16, wherein the fixed deflection angle corresponds to an “

on”

state.

19. An actuator comprising:

a. a substrate;

b. a fixed comb connected to the substrate and including a plurality of fixed teeth extending in a first plane;

c. a movable comb, including a plurality of movable teeth extending in a second plane;

d. a hinge connected between the substrate and the movable comb, the hinge facilitating movement of the movable comb with respect to the fixed comb; and

e. an actuated member connected to the movable comb and extending in a third plane;

f. wherein the first and second planes extend between the substrate and the third plane; and

g. wherein at least two of the fixed teeth are of different lengths.

20. An actuator comprising:

a. a substrate;

b. a fixed comb connected to the substrate and including a plurality of fixed teeth extending in a first plane;

c. a movable comb, including a plurality of movable teeth extending in a second plane;

d. a hinge connected between the substrate and the movable comb, the hinge facilitating movement of the movable comb with respect to the fixed comb; and

e. an actuated member connected to the movable comb and extending in a third plane;

f. wherein the first and second planes extend between the substrate and the third plane; and

g. wherein at least two of the movable teeth are of different lengths.

21. A spatial light modulator comprising:

a. a plurality of separately actuated adjacent movable mirror surfaces disposed over a substrate and separated by interstitial spaces, wherein the adjacent movable mirror surfaces are arranged in an array extending over an array area, each movable mirror surface having an active-surface area; and

b. a plurality of comb actuators, at least one comb actuator disposed between each movable mirror surface and the substrate;

c. wherein adding the active-surface areas produces a combined active-surface area at least 90 percent of the array area.

22. The spatial light modulator of claim 21, further comprising, for each mirror surface, at least one movable comb connected to the mirror surface;

and a fixed comb interdigitated with the movable comb.

23. The spatial light modulator of claim 22, wherein at least one of the fixed combs is disposed in a first plane and at least one of the movable combs is disposed in a second plane extending between the first plane and at least one of the movable mirror surfaces.

24. The spatial light modulator of claim 22, further comprising a plurality of hinges, each hinge connected to a respective one of the plurality of movable combs.

25. The actuator of claim 21, further comprising an integrated circuit having first contact pads electrically connected to the movable combs and second contact pads electrically connected to the fixed combs.

26. A spatial light modulator comprising:

a. a plurality of adjacent movable mirror surfaces arranged in an array extending over an array area, each movable mirror surface having an active-surface area, wherein adding the active-surface areas produces a combined active-surface area at least 90 percent of the array area;

b. for each mirror surface, at least one movable comb connected to the mirror surface and a fixed comb interdigitated with the movable comb; and

c. a plurality of hinges, each hinge connected to a respective one of the plurality of movable combs;

d. wherein each of the hinges is a torsional hinge.

27. A spatial light modulator comprising:

a. a plurality of adjacent movable mirror surfaces arranged in an array extending over an array area, each movable mirror surface having an active-surface area, wherein adding the active-surface areas produces a combined active-surface area at least 90 percent of the array area;

b. for each mirror surface, at least one movable comb connected to the mirror surface and a fixed comb interdigitated with the movable comb; and

c. an integrated circuit having a first plurality of contact pads electrically connected to the movable combs and a second collection of contact pads electrically connected to the fixed combs.

28. A spatial light modulator comprising:

a. a plurality of adjacent movable mirror surfaces arranged in an array extending over an array area, each movable mirror surface having an active-surface area, wherein adding the active-surface areas produces a combined active-surface area at least 90 percent of the array area; and

b. for each mirror surface, at least one movable comb connected to the mirror surface and a fixed comb interdigitated with the movable comb;

c. wherein at least one of the fixed and movable combs has teeth of different lengths.

29. A spatial light modulator comprising:

a. a plurality of adjacent movable mirror surfaces arranged in an array extending over an array area, each movable mirror surface having an active-surface area;

b. wherein adding the active-surface areas produces a combined active-surface area at least 90 percent of the array area; and

c. wherein at least two of the movable teeth are of different lengths.

30. A projection system comprising:

a. a substrate;

b. a plurality of actuators disposed on the substrate, each actuator including;

i. a fixed comb connected to the substrate and including a plurality of fixed teeth;

ii. a movable comb, including a plurality of movable teeth; and

iii. a hinge connected between the fixed comb and the movable comb, the hinge facilitating movement of the movable comb with respect to the fixed comb; and

c. an array of individually actuated members separated by interstitial spaces, each actuated member including a light-modulating surface connected to at least one of the movable combs;

d. wherein the fixed and movable combs are disposed between the actuated members and the substrate.

31. The projection system of claim 30, wherein the fixed comb defines a first plane, the movable comb defines a second plane, and the first and second planes are coplanar.

32. The projection system of claim 30, wherein at least one of the hinge, the fixed comb, the movable comb, and the actuated member comprises germanium.

33. The projection system of claim 30, further comprising an integrated circuit having first contact pads electrically connected to the movable combs and second contact pads electrically connected to the fixed combs.

34. A spatial light modulator disposed over a substrate and adapted to modulate light directed to the modulator, the spatial light modulator comprising:

a. a plurality of comb actuators, each actuator including;

i. a first comb including a first plurality of teeth; and

ii. a second comb including a second plurality of teeth; and

iii. wherein the first comb moves with respect to the second comb; and

b. an actuated member disposed over the substrate and at least a portion of the first and second combs, the actuated member receiving a portion of the light;

c. wherein the actuated members are separated from one another by interstitial spaces and arranged in an array extending over a total array area.

35. The spatial light modulator of claim 34, wherein the interstitial spaces account for less than ten percent of the total array area.

36. The spatial light modulator of claim 34, wherein each actuated member reflects the respective portion of the light.

37. The spatial light modulator of claim 34, wherein each movable comb tilts the respective actuated member along a fulcrum axis.

38. The spatial light modulator of claim 37, wherein the actuated members tilt about 10 degrees.

39. The spatial light modulator of claim 34, wherein a first degree of tilt corresponds to an “

on”

state and a second degree of tilt corresponds to an “

off”

state.

40. The spatial light modulator of claim 39, wherein ones of the actuated members in the “

on”

state reflect the respective portion of the light through a projection lens, and ones of the actuated members in the “

off”

stage reflect the respective portion of the light away from the projection lens.

41. The spatial light modulator of claim 34, wherein at least one of the combs includes germanium.

42. The spatial light modulator of claim 34, further comprising an integrated circuit having first contact pads electrically connected to the first combs and second contact pads electrically connected to the second combs.

43. The spatial light modulator of claim 34, wherein the actuated member tilts along a fulcrum axis to produce a range of deflection angles.

44. The spatial light modulator of claim 43, wherein a range of voltage applied between one of the first combs and one of the second combs moves the respective actuated member over the range of deflection angles.

45. The spatial light modulator of claim 34, further comprising a hinge connected between the first and second combs.