Micro mirror unit, optical disc drive using same, and method for producing micro mirror unit
First Claim
1. A method for producing a micro mirror unit comprising a frame and a mirror substrate, formed from a single substrate material, the mirror body having a mirror surface thereof formed on the mirror substrate being linked to the frame by means of hinges in such a manner that the mirror body is supported movably in relation to the frame, comprising:
- a first step at which a material for the hinges are formed as layer on one main side of a substrate material for the frame and mirror substrate;
a second step at which a resist layer is formed on the other main side of the substrate material on which a mirror surface is formed; and
a third step at which the frame and mirror substrate are separated from each other by the dry etching using the resist layer as a mask.
1 Assignment
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Accused Products
Abstract
The hinge (13) should preferably be formed to have a higher resistance than ever against the pivoting of the mirror body (12) to effectively prevent the hinge (13) from being damaged. By adopting a suitable one of a variety of production steps as necessary, the hinge (13) can be formed more finely and with a higher precision and thus the micro mirror unit can be produced more easily in a shorter time. To this end, the hinge (13) is formed from a different material, such as SiNx, from the mirror substrate material from which the frame (11) and mirror body (12) are formed.
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Citations
5 Claims
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1. A method for producing a micro mirror unit comprising a frame and a mirror substrate, formed from a single substrate material, the mirror body having a mirror surface thereof formed on the mirror substrate being linked to the frame by means of hinges in such a manner that the mirror body is supported movably in relation to the frame, comprising:
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a first step at which a material for the hinges are formed as layer on one main side of a substrate material for the frame and mirror substrate;
a second step at which a resist layer is formed on the other main side of the substrate material on which a mirror surface is formed; and
a third step at which the frame and mirror substrate are separated from each other by the dry etching using the resist layer as a mask. - View Dependent Claims (2, 3, 4, 5)
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Specification