Method and apparatus for three dimensional inspection of electronic components
DCFirst Claim
1. A three dimensional inspection method for inspecting ball grid array devices having a plurality of balls, wherein the ball grid array device is positioned in an optical system, the inspection method comprising:
- illuminating at least one ball on the ball array device using a fixed illumination system;
disposing a single sensor, a first optical element and a second optical element in relation to the ball grid array device so that the sensor obtains at least two differing views of the at least one ball, the sensor providing output representing the at least two differing views; and
processing the output using a triangulation method to calculate a three dimensional position of the at least one ball with reference to a pre-calculated calibration plane.
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Abstract
A three dimensional inspection method for inspecting ball array devices having a plurality of balls, where the ball array device is positioned in an optical system. The inspection method includes the steps of illuminating at least one ball on the ball array device, and disposing a sensor, a first optical element and a second optical element in relation to the ball array device so that the sensor obtains at least two differing views of the at least one ball, the sensor providing an output representing the at least two differing views. The output is processed using a triangulation method to calculate a three dimensional position of the at least one ball with reference to a pre-calculated calibration plane.
95 Citations
105 Claims
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1. A three dimensional inspection method for inspecting ball grid array devices having a plurality of balls, wherein the ball grid array device is positioned in an optical system, the inspection method comprising:
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illuminating at least one ball on the ball array device using a fixed illumination system;
disposing a single sensor, a first optical element and a second optical element in relation to the ball grid array device so that the sensor obtains at least two differing views of the at least one ball, the sensor providing output representing the at least two differing views; and
processing the output using a triangulation method to calculate a three dimensional position of the at least one ball with reference to a pre-calculated calibration plane. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28)
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29. A three dimensional inspection method for ball grid array devices having plurality of balls, the method comprising:
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illuminating the ball array device using a fixed illumination system;
disposing a single sensor to receive light at a first angle relative to the ball grid array device;
positioning a first optical element to transmit light to the sensor, where the sensor obtains a first view of the ball grid array device;
disposing a second optical element to receive light at a second angle different from the first angle and to transmit a second view of the ball grid array device to the sensor;
transmitting image information from the sensor; and
processing the image information by applying triangulation calculations to measurements of the image information so as to calculate a three dimensional position of at least one ball with reference to a pre-calulated calibration plane. - View Dependent Claims (30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57)
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58. A three dimensional inspection method for ball grid array devices having plurality of balls, the method comprising:
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illuminating a ball grid array device using a fixed illumination system;
disposing a single sensor to receive light at a first angle relative to the ball grid array device, wherein the sensor includes a solid state sensor array;
disposing a first optical element to transmit light to the sensor, where the sensor obtains a first view of the ball grid array device;
disposing a second optical element to receive light at a second angle different from the first angle, and to transfer a second view of the ball grid array device to the sensor;
transmitting image information representing the first view and the second view; and
processing the image information by applying triangulation calculations to measurements of the image information so as to calculate a three dimensional position of at least one ball with reference to a precalculated calibration plane, wherein the calibration plane comprises a coordinate system having X, Y and Z axes, and wherein an X measurement value is proportional to a Z measurement value. - View Dependent Claims (59, 60, 61, 62, 63, 64, 65, 66, 67, 68, 69, 70, 71, 72, 73, 74, 75, 76, 77, 78, 79, 80, 81, 82, 83, 84)
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85. A three dimensional inspection method for ball grid array devices having a plurality of balls, the method comprising:
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measuring a calibration plate to determine a calibration plane;
illuminating a ball grid array device using a fixed illumination system;
disposing a single sensor to receive light at a first angle relative to the ball grid array device, wherein the sensor includes a solid state sensor array;
disposing a first optical element to transmit light to the sensor, where the sensor obtains a first view of the ball grid array device;
disposing a second optical element to receive light at a second angle different from the first angle, and to transfer a second view of the ball grid array device to the sensor;
transmitting image information representing the first view and the second view; and
processing the image information by applying triangulation calculations to measurements of the image information so as to calculate a three dimensional position of at least one ball with reference to the calibration plane, wherein the calibration plane comprises a coordinate system having X, Y and Z axes, and wherein an X measurement value is proportional to a Z measurement value.
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86. A three dimensional inspection process for ball grid array devices having a plurality of balls, wherein the ball grid array device is positioned in a fixed optical system, the process comprising:
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illuminating the ball grid array device using a fixed illumination system;
taking a first image of the ball grid array device with a single camera disposed in a fixed focus position relative to the ball grid array device to obtain a circular doughnut shape image from at least one ball;
taking a second image of the ball grid array device with an optical element disposed in a fixed focus position relative to the ball grid array device to transmit a side view image of the at least one ball to the camera; and
processing the first image and the second image using a triangulation method to calculate a three dimensional position of the at least one ball with reference to a pre-calculated calibration plane. - View Dependent Claims (87, 88, 89, 90, 91, 92, 93, 94, 95, 96, 97, 98, 99, 100, 101, 102, 103, 104, 105)
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Specification