Double-ended tuning fork vibratory gyro-sensor

• US 6,915,694 B2
• Filed: 09/17/2003
• Issued: 07/12/2005
• Est. Priority Date: 09/11/2002
• Status: Expired due to Term

• Current Assignee: Seiko Epson Corporation (Seiko Group)
• Original Assignee: Miyazaki Epson Corp. (Seiko Group)
• Inventors: Ono, Atsushi, Sato, Kenji, Tomikawa, Yoshiro
• Primary Examiner(s): CHAPMAN JR, JOHN E
• Application Number:
  US10/664,821
• Publication Number:
  US 20050056095A1
• Time in Patent Office: 664 Days
• Field of Search: 735/101.6, 735/041.4, 735/041.2, 310/329
• US Class Current: 73/504.16
• CPC Class Codes: G01C 19/5607 using vibrating tuning forks double-ended tuning forks using planar vibrating masses suspended at opposite ends G01C19/5719
• CPC Class Codes: H03H 9/2473 Double-Ended Tuning Fork [DETF] resonators

Abstract

The object of the present invention is to provide an angular velocity sensor that uses Coriolis force with a flatly supported double tuning fork structure that uses an in-plane asymmetrical flexural secondary mode. A large support area is used to provide a high-precision angular velocity sensor with superior resistance to vibration and impact. A double tuning fork gyro-sensor is formed integrally from: two arms; a driver electrode formed on the arms; and a double tuning fork supporting the ends of the arms. Also included are: a detection module connected to the double tuning fork support section; a detection electrode formed on the detection module; and a support securing section for the detection module. When there is rotation, the Coriolis force acting on the arms is transferred to the detection module by way of the double tuning fork support section so that an in-plane asymmetrical flexural secondary vibration takes place.

Claims

1. A dual tuning fork vibratory gyro-sensor comprising:

a drive section including two arms, wherein each includes surfaces thereon and ends, and drive electrodes formed on said surfaces of said arms;

a first and a second tuning fork support section supporting said ends of said arms;

a first and a second detection section connected to said first and said second tuning fork support sections respectively and disposed outside said drive section;

a first and a second detection electrode formed on said first and said second detection sections respectively; and

a first and a second support securing section supporting an end of said first and second detection sections;

wherein said arms and said drive electrodes and said first and said second tuning fork support sections and said first and said second detection sections and said first and said second detection electrodes and said first and said second support securing sections are formed integrally and detect rotational angular velocity;

when said dual tuning fork gyro-sensor rotates, a Coriolis force acting on said arms causes in-plane asymmetrical flexural secondary mode vibrations to be generated at said arms, said in-plane asymmetrical flexural secondary mode vibrations being transferred to said first and said second detection sections by way of said first and said second dual tuning fork support sections; and

a detection signal for a rotational angular velocity is output from said first and second detection electrodes.

2. A dual tuning fork vibratory gyro-sensor as described in claim 1 wherein:

a crystal is used as a base material for said dual tuning fork vibratory gyro-sensor, said crystal being cut so that a normal direction of a main plane is a Z axis of a crystal axis; and

said first and second detections sections are formed with a rectangular shape.

3. A dual tuning fork vibratory gyro-sensor as described in claim 1, wherein said first and

said second tuning fork support sections each having an inner wall supporting the ends of the arms;

wherein said first and said second tuning fork support sections each having an outer wall connected to one end of said first and said second detection sections; and

said detections sections further connected at a second end to the first and second support securing sections.