Temperature controlled window with a fluid supply system

• US 6,916,399 B1
• Filed: 06/03/1999
• Issued: 07/12/2005
• Est. Priority Date: 06/03/1999
• Status: Expired due to Fees

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Fovell, Richard, Rozenzon, Yan, Pu, Bryan, Vaidya, Kaushik, Choi, Dong Ho, Hamrah, Matt, Lavi, Gil, Lee, Evans Y., Luscher, Paul E.
• Primary Examiner(s): ALEJANDRO MULERO, LUZ L
• Application Number:
  US09/325,026
• Time in Patent Office: 2,231 Days
• Field of Search: 156/345.47, 156/345.48, 156/345.27, 156/345.33, 156/345.34, 156/345.37, 156/345.43, 156/345.46, 204/298.09, 543/45, 118/723.R, 118/715, 118/722, 118/724, 118/723.I, 118/723.JR, 118/723.AN, 118/7.735, 118/773.E
• US Class Current: 156/345.37
• CPC Class Codes: H01J 37/321 the radio frequency energy being inductively coupled to the plasma
• CPC Class Codes: H01J 37/32522 Temperature
• CPC Class Codes: H01L 21/67069 for drying etching
• CPC Class Codes: H01L 21/67109 mainly by convection

Abstract

The present invention provides a temperature controlled energy transparent window or electrode used to advantage in a substrate processing system. The invention also provides methods associated with controlling lid temperature during processing and for controlling etching processes. In a preferred embodiment the invention provides a fluid supply system for the lid which allows the fluid to flow through a feedthrough and into and out of a channel formed in the window or electrode. The fluid supply system may also mount the window or electrode to a retaining ring which secures the window or electrode to the chamber. In another aspect the invention provides a bonded window or electrode having a first and second plate having a channel formed in the plates so that when the plates are bonded together they form a channel therein through which a temperature controlling fluid can be flowed. An external control system preferably regulates the temperature of the fluid.

Claims

1. A processing chamber, comprising:

a chamber body;

a substrate support member disposed within the chamber body;

a retaining ring having one or more feedthrough holes formed therein;

one or more feedthroughs disposed in the one or more feedthrough holes; and

a chamber lid connected to the retaining ring by the one or more feedthroughs, the chamber lid comprising a first plate coupled to a second plate, wherein the first plate and the second plate form a temperature control channel, wherein a fluid inlet and a fluid outlet are formed in the chamber lid, and wherein the fluid inlet and the fluid outlet are fluidly coupled to the one or more feedthroughs.

2. The processing chamber of claim 1, wherein the chamber lid further comprises one or more feedthrough pockets in which the one or more feedthroughs are received to connect the chamber lid to the retaining ring.

3. The processing chamber of claim 2, wherein at least one of the one or more feedthroughs comprises an enlarged engagement portion, the enlarged engagement portion being insertable into a portion of a feedthrough pocket.

4. The processing chamber of claim 2, wherein at least one of the one or more feedthrough pockets comprises a pocket shoulder for receiving a sealing element therein.

5. The processing chamber of claim 1, further comprising a fastener adapted to attach the feedthrough to the retaining ring.

6. The processing chamber of claim 1, wherein the retaining ring further comprises one or more fluid passages fluidly connected to the one or more feedthrough holes.

7. The processing chamber of claim 1, wherein each feedthrough comprises:

an axial channel along a portion of a length of the feedthrough; and

one or more transverse ports fluidly connected to the axial channel.

8. The processing chamber of claim 1, wherein the retaining ring further comprises an alignment shoulder adapted to align the chamber lid to the retaining ring.

9. The processing chamber of claim 1, wherein the first plate and the second plate each form a portion of the depth of the temperature control channel.

10. The processing chamber of claim 1, wherein the temperature control channel is continuous between the fluid inlet and the fluid outlet.

11. The processing chamber of claim 1, further comprising one or more feedthrough pockets fluidly connected to the temperature control channel, wherein at least one feedthrough pocket is fluidly connected to a feedthrough, and wherein the feedthrough secures the chamber lid to the retaining ring.

12. The processing chamber of claim 1, wherein the temperature control channel forms a circuitous pattern substantially throughout the chamber lid.

13. The processing chamber of claim 1, wherein the surface area of the temperature control channel comprises between about 30% and about 60% of the surface area of the chamber lid.

14. The processing chamber of claim 1, wherein the temperature control channel is structured and arranged to cover between about 30% to about 60% of the surface area of the chamber lid.

15. The processing chamber of claim 1, wherein the chamber lid comprises a material selected from the group of aluminum oxide, aluminum nitride, silicon carbide, silicon, polysilicon and combinations thereof.

16. The processing chamber of claim 1, wherein the temperature control channel is formed by a groove in one of the plates and a generally smooth face of the other plate.

17. The processing chamber of claim 1, wherein the temperature control channel is formed by at least one groove in each of the first and second plates.

18. The processing chamber of claim 1, wherein the temperature control channel is arcuate, radial, meandering or a combination thereof.

19. The processing chamber of claim 1, wherein a surface of the second plate is textured.

20. A processing chamber comprising:

a chamber body;

a substrate support member disposed within the chamber body;

a retaining ring coupled to the chamber body, wherein the retaining ring has a feedthrough hole formed therein;

a chamber lid coupled to the retaining ring, wherein the chamber lid forms a fluid inlet, a fluid outlet, and a temperature control channel, and wherein the temperature control channel is fluidly connected to the fluid inlet and fluid outlet; and

a feedthrough disposed in a feedthrough hole, wherein the feedthrough is fluidly connected to the temperature control channel, and wherein the feedthrough attaches the chamber lid to the retaining ring.