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Temperature controlled window with a fluid supply system

  • US 6,916,399 B1
  • Filed: 06/03/1999
  • Issued: 07/12/2005
  • Est. Priority Date: 06/03/1999
  • Status: Expired due to Fees
First Claim
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1. A processing chamber, comprising:

  • a chamber body;

    a substrate support member disposed within the chamber body;

    a retaining ring having one or more feedthrough holes formed therein;

    one or more feedthroughs disposed in the one or more feedthrough holes; and

    a chamber lid connected to the retaining ring by the one or more feedthroughs, the chamber lid comprising a first plate coupled to a second plate, wherein the first plate and the second plate form a temperature control channel, wherein a fluid inlet and a fluid outlet are formed in the chamber lid, and wherein the fluid inlet and the fluid outlet are fluidly coupled to the one or more feedthroughs.

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