Method of varying template dimensions to achieve alignment during imprint lithography

• US 6,916,585 B2
• Filed: 05/27/2003
• Issued: 07/12/2005
• Est. Priority Date: 07/16/2000
• Status: Expired due to Term

• Current Assignee: Board of Regents of the University of Texas System (University of Texas System)
• Original Assignee: Board of Regents of the University of Texas System (University of Texas System)
• Inventors: Bailey, Todd, Colburn, Matthew, Sreenivasan, Sidlgata V., Choi, Byung J.
• Primary Examiner(s): Young, Christopher G.
• Application Number:
  US10/446,192
• Publication Number:
  US 20040053146A1
• Time in Patent Office: 777 Days
• Field of Search: 430/22, 430/30, 430/322
• US Class Current: 430/22
• CPC Class Codes: B29C 2035/0827 using UV radiation
• CPC Class Codes: B29C 2043/025 forming a microstructure, i.e. fine patterning
• CPC Class Codes: B29C 35/0888 using transparant moulds
• CPC Class Codes: B29C 37/005 Compensating volume or shape change during moulding, in general
• CPC Class Codes: B29C 37/0053 Moulding articles characterised by the shape of the surface, e.g. ribs, high polish mould construction therefor B29C33/42; surface shaping of articles B29C59/00; by incorporating filler in or near the surface B29C70/64
• CPC Class Codes: B29C 43/003 characterised by the choice of material
• CPC Class Codes: B29C 43/021 characterised by the shape of the surface
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: B82Y 40/00 Manufacture or treatment of nanostructures
• CPC Class Codes: G03F 7/0002 Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
• CPC Class Codes: G03F 9/00 Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically G03F7/22 takes precedence; preparation of photographic masks G03F1/00; within photographic printing apparatus for making copies G03B27/00
• CPC Class Codes: Y10S 101/36 Means for registering or alignment of print plates on print press structure
• CPC Class Codes: Y10T 428/24802 Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]

Abstract

A method of determining and correcting alignment during imprint lithography process is described. During an imprint lithographic process the template may be aligned with the substrate by the use of alignment marks disposed on both the template and substrate. The alignment may be determined and corrected for before the layer is processed.

Claims

1. A method of aligning a template having template alignment marks and a substrate having substrate alignment marks, said method comprising:

locating a liquid between said template and said substrate;

placing said template and said substrate in superimposition; and

varying dimensions of said template to obtain a desired spatial relation between said template alignment marks and said substrate alignment marks concurrently with said template being in contact with a portion of said liquid.

2. The method as recited in claim 1, wherein varying said dimensions further includes applying a compressive force to said template.

3. The method as recited in claim 1, wherein varying said dimensions further includes applying a stretching force to said template.

4. The method as recited in claim 1, wherein said template further includes a first side and a second side positioned opposite to said first side, and varying said dimensions further includes applying a first force to said first side and a second force to said second side, with said first force and said second force being substantially the same.

5. The method as recited in claim 1, wherein said template further includes a first side and a second side positioned opposite to said first side, and varying said dimensions further includes applying a first force to said first side and a second force to said second side, with said first force and said second force being substantially different.

6. The method as recited in claim 1, wherein said template further includes a first side and a second side positioned opposite to said first side, and varying said dimensions further includes applying a first force to said first side, and second and third forces to said second side, with each of said forces being substantially the same.

7. The method as recited in claim 1, wherein said template further includes a first side and a second side positioned opposite to said first side, and varying said dimensions further includes applying a first force to said first side, and second and third forces to said second side, with said first, second, and third forces being substantially different.

8. The method as recited in claim 1, wherein said template further includes a first side and a second side positioned opposite to said first side, and varying said dimensions further includes applying a first force to said first side, and second and third forces to said second side, with said first force and said second force being substantially the same, and said first force and said third force being substantially different.

9. The method as recited in claim 1, wherein said template further includes a first side and a second side extended transversely to said first side, and varying said dimensions further includes applying a first force to said first side and a second force to said second side, with said first force and said second force being substantially the same.

10. The method as recited in claim 1, wherein said template further includes a first side and a second side positioned transversely to said first side, and varying said dimensions further includes applying a first force to said first side and a second force to said second side, with said first force and said second force being substantially different.

11. The method as recited in claim 1, wherein said template further includes a first side and a second side positioned transversely to said first side, and varying said dimensions further includes applying a first force to said first side, and second and third forces to said second side, with each of said forces being substantially the same.

12. The method as recited in claim 1, wherein said template further includes a first side and a second side extending transversely to said first side, and varying said dimensions further includes applying a first force to said first side, and second and third forces to said second side, with said first, second, and third forces being substantially different forces.

13. The method as recited in claim 1, wherein said template further includes a first side and a second side extending transversely to said first side, and varying said dimensions further includes applying a first force to said first side, and second and third forces to said second side, with said first force and said second force being substantially the same, and said first force and said third force being substantially different.

14. The method as recited in claim 1, wherein said template further includes a plurality of sides, and varying said dimensions further includes applying a plurality of forces to each of said plurality of sides, with each of said forces being substantially the same as the remaining forces of said plurality of forces.

15. The method as recited in claim 1, wherein said template further includes a plurality of sides, and varying said dimensions further includes applying a plurality of forces to each of said plurality of sides, with one of said plurality of forces differing from the remaining forces of said plurality of forces.

16. The method as recited in claim 1, wherein said template further includes a plurality of sides, and varying said dimensions further includes applying a plurality of forces to each side, with a first group of forces being applied to one side of said plurality of sides, wherein said first group of forces include a first force and a second force, with said first force and said second force being substantially different.

17. The method as recited in claim 1 further including impinging actinic radiation upon said liquid to solidify said liquid.

18. The method as recited in claim 1 further including impinging actinic radiation upon said liquid to form a solidified layer, and separating said template from said solidified layer.

19. A method of aligning a template having template alignment marks and a substrate having substrate alignment marks, said method comprising:

locating a liquid between said template and said substrate;

placing said template and said substrate in superimposition;

varying dimensions of said template to obtain a desired spatial relation between said template alignment marks and said substrate alignment marks by applying a plurality of forces to said template, concurrently with said template being in contact with a portion of said liquid; and

impinging actinic radiation upon said liquid to solidify said liquid.

20. The method as recited in claim 19, wherein varying said dimensions further includes applying a compressive force to said template.

21. The method as recited in claim 19, wherein varying said dimensions further includes applying a stretching force to said template.

22. The method as recited in claim 19 wherein varying said dimensions further includes applying a plurality of forces to a first side of said template, with a set of said plurality of forces differing from remaining forces of said plurality of forces.

23. The method as recited in claim 19 wherein impinging actinic radiation further includes forming a solidified layer from said liquid, with said method further including separating said template from said solidified layer.

24. A method of aligning a template having template alignment marks and a substrate having substrate alignment marks, said method comprising:

placing said template and said substrate in superimposition; and

controlling thermal properties of said substrate and said template to obtain a desired spatial relation between said template alignment marks and said substrate alignment marks.

25. The method as recited in claim 24 wherein controlling said thermal properties further includes altering a temperature of said template.

26. The method as recited in claim 25 wherein altering said temperature further includes enlarging said template.

27. The method as recited in claim 25 wherein altering said temperature further includes contracting said template.

28. The method as recited in claim 24 further including locating a liquid between said template and said substrate, and wherein controlling said thermal properties further includes varying dimensions of said template concurrently with said template being in contact with a portion of said liquid.

29. The method as recited in claim 28 further including impinging actinic radiation upon said liquid to form a solidified layer.

30. The method as recited in claim 29 further including separating said template from said solidified layer.