Component operating with bulk acoustic waves, and having asymmetric/symmetrical circuitry
First Claim
1. A component operating with bulk acoustic waves, comprising:
- an asymmetric first port which has a signal-carrying connection;
a symmetrical second port with a first and a second connection;
a first resonator having a first electrode, a second electrode and a first piezoelectric layer that is arranged between the first and the second electrode, the first resonator being connected to the signal-carrying connection of the first port and being connected to a reference ground potential;
an at least partially permeable coupling layer system having an alternating sequence of at least two λ
/4 mirror layers with a different acoustic impedance and a compensation layer which has a thickness of λ
/8;
a second resonator that is stacked one on top of the first resonator and is acoustically coupled to the first resonator via the coupling layer system, the second resonator having a third electrode, a fourth electrode and a second piezoelectric layer which is arranged between the third and the fourth electrode, the second resonator being connected between the first and the second connection of the second port.
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Abstract
A component operating with bulk acoustic waves has two Bulk Acoustic Wave (BAW) resonators that are stacked and are acoustically coupled to one another, with a first resonator being connected to an asymmetric port, and a second resonator being connected to a symmetrical port. The acoustic coupling is provided by a partially permeable coupling layer system, which has an alternating sequence of at least two λ/4 mirror layers with different acoustic impedance. The coupling layer system furthermore has a compensation layer, which has an approximate thickness of λ/8. The compensation layer according to the invention makes it possible to match any discrepancy in the phase difference (which is caused by reflections on the mirror layers) from the predetermined 180° between the connections of the symmetrical port to approximately 180°.
97 Citations
12 Claims
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1. A component operating with bulk acoustic waves, comprising:
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an asymmetric first port which has a signal-carrying connection;
a symmetrical second port with a first and a second connection;
a first resonator having a first electrode, a second electrode and a first piezoelectric layer that is arranged between the first and the second electrode, the first resonator being connected to the signal-carrying connection of the first port and being connected to a reference ground potential;
an at least partially permeable coupling layer system having an alternating sequence of at least two λ
/4 mirror layers with a different acoustic impedance and a compensation layer which has a thickness of λ
/8;
a second resonator that is stacked one on top of the first resonator and is acoustically coupled to the first resonator via the coupling layer system, the second resonator having a third electrode, a fourth electrode and a second piezoelectric layer which is arranged between the third and the fourth electrode, the second resonator being connected between the first and the second connection of the second port. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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Specification