Lateral microelectromechanical system switch

• US 6,917,268 B2
• Filed: 12/31/2001
• Issued: 07/12/2005
• Est. Priority Date: 12/31/2001
• Status: Active Grant

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Jahnes, Christopher V., Deligianni, Hariklia, Larson, Lawrence E., Lund, Jennifer L.
• Primary Examiner(s): DONOVAN, LINCOLN D
• Application Number:
  US10/035,840
• Publication Number:
  US 20030122640A1
• Time in Patent Office: 1,289 Days
• Field of Search: 335/78, 200/181, 361230-235, 257412-418, 257/424, 257/427
• US Class Current: 335/78
• CPC Class Codes: H01H 2001/0068 with multi dimensional movement, i.e. the movable actuator performing movements in at least two different directions
• CPC Class Codes: H01H 2001/0078 with parallel movement of the movable contact relative to the substrate
• CPC Class Codes: H01H 59/0009 making use of micromechanics

Abstract

A switch comprising a substrate, an elongated movable part, a pair of electrical contacts disposed at one side of said part, an actuation electrode disposed at the one side of the part and separated from the pair of electrical contacts, wherein the part, the contacts and the electrode are disposed on the substrate, wherein the elongated movable part is arranged and dimensioned such that the part is movable in a generally lateral direction toward the contacts; the movable part includes a central elongated member fixed to a head having an electrical contact disposed at the one side. One end of the movable part is attached to the substrate by means of various anchoring arrangements.

Claims

1. A switch, comprising:

a substrate;

an elongated movable part;

a pair of electrical contacts disposed at one side of said part;

an actuation electrode disposed at said one side of said part and separated from said pair of electrical contacts;

wherein said part, said contacts and said electrode are disposed on said substrate, wherein said elongated movable part is arranged and dimensioned such that said movable part is movable a lateral direction generally toward said contacts, and wherein said movable part includes a central elongated member fixed to a cylindrical-shaped head having an electrical contact disposed at said one side, said electrical contact contacting said pair of electrical contacts during a normal operation of said switch.

2. The switch as claimed in claim 1, wherein said central elongated member includes thin-film electrically conductive materials provided on an elongated insulating member.

3. The switch as claimed in claim 1, further comprising another pair of electrical contacts disposed at another side of said part opposite said one side.

4. The switch as claimed in claim 1, wherein said head includes another electrical contact disposed at another side of said part.

5. The switch as claimed in claim 1, wherein said head comprises a central insulating material, said contact being disposed at one end of said material.

6. The switch as claimed in claim 1, wherein said elongated insulating member comprises an insulator, the insulator being selected from the group consisting of SiO₂, SiN, Silicon Oxynitride, SiON, Al₂O₃, AlN, TiO₂, ZrO₂, HfO₂, Ta₂O₅, TaON, and other High k and Low k dielectric constant materials.

7. The switch has claimed in claim 1, wherein said head comprises an elastomeric material.

8. The switch as claimed in claim 1, wherein at least one of said electrical contacts is connected to a source of Rf signals.

9. The switch as claimed in claim 1, wherein said head comprises a central conductive material, and an insulating material disposed along a length of said conductive material.

10. The switch as claimed in claim 1, wherein said central elongated member includes thin-film electrically conductive materials provided on an elongated insulating member, and wherein said thin-film electrically conductive materials are selected from the group consisting of W, Ta, Ti, Cu, Ag, Al, Ni, Fe, NiFe, Co, Mo, Sn, and Pb.

11. The switch as claimed in claim 1, wherein said electrical contacts disposed at said one side are selected from the group consisting of Au, Pt, Pd, Phenium, Rutnenium, Rhodium and Iridium.

12. The switch as claimed in claim 1, wherein said activation electrode is selected from the group consisting of Ni, Fe, Co, Ag, Pt, Pd, Au, Cu, Ruthenium, and Rodium.

13. The switch as claimed in claim 1, further comprising an anchor, wherein said central elongated member has an end disposed at said anchor.

14. The switch as claimed in claim 1, further comprising another pair of electrical contacts being disposed at another side of said part.