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Lateral microelectromechanical system switch

  • US 6,917,268 B2
  • Filed: 12/31/2001
  • Issued: 07/12/2005
  • Est. Priority Date: 12/31/2001
  • Status: Active Grant
First Claim
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1. A switch, comprising:

  • a substrate;

    an elongated movable part;

    a pair of electrical contacts disposed at one side of said part;

    an actuation electrode disposed at said one side of said part and separated from said pair of electrical contacts;

    wherein said part, said contacts and said electrode are disposed on said substrate, wherein said elongated movable part is arranged and dimensioned such that said movable part is movable a lateral direction generally toward said contacts, and wherein said movable part includes a central elongated member fixed to a cylindrical-shaped head having an electrical contact disposed at said one side, said electrical contact contacting said pair of electrical contacts during a normal operation of said switch.

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