Self-test circuit and method for testing a microsensor
First Claim
1. Method of testing a capacitive-type microsensor, said method comprising the steps of:
- applying a first signal having a first voltage potential to an input of a microsensor during a non-test operating mode;
applying a second voltage signal having a second voltage potential different than the first voltage potential during a test mode, wherein the second voltage potential induces a change in electrostatic force in the microsensor as compared to the first voltage potential and the microsensor generates an output signal;
monitoring the output signal of the microsensor;
comparing the output signal to an expected value when the microsensor is in the test mode;
determining if the microsensor is functioning properly as a function of the comparison; and
setting a flag if the microsensor is determined not to be functioning properly.
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Abstract
A test circuit and method provide testing of a capacitive type microsensor. The method includes applying a first signal having a first voltage potential to an input of a microsensor during a non-test operating mode. The method also includes applying a second voltage signal having a second voltage potential different than the first voltage potential during a test mode. The second voltage potential induces a net differential electrostatic force in the microsensor. The method further includes the steps of monitoring an output signal of the microsensor, comparing the output signal to an expected value when the microsensor is in the test mode, and determining if the microsensor is functioning properly as a function of the comparison.
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Citations
16 Claims
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1. Method of testing a capacitive-type microsensor, said method comprising the steps of:
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applying a first signal having a first voltage potential to an input of a microsensor during a non-test operating mode;
applying a second voltage signal having a second voltage potential different than the first voltage potential during a test mode, wherein the second voltage potential induces a change in electrostatic force in the microsensor as compared to the first voltage potential and the microsensor generates an output signal;
monitoring the output signal of the microsensor;
comparing the output signal to an expected value when the microsensor is in the test mode;
determining if the microsensor is functioning properly as a function of the comparison; and
setting a flag if the microsensor is determined not to be functioning properly. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. Method of testing a capacitive-type microsensor, said method comprising the steps of:
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applying a first signal having a first voltage potential to an input of a microsensor during a non-test operating mode;
applying a second voltage signal having a second voltage potential different than the first voltage potential during a test mode, wherein the second voltage potential induces a change in electrostatic force in the microsensor as compared to the first voltage potential and the microsensor generates an output signal;
monitoring the output signal of the microsensor;
comparing the output signal to an expected value when the microsensor is in the test mode;
determining if the microsensor is functioning properly as a function of the comparison;
receiving an input voltage from a voltage source; and
dividing the input voltage into the first and second voltage potentials via a resistor divider network. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16)
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Specification