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Method for producing coated workpieces, uses and installation for the method

  • US 6,918,352 B2
  • Filed: 07/22/2002
  • Issued: 07/19/2005
  • Est. Priority Date: 06/13/1997
  • Status: Expired due to Fees
First Claim
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1. A system for implementing a method for producing workpieces coated by PECVD with a quality sufficient for epitaxy, comprising a vacuum recipient, a plasma discharge source operationally connected to said vacuum recipient so as to generate in said vacuum recipient a low voltage plasma discharge not of the cathode spot forming-type, a workpiece holder within said vacuum recipient, said plasma discharge source being configured to generate on said workpiece holder ions with an energy of below 15 eV, a heater for a substrate deposited on said workpiece holder, said heater being configured to be independently controllable from said plasma discharge source, a gas feed to said vacuum recipient from a gas tank containing a reactive gas, and a turbo-molecular pump operationally connected to said vacuum recipient to provide for a pressure in said vacuum recipient in a low pressure range suitable for epitoxial-coating quality.

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