Method for producing coated workpieces, uses and installation for the method

• US 6,918,352 B2
• Filed: 07/22/2002
• Issued: 07/19/2005
• Est. Priority Date: 06/13/1997
• Status: Expired due to Fees

• Current Assignee: Oerlikon Advanced Technologies AG
• Original Assignee: Unaxis Trading AG
• Inventors: Rosenblad, Carsten, Ramm, Jurgen, Von Känel, Hans
• Primary Examiner(s): Hassanzadeh, Parviz
• Application Number:
  US10/199,050
• Publication Number:
  US 20030005879A1
• Time in Patent Office: 1,093 Days
• Field of Search: 118/723.DC, 118/723.HC, 118/723.CB, 118/723.EB, 118/723.FI, 118/723.FE, 118/723.E, 117/92, 117/103, 117/108
• US Class Current: 118/723.0DC
• CPC Class Codes: C23C 16/503 using dc or ac discharges
• CPC Class Codes: C30B 25/02 Epitaxial-layer growth
• CPC Class Codes: C30B 25/105 by irradiation or electric discharge
• CPC Class Codes: C30B 29/52 Alloys
• CPC Class Codes: H01J 37/32018 Glow discharge

Abstract

A system and a method produce workpieces coated by PECVD with a quality sufficient for epitaxy. Included are a vacuum recipient, a plasma discharge source operationally connected to the vacuum recipient and a workpiece holder within the vacuum recipient, said plasma discharge source generating on said workpiece holder ions with an energy of below 15 eV. The plasma discharge source can be a low-voltage plasma discharge source in which at least one cathode is arranged within a cathode chamber coupled to the vacuum recipient by a diaphragm.

Claims

1. A system for implementing a method for producing workpieces coated by PECVD with a quality sufficient for epitaxy, comprising a vacuum recipient, a plasma discharge source operationally connected to said vacuum recipient so as to generate in said vacuum recipient a low voltage plasma discharge not of the cathode spot forming-type, a workpiece holder within said vacuum recipient, said plasma discharge source being configured to generate on said workpiece holder ions with an energy of below 15 eV, a heater for a substrate deposited on said workpiece holder, said heater being configured to be independently controllable from said plasma discharge source, a gas feed to said vacuum recipient from a gas tank containing a reactive gas, and a turbo-molecular pump operationally connected to said vacuum recipient to provide for a pressure in said vacuum recipient in a low pressure range suitable for epitoxial-coating quality.

2. The system of claim 1, wherein said low-voltage discharge source comprises at least one cathode within a cathode chamber, said cathode chamber being coupled to said vacuum recipient by a diaphragm.

3. The system of claim 1, wherein said workpiece holder is mounted in said recipient in an electrically insulated manner.

4. The system of claim 1, wherein said workpiece holder is connected to a biasing generator.

5. The system of claim 1, wherein said plasma discharge source comprises at least one cathode and at least one anode and wherein a wall of said vacuum recipient assumes the same electric potential as said anode.

6. The system of claim 1, wherein said plasma discharge source comprises at least one cathode and at least one anode and wherein said anode and said cathode are operationally connected to an electric supply generating at said cathode an electric potential which is between 10 and 80 V with respect to electric potential of said anode.

7. The system of claim 6, wherein said electric potential applied to said cathode is between 20 and 35 V with respect to said electric potential applied to said anode.

8. The system of claim 1, wherein said plasma discharge source comprises at least one cathode and at least one anode and wherein said workpiece holder is operationally connected to a biasing electric supply applying to said workpiece holder an electric potential, which is adjustable by at most ±

25 V with respect to an electric potential of said anode.

9. The system of claim 1, wherein said plasma discharge source comprises at least one cathode and at least one anode, said anode being formed by a wall of said vacuum recipient.

10. The system of claim 1, wherein said plasma discharge source comprises at least one cathode and at least one anode and wherein said anode is mounted within said recipient in an electrically isolated manner.

11. The system of claim 1, wherein said plasma discharge source comprises at least one cathode and at least one anode and wherein said workpiece holder is mounted within said recipient in an electrically isolated manner so that, in operation, said workpiece holder assumes an electric potential with respect to an electric potential of said anode, which is not more negative than −

25V.

12. The system of claim 11, wherein said workpiece holder assumes an electric potential of between −

3 V and −

15 V with respect to said electric potential of said anode.

13. The system of claim 1, wherein said workpiece holder is operationally connected to a biasing electric supply.

14. The system of claim 13, wherein said biasing electric supply generates at said workpiece holder an electric potential of between −

25 V and +25 V with respect to an electric potential of said anode.

15. The system of claim 14, wherein said supply generates at said workpiece holder said potential to be negative.

16. The system of claim 15, wherein said negative potential is between −

15 V and −

3 V.

17. The system of claim 1, wherein said plasma discharge source comprises an anode, an auxiliary anode and at least one cathode.

18. The system of claim 1, wherein said plasma discharge source comprises at least one cathode arranged in a cathode chamber, said cathode chamber being coupled to said recipient via a diaphragm and wherein there is provided an annular anode arranged within said recipient coaxially with an axis of said diaphragm.

19. The system of claim 18, wherein said anode is operationally connected to an electric supply generating at said anode an electric potential which is equal to or which is different from an electric potential of a wall of said recipient.

20. The system of claim 1, wherein a wall of said recipient is mounted in an electrically floating manner.

21. The system of claim 1, wherein a wall of said recipient is operationally connected via an impedance element onto an electric reference potential.

22. The system of claim 21, wherein said impedance element is a resistor element.

23. The system of claim 1, wherein said plasma discharge source comprises at least one cathode formed by an electron emitter and at least one anode and that said cathode and said anode are operationally connected to an electric supply supplying a voltage U_AK between said cathode and said anode to be

10 V≦

U_AK≦

80 V.

24. The system of claim 23, wherein said voltage U_AK is

20 V≦

U_AK≦

35 V.

25. The system of claim 1, wherein said plasma discharge source comprises at least one cathode and at least one anode arrangement and wherein said anode arrangement is operationally connected to an electric supply providing thereat a maximum electric potential and wherein further said workpiece holder is operationally connected to a further electric supply providing at said workpiece holder an electric potential defining an electric voltage U_S with respect to said maximum potential which is

−

25 V≦

U_S≦

+25 V.

26. The system of claim 25, wherein said voltage U_S is negative.

27. The system of claim 26, wherein said negative voltage U_S is

−

15 V≦

U_S−

3 V.

28. The system of claim 1, wherein said plasma discharge source comprises at least one cathode being a hot cathode.

29. The system of claim 1, wherein said plasma discharge source comprises at least one cathode mounted within a cathode chamber communicating with said recipient and further comprising a gas feed to said cathode chamber communicating with a working-gas tank.

30. The system of claim 29, wherein said working gas tank is filled with argon.

31. The system of claim 1, wherein said plasma discharge source comprises at least one cathode within a cathode chamber, said cathode chamber communicating with said recipient via a diaphragm and further comprising a magnet arrangement generating within said recipient a magnetic field substantially parallel to an axis of said diaphragm.

32. The system of claim 31, wherein said magnetic field within said recipient is substantially aligned around said axis.

33. The system of claim 31, wherein said magnet arrangement comprises at least one of permanent magnets and of electromagnets.

34. The system of claim 1, wherein said plasma discharge source comprises at least one electron-emitting cathode emitting an electron current of between 5 and 400 A.

35. The system of claim 34, wherein said current is between 20 and 100 A.

36. The system of claim 1, wherein said plasma discharge source generates within said recipient electrons with a maximum electron density at a predetermined locus and that said workpiece holder is mounted adjacent to said locus.

37. The system of claim 1, wherein said plasma discharge source comprises at least one cathode mounted within a cathode chamber, said cathode chamber communicating with said recipient via a diaphragm defining an axis, said workpiece holder being substantially aligned concentrically to said axis.

38. The system of claim 1, wherein said gas tank comprises at least one of silicon containing, germanium containing, gallium containing gas.

39. The system of claim 38, wherein said gas tank further contains hydrogen.

40. The system of claim 1, wherein said plasma discharge source is operationally connected to a DC generator.