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Resistive heaters and uses thereof

  • US 6,919,543 B2
  • Filed: 11/28/2001
  • Issued: 07/19/2005
  • Est. Priority Date: 11/29/2000
  • Status: Expired due to Term
First Claim
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1. A method of making a resistive heater having a controlled resistivity, having a substrate, a resistive heating layer, and a power source, comprising the steps of:

  • determining a desired resistivity of said resistive heater layer;

    selecting a solid metallic component and at least one reactant gas;

    selecting a proportion of said solid metallic component and said at least one reactant gas, so that when combined said desired resistivity of said resistive heater layer results;

    promoting reaction of at least a portion of said solid metallic component and said reactant gas by melting said at least a portion of said solid metallic component resulting in a stream of molten droplets, and providing controlled introduction of said reactant as to said molten droplets, thereby combining said molten droplets and said reactant gas, resulting in a free metal and reaction product;

    depositing said combined free metal and reaction product on said substrate to form said resistive heater layer having said desired resistivity; and

    providing power to said resistive heater layer.

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