Resistive heaters and uses thereof
First Claim
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1. A method of making a resistive heater having a controlled resistivity, having a substrate, a resistive heating layer, and a power source, comprising the steps of:
- determining a desired resistivity of said resistive heater layer;
selecting a solid metallic component and at least one reactant gas;
selecting a proportion of said solid metallic component and said at least one reactant gas, so that when combined said desired resistivity of said resistive heater layer results;
promoting reaction of at least a portion of said solid metallic component and said reactant gas by melting said at least a portion of said solid metallic component resulting in a stream of molten droplets, and providing controlled introduction of said reactant as to said molten droplets, thereby combining said molten droplets and said reactant gas, resulting in a free metal and reaction product;
depositing said combined free metal and reaction product on said substrate to form said resistive heater layer having said desired resistivity; and
providing power to said resistive heater layer.
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Abstract
A metallic resistive heater and a method of production are described. The resistive heater has a metallic component that is electrically conductive (i.e. has low resistivity) and an oxide, nitride, carbide, and or boride derivative of the metallic component that is electrically insulating (i.e., has high resistivity). The resistivity is controlled by controlling the amount of oxide, nitride, carbide, and boride formation during the deposition of the metallic component and the derivative.
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Citations
18 Claims
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1. A method of making a resistive heater having a controlled resistivity, having a substrate, a resistive heating layer, and a power source, comprising the steps of:
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determining a desired resistivity of said resistive heater layer;
selecting a solid metallic component and at least one reactant gas;
selecting a proportion of said solid metallic component and said at least one reactant gas, so that when combined said desired resistivity of said resistive heater layer results;
promoting reaction of at least a portion of said solid metallic component and said reactant gas by melting said at least a portion of said solid metallic component resulting in a stream of molten droplets, and providing controlled introduction of said reactant as to said molten droplets, thereby combining said molten droplets and said reactant gas, resulting in a free metal and reaction product;
depositing said combined free metal and reaction product on said substrate to form said resistive heater layer having said desired resistivity; and
providing power to said resistive heater layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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Specification