Electromechanical memory array using nanotube ribbons and method for making same
First Claim
1. An electromechanical circuit, comprising:
- a structure having electrically conductive traces and supports extending from a surface of a substrate; and
nanotube ribbons suspended by the supports that cross the electrically conductive traces, wherein each ribbon has a cross-sectional area that is substantially rectangular.
4 Assignments
0 Petitions
Accused Products
Abstract
Electromechanical circuits, such as memory cells, and methods for making same are disclosed. The circuits include a structure having electrically conductive traces and supports extending from a surface of the substrate, and nanotube ribbons suspended by the supports that cross the electrically conductive traces, wherein each ribbon comprises one or more nanotubes. The electro-mechanical circuit elements are made by providing a structure having electrically conductive traces and supports, in which the supports extend from a surface of the substrate. A layer of nanotubes is provided over the supports, and portions of the layer of nanotubes are selectively removed to form ribbons of nanotubes that cross the electrically conductive traces. Each ribbon includes one or more nanotubes.
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Citations
36 Claims
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1. An electromechanical circuit, comprising:
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a structure having electrically conductive traces and supports extending from a surface of a substrate; and
nanotube ribbons suspended by the supports that cross the electrically conductive traces, wherein each ribbon has a cross-sectional area that is substantially rectangular. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. An electromechanical circuit, comprising:
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a structure having electrically conductive traces and supports extending from a surface of a substrate; and
nanotube ribbons suspended by the supports that cross the electrically conductive traces, wherein each ribbon is flat. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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25. An electromechanical circuit, comprising:
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a structure having electrically conductive traces and supports extending from a surface of a substrate; and
nanotube ribbons suspended by the supports that cross the electrically conductive traces, wherein each ribbon comprises a plurality of nanotubes. - View Dependent Claims (26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36)
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Specification