Acceleration sensor
First Claim
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1. An acceleration sensor comprising:
- a displacing section;
a fixed section provided adjacent to said displacing section;
a connecting portion for connecting said displacing section to said fixed section so that said displacing section can displace;
a weight connected to said displacing section below;
a pedestal which is disposed adjacent to said weight;
a pedestal joint layer connecting said pedestal and said fixed section; and
a displacement detector for detecting a displacement of said displacing section;
wherein said weight includes an upper surface peripheral portion that opposes a control surface formed on a lower surface of said fixed section so that when an acceleration with a certain degree of magnitude is applied to said weight, said upper surface peripheral portion comes into contact with said control surface to control displacement, andwherein a weight joint layer made of the same material as that of the pedestal joint layer is provided between the weight and the displacing section, and said weight and said displacing section are joined together by said weight joint layer.
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Abstract
An acceleration sensor in a connecting portion connects a displacing section to a fixed section and a weight is connected to the displacing section from below. A pedestal is disposed adjacent to the weight and is connected to the fixed section by a pedestal joint layer so a displacement of the displacing section can be detected. The weight has a peripheral portion of its upper surface opposite a control surface on a lower surface of the fixed section to come into contact therewith upon a given magnitude of acceleration of the weight. A weight joint layer made of the same material as that of the pedestal joint layer joins the weight and the displacing section.
92 Citations
8 Claims
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1. An acceleration sensor comprising:
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a displacing section;
a fixed section provided adjacent to said displacing section;
a connecting portion for connecting said displacing section to said fixed section so that said displacing section can displace;
a weight connected to said displacing section below;
a pedestal which is disposed adjacent to said weight;
a pedestal joint layer connecting said pedestal and said fixed section; and
a displacement detector for detecting a displacement of said displacing section;
wherein said weight includes an upper surface peripheral portion that opposes a control surface formed on a lower surface of said fixed section so that when an acceleration with a certain degree of magnitude is applied to said weight, said upper surface peripheral portion comes into contact with said control surface to control displacement, and wherein a weight joint layer made of the same material as that of the pedestal joint layer is provided between the weight and the displacing section, and said weight and said displacing section are joined together by said weight joint layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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Specification