Method of manufacturing a thin film battery
First Claim
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1. A method of manufacturing a thin film battery in a chamber comprising a magnetron cathode, the method comprising:
- (a) providing a target on the magnetron cathode in the chamber;
(b) placing a substrate comprising mica facing the target in a chamber;
(c) introducing a process gas into the chamber;
(d) energizing the process gas to form a plasma to sputter the target to deposit target material on the substrate;
(e) delivering an ion flux from the plasma to the substrate of from about 0.1 to about 5 mA/cm2 to enhance crystallization of the target material deposited on the substrate; and
(f) exhausting the process gas from the chamber.
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Abstract
In a method of manufacturing a thin film battery in a chamber, a target comprising LiCoO2 is provided on a magnetron cathode in the chamber, and a substrate is placed facing the target. A process gas is introduced into the chamber and the process gas is energized to form a plasma to sputter the target to deposit LiCoO2 on the substrate. An ion flux of from about 0.1 to about 5 mA/cm2 is delivered from the plasma to the substrate to enhance the crystallinity of the deposited LiCoO2 material on the substrate. The process gas is exhausted from the chamber. The target can also be made of other materials.
78 Citations
29 Claims
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1. A method of manufacturing a thin film battery in a chamber comprising a magnetron cathode, the method comprising:
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(a) providing a target on the magnetron cathode in the chamber;
(b) placing a substrate comprising mica facing the target in a chamber;
(c) introducing a process gas into the chamber;
(d) energizing the process gas to form a plasma to sputter the target to deposit target material on the substrate;
(e) delivering an ion flux from the plasma to the substrate of from about 0.1 to about 5 mA/cm2 to enhance crystallization of the target material deposited on the substrate; and
(f) exhausting the process gas from the chamber. - View Dependent Claims (2, 3, 4, 5)
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6. A method of manufacturing a thin film battery in a chamber comprising a magnetron cathode, the method comprising:
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(a) providing a target on the magnetron cathode in the chamber, the target capable of depositing on a substrate, a lithium metal oxide film;
(b) placing a substrate facing the target in a chamber;
(c) introducing a process gas into the chamber;
(d) energizing the process gas to form a plasma to sputter the target to deposit the lithium metal oxide film on the substrate;
(e) delivering an ion flux from the plasma to the substrate of from about 0.1 to about 5 mA/cm2 to form a crystalline lithium metal oxide film on the substrate; and
(f) exhausting the process gas from the chamber. - View Dependent Claims (7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. A method of manufacturing a thin film battery in a chamber comprising a magnetron cathode, the method comprising:
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(a) providing a target on the magnetron cathode in the chamber, the target capable of depositing on a substrate, a LiCoOx film;
(b) placing a substrate facing the target in a chamber;
(c) introducing a process gas into the chamber;
(d) energizing the process gas with RF of DC energy with RF or DC energy to form a plasma to sputter the target to deposit the LiCoOx film on the substrate;
(e) delivering an ion flux from the plasma to the substrate of from about 0.1 to about 5 mA/cm2 to form a crystalline LiCoOx film on the substrate; and
(f) exhausting the process gas from the chamber. - View Dependent Claims (20, 21, 22, 23, 24, 25, 26, 27, 28, 29)
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Specification