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Method of manufacturing a thin film battery

  • US 6,921,464 B2
  • Filed: 08/12/2003
  • Issued: 07/26/2005
  • Est. Priority Date: 09/07/2000
  • Status: Expired due to Term
First Claim
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1. A method of manufacturing a thin film battery in a chamber comprising a magnetron cathode, the method comprising:

  • (a) providing a target on the magnetron cathode in the chamber;

    (b) placing a substrate comprising mica facing the target in a chamber;

    (c) introducing a process gas into the chamber;

    (d) energizing the process gas to form a plasma to sputter the target to deposit target material on the substrate;

    (e) delivering an ion flux from the plasma to the substrate of from about 0.1 to about 5 mA/cm2 to enhance crystallization of the target material deposited on the substrate; and

    (f) exhausting the process gas from the chamber.

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