×

Organic electroluminescent device with self-aligned insulating fillers and method for manufacturing the same

  • US 6,921,627 B2
  • Filed: 10/31/2003
  • Issued: 07/26/2005
  • Est. Priority Date: 02/15/2001
  • Status: Expired due to Term
First Claim
Patent Images

1. A method for manufacturing an organic electroluminescent device, comprising the steps of:

  • forming a conductive layer on an insulating substrate;

    forming a photoresist pattern layer having a plurality of striped elements a first direction on said conductive layer;

    etching said conductive layer by a dry etching process using a first plasma gas and using said photoresist pattern layer as an etching mask in a chamber to form striped lower electrodes;

    depositing an insulating layer on said photoresist pattern layer and on said insulating substrate between said lower electrodes by a plasma deposition process using a second plasma gas in said chamber;

    performing a lift-off operation upon said photoresist pattern layer to remove said photoresist pattern layer and a part of said insulating layer on said photoresist pattern layer;

    forming at least one organic thin film layer including an emitting layer on said insulating layer and said lower electrodes; and

    forming a plurality of striped upper electrodes on said organic thin film layer along a second direction different from said first direction.

View all claims
  • 3 Assignments
Timeline View
Assignment View
    ×
    ×