Organic electroluminescent device with self-aligned insulating fillers and method for manufacturing the same
First Claim
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1. A method for manufacturing an organic electroluminescent device, comprising the steps of:
- forming a conductive layer on an insulating substrate;
forming a photoresist pattern layer having a plurality of striped elements a first direction on said conductive layer;
etching said conductive layer by a dry etching process using a first plasma gas and using said photoresist pattern layer as an etching mask in a chamber to form striped lower electrodes;
depositing an insulating layer on said photoresist pattern layer and on said insulating substrate between said lower electrodes by a plasma deposition process using a second plasma gas in said chamber;
performing a lift-off operation upon said photoresist pattern layer to remove said photoresist pattern layer and a part of said insulating layer on said photoresist pattern layer;
forming at least one organic thin film layer including an emitting layer on said insulating layer and said lower electrodes; and
forming a plurality of striped upper electrodes on said organic thin film layer along a second direction different from said first direction.
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Abstract
In an organic electroluminescent device, a plurality of striped lower electrodes are formed on an insulating substrate along a first direction, and a plurality of fillers made of amorphous carbon are filled between the lower electrodes. Organic thin film layers including an emitting layer is formed on the fillers and the lower electrodes. A plurality of striped upper electrodes are formed on the organic thin film layer along a second direction different from the first direction.
20 Citations
14 Claims
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1. A method for manufacturing an organic electroluminescent device, comprising the steps of:
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forming a conductive layer on an insulating substrate;
forming a photoresist pattern layer having a plurality of striped elements a first direction on said conductive layer;
etching said conductive layer by a dry etching process using a first plasma gas and using said photoresist pattern layer as an etching mask in a chamber to form striped lower electrodes;
depositing an insulating layer on said photoresist pattern layer and on said insulating substrate between said lower electrodes by a plasma deposition process using a second plasma gas in said chamber;
performing a lift-off operation upon said photoresist pattern layer to remove said photoresist pattern layer and a part of said insulating layer on said photoresist pattern layer;
forming at least one organic thin film layer including an emitting layer on said insulating layer and said lower electrodes; and
forming a plurality of striped upper electrodes on said organic thin film layer along a second direction different from said first direction. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A method for manufacturing an organic electroluminescent device, comprising the steps of:
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forming a conductive layer on an insulating substrate;
forming a photoresist pattern layer having a plurality of striped elements alone a first direction on said conductive layer;
etching said conductive layer by a dry etching process using gas including hydrocarbon gas and using said photoresist pattern layer as an etching mask in a chamber to form striped lower electrodes, and subsequently depositing an insulating layer on said photoresist pattern layer and on said insulating substrate between said lower electrodes by a plasma deposition process using said gas including hydrocarbon gas in said chamber;
performing a lift-off operation upon said photoresist pattern layer to remove said photoresist pattern layer and a part of said insulating layer on said photoresist pattern layer, forming at least one organic thin film layer including an emitting layer on said insulating layer and said lower electrodes; and
forming a plurality of striped upper electrodes on said organic thin film layer along a second direction different from said first direction.
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14. A method for manufacturing an organic electroluminescent device, comprising the steps of:
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forming a conductive layer on an insulating substrate;
forming a photoresist pattern layer having a plurality of striped elements along a first direction on said conductive layer;
etching said conductive layer by a dry etching process using a gas including halide gas and using said photoresist pattern layer as an etching mask in a chamber to form striped lower electrodes;
depositing an insulating layer on said photoresist pattern layer and on said insulating substrate between said lower electrodes by a plasma deposition process using a gas including hydrocarbon gas in said chamber;
performing a lift-off operation upon said photoresist pattern layer to remove said photoresist pattern layer and a part of said insulating layer on said photoresist pattern layer;
forming at least one organic thin film layer including an emitting layer on said insulating layer and said lower electrodes; and
forming a plurality of striped upper electrodes on said organic thin film layer along a second direction different from said first direction.
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Specification