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Active cantilever for nanomachining and metrology

  • US 6,923,044 B1
  • Filed: 03/07/2002
  • Issued: 08/02/2005
  • Est. Priority Date: 03/08/2001
  • Status: Expired due to Fees
First Claim
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1. A probe suitable for use in a scanning probe microscope system comprising:

  • a main body portion; and

    a cantilever assembly comprising;

    a primary cantilever having a fixed end connected to the main body portion and having a free end;

    a scanning tip disposed proximate the free end of the primary cantilever; and

    an assembly head flexibly connected to the main body portion, the assembly head having plural preset positions relative to the primary cantilever, the assembly head comprising one or more interaction structures configured for coactive interaction with the primary cantilever, each interaction structure associated with one of the preset positions and selectably aligned with the primary cantilever, the assembly head having a position locking arrangement to releasably position the assembly head into one of the preset positions wherein its associated interaction structure is brought into alignment with the primary cantilever, wherein operation of the primary cantilever is affected by characteristics of the associated interaction structure.

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